products
F Series
The MODUBATH® F
Series will significantly reduce acid consumption while providing continuous
1.0 to 0.2 micron filtration for reduced particle count & improved
yields. The F Series maintains ±1°C control; 0.4°C under certain
conditions. The F Series offers many available options to match your process
needs.
Options
- RCe Series Temperature Control Recirculator
- C21b Process Controller/Timer
- Nitrogen Manifold System
- 1/3hp or 1/2hp pump motor
- Stainless Steel construction
- Flow Sensor
Applications
- Etching and Positive Resist Developing
| Features |
Benefits |
| 360° serrated overflow weir |
Helps to efficiently remove
particulates which improve yields |
| Uniform flow return system |
Creates consistent laminar flow
across every wafer for consistent process results |
System
Specifications |
| Operating Range |
l model - 10-60° C |
| h model - 10-80° C |
| Temperature Control |
± 1.0° C (depending on controller) |
| Bath Liquid Stability |
Internal gradients ± 0.5° C |
Facility
Requirements |
| Electrical |
120VAC, 50/60Hz, 1Ø , 2A |
Materials of
Construction |
| Process Module |
NPP (l model) or PVDF (h model) |
| Pump/Filter Housing |
NPP (l model) or PVDF (h model) |
| Temperature Control Coils |
PFA |
| O-Rings |
Viton (standard, other materials available) |
| Drain Valve |
Teflon |
| Cover |
Clear PVC |
| Model |
Inside Dimension (ID)
L x W x D (in) |
Deck Cutout
L x W x D (in) |
Deck Area
L x W (in) |
| F16 |
7.75
x 7.75 x 7.25 |
15.50
x 10.25 x 16.75 |
17.25
x 12.75 |
| F18 |
12.00
x 11.00 x 10.00 |
19.88
x 14.00 x 18.25 |
22.00
x 16.75 |
| F24 |
11.00
x 7.50 x 7.25
|
18.50
x 10.25 x 16.75
|
20.25
x 12.75
|
| F25 |
13.00
x 7.50 x 7.25 |
20.25
x 10.25 x 16.75 |
22.00
x 12.75 |
| F26 |
16.00
x 7.50 x 7.25 |
23.75
x 10.25 x 16.75 |
25.25
x 12.25 |
| F28 |
21.50
x 11.50 x 11.50 |
28.75
x 15.50 x 17.25 |
31.00
x 18.25 |
|
