products
MSD Series - Direct Megasonic System
 The Modutek MSD Series of Direct Megasonic Systems
offers the newest and best choice for semiconductor wafer, hard disk, and
flat panel cleaning, etch and strip applications. With the industry's only
Teflon-coated transducer plate and Modutek's MSD Series goes where no one
else can! MSD Series has the ability to remove particles down to
0.1µm.
Applications
Materials of
Construction |
| Process Vessel |
NPP, PVDF, or electropolished 316SS |
Other
materials available upon request |
System
Specifications |
| Operating Temp |
up to 70° C |
| Particle Removal |
to 0.1m m |
| Transducers |
Number required depends on configuration |
| Individual transducers rated up to 300W each |
Transducer
Examples: |
1 x 150mm uses 4 transducers |
| 1 x 200mm uses 6 transducers |
Configuration |
| Style |
Overflow/Recirculating |
| Quick Dump Rinsers |
| Static |
| Standard Sizes |
single and dual 150mm |
| single and dual 200mm |
| single 300mm |
Custom
Sizes Available |
|
