products
 The MSI Series -Indirect Megasonic System
The MSI Series of Indirect Megasonic Systems offers the
newest and best choice for semiconductor wafer, hard disk and flat panel
cleaning, etch and strip applications. In head-to-head tests with other
Megasonic brands, Modutek's MSI Series comes out on top. Modutek's MSI Series
has the ability to remove tough 0.1µm particles and operate at temperatures
up to 160°C.
Applications
Materials of
Construction |
| Inner Vessel |
GE124 Quartz |
| Outer Vessel |
NPP, PVDF, or electropolished 316SS |
| Process Fittings |
Quartz & Teflon Flaretek style |
Other
materials available upon request |
System
Specifications |
| Operating Temp |
up to 160° C |
| Particle Removal |
to 0.1m |
| Transducers |
Number required depends on configuration |
| Individual transducers rated up to 300W each |
Configuration |
| Style |
Overflow/Recirculating |
| Quick Dump Rinsers |
| Static |
| Standard Sizes |
single and dual 150mm |
| single and dual 200mm |
| single 300mm |
Custom
Sizes Available |
 |
