products
 Nb Series - Silicon Nitride Etch Bath
The
Modutek Nb Series silicon nitride
bath is engineered to provide unparalleled process control, safety, and
flexibility. This is accomplished by creating a two tiered diagnostic system which
monitors the temperature while maintaining the acid to water ratio through
D.I. water supplementation. With our new remote metering system the Nb is easier to install and
service in new or existing process stations.
Options
- Model C1815a PCT
- Process & Vapor thermocouples
- Liquid level sensor kit
- Drain (Tube, Flaretek-style)
- Drain Adapter (½" NPT, ¾" NPT, & ¾" Flaretek versions)
- Aspirator Drain (water assisted drain)
- Remote Mount Operator Switch (Timer)
- Remote Mount Audio Alarm
- Autolid
- Custom vessel sizes
| Features |
Benefits |
| 360° N2 purged housing
seal |
Reduces acid penetration of the
heating element |
| Remote metering system |
Enhances both ease of installation
and repair of new or existing wet station configurations |
| Vapor thermocouple |
Controls chemical boiling (no
"bumping") |
| Bond 5-side heating element |
Greater uniformity and faster
heating |
Materials of
Construction |
| Process Vessel |
Semiconductor grade, flame-polished, quartz |
| Housing |
UL-94 VO rated FRPP |
| Refluxor |
PVDF with Teflon tubing |
| Insulation |
High density alumina silica fiber rated to 1260° C |
| Heater |
High temperature, etched foil |
| Safety thermal switch |
Normally closed bimetallic switch opens at 205° C ± 10° C,
250VAC, 1Amp (100,000 cycles) |
| Overtemperature thermocouple |
J-type, iron-constantan, twisted and shielded,
20 gauge |
System
Specifications |
| Applications |
Silicon Nitride Etch |
| Chemical usage |
H2O & H3PO4 |
| Operating temperature range |
30° - 180° C |
| Process temperature control |
± 0.5° C (depends on controller and process) |
| Heat-up rate |
2-3° C per minute
(rate affected by size of system, fluid, etc.) |
| One year
warranty |
Facility
Requirements |
| Electrical |
208VAC, 50/60Hz, 1Ø (Current requirements
depend on bath size) |
| Nitrogen |
15 psi, 0.25cfm |
| DI Water |
10-15 psi, 0.5 gpm |
| City water (or chilled water) |
10-15 psi, 2 gpm. |
| Model |
Inside Dimension (ID)
L x W x D (in) |
Deck Cutout
L x W x D (in) |
Deck Area
L x W (in) |
Heater
(kW) |
| Nb16 |
7.75
x 7.75 x 9.81 |
10.13
x 10.13 x 10.00 |
11.63
x 11.63 |
2.2 |
| Nb18 |
12.00
x 11.00 x 11.69 |
14.38
x 13.38 x 11.88 |
15.88
x 14.88 |
4.2 |
| Nb24 |
11.50
x 7.50 x 7.81 |
13.88
x 9.88 x 8.00 |
15.38
x 11.38 |
2.5 |
| Nb25 |
13.50
x 7.50 x 8.81 |
15.88
x 9.88 x 9.00 |
17.38
x 11.38 |
2.5 |
| Nb26 |
16.00
x 8.00 x 9.81 |
18.38
x 10.38 x 10.00 |
19.88
x 11.88 |
4.0 |
| Nb28 |
21.50
x 11.50 x 11.69 |
23.88
x 13.88 x 11.88 |
25.38
x 15.38 |
7.0 |
| Nb112 |
17.88
x 10.75 x 16.00 |
20.25
x 13.13 x 17.69 |
21.75
x 14.63 |
9.0 |
|
