products

Wet Process Components and Services

Over the last 20 years, Modutek has established itself as a leader in providing wet process components to the semiconductor, hard disk and flat panel industries.  Here is a look at our products.

• Process Stations
• DR - Dump Rinse
• F Series - Constant Temperature Filter Etch
• Megasonics
  • MSI Series - Indirect Megasonic System
  • MSD Series - Direct Megasonic System
  • MSG Series - Megasonic Generators
• Qa Series - Quartz Constant Temperature Bath
• QFa Series - High Temp. Recirculating Bath
• Nb Series - Silicon Nitride Etch Bath
• RCe Series - Temperature Control Recirculation
• Chemfeed Series - Chemical Injections System
• Controllers
• Neutralizers
• Sysmax

services

• CNC Capability
• Temperature Bath Rebuilds
• Process Station Upgrades
• Plastic Fabrication
• Preventative Maintenance Program
• Pneumatic Agitation Systems
• Wafer Transfer System (TAS units)
• Vacuum Etch System
• Spin Process System (SPS system)
• PLC