Nitride Etch Baths

Nb SERIES

SILICON NITRIDE ETCH BATH

Nitride Bath with DI water metering systemThe Nb Series silicon nitride etch bath is engineered to provide unparalleled process control, safety and flexibility. This is accomplished by creating a two-tired diagnostic system which monitors the temperature while maintaining the acid to water ratio through D.I. water supplementation. With our new remote metering system, the Nb is easier to install and service in new or existing process stations.

More Information

Benefits Include:

  • Nitride Etch Uniformity
  • Controlled Nitride Etching
  • Controls chemical boiling (no “bumping”)
  • Remote DI water metering system

Features Include:

Nitride Bath with condensing refluxor

  • Vapor thermocouple
  • Etched-foil resistance heater
  • Semiconductor grade quartz process vessel
  • PVDF or Teflon refluxor with safety cover
  • Ease of installation and repair of new or existing wet station configurations
  • Uniformity heat transfer

System Specifications:

Etch station installed Nitride Bath

  • Application: silicon nitride etch
  • Chemical usage: H20, H3PO4
  • Operating temperature range: 30 – 180º C
  • Process temperature control: ± 0.5º C
  • Heat-up rate: 2-3º C per minute (rate affected by size of system)
  • Vapor thermocouple for chemical boiling control
  • PVDF refluxor with Teflon® cooling coils
  • One year warranty

Options:

  • Auto cover (pneumatically actuated)
  • Aspirator valve system
  • Teflon® gravity drain system
  • Remote operation timer switches
  • Model C1815a process controller / timer
  • RS232 Interface

Facility Requirements:

  • Electrical: 208 VAC, 50/60 Hz, 1 Ø, 15 amps
  • Nitrogen: 15 PSI, 0.25 cfm
  • D.I. water: 10-15 psi, 0.5 gpm
  • City water (or chilled water): 10-15 psi, 2 gpm

Construction Materials:

  • Process Vessel: Semiconductor Grade Quartz
  • Housing (plastic enclosure): flame retardant stress-relieved polypropylene
    UL-94 V-O rated
  • Process thermocouple: J-type Teflon® encapsulated

Nb Series – Dimensions

DIMENSIONS
Model Nb16in. (mm) Nb16-HVin. (mm) Nb18in. (mm) Nb24in. (mm) Nb25in. (mm) Nb26in. (mm) Nb28in. (mm)
A1 x B 7.75 x 7.75(197 x 197) 9.87 x 8.62(251 x 219) 12.0 x 11.0(305 x 279) 11.5 x 7.5(292 x 190) 13.5 x 7.5(343 x 190) 16.0 x 8.0(406 x 203) 12.5 x 11.5(317 x 292)
C x D 10.06 x 10.06(256 x 256) 12.19 x 10.94(310 x 278) 14.31 x 13.31(363 x 338) 13.75 x 9.75(349 x 248) 15.81 x 9.81(402 x 249) 18.31 x 10.31(465 x 262) 23.81 x 13.81(605 x 351)
E x F 11.31 x 11.12(287 x 282) 13.43 x 13.25(341 x 337) 15.56 x 14.37(395 x 365) 15.06 x 11.12(383 x 282) 17.06 x 11.12(433 x 282) 19.56 x 11.37(497 x 289) 25.31 x 15.12(643 x 384)
G2 9.81 (249) 11.0 (279) 11.0 (279) 7.81 (198) 8.81 (224) 9.81 (249) 12.69 (322)
H3 15.5 (394) 15.5 (394) 18.75 (476) 15.25 (387) 15.25 (387) 15.75 (400) 18.37 (467)
J4 11.37 (289) 12.56 (319) 13.25 (337) 9.37 (238) 10.37 (263) 11.37 (289) 14.25 (362)

Tolerance ± .06 (1.5)
Model nomenclature: model code, number of cassettees and size of cassettes. Eg: Nb26 (Nb series 2-6″)
1 Actual vessel opening is less 0.25″ to accommodate the refluxor.
2 Vessel depth does not include the refluxor.
3 Measure with refluxor lid open.
4 Measured without drain plumbing.

NB-MATRIX-QUARTZ-ASSY