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Two Position Transfer Agitation System
A fully automated
two-position transfer system with adjustable vertical agitation stroke and speed in the process
tank Microprocessor-based controller with operator access console.
This unit is readily adaptable to existing sinks where
interior space maybe limited.
FEATURES:
- Reduced operator handling
- Process repeatability ensures consistent results
- Programmable vertical agitation stroke
- High throughput
- Various size wafers/sidestrokes can be accommodated
- Microprocessor-based system offers reliable and precise
process control
- Modular design for minimal downtime
- Economical cost
- Installation in current sink (with minor modification)
TYPICAL OPERATION:
 The operator programs the process parameters through the operator access console. The operator loads die wafer cassettes and presses the START button to initiate the cycle. The cassettes are transferred into process tank(
# 1), and are subjected to continuous vertical agitation at the desired stroke and frequency for a preset time period. After time expires, the cassettes are automatically transferred to
the rinse tank(#2). When processing at tank( #2) is completed, the end of the cycle is signaled by an audible alarm. The operator presses the RESET button and the cassettes are transferred to the unload position. The operator removes the cassettes, and the system is now ready for the Next run
SPECIFICATIONS:
Production capacity:
Up to and including two (2) cassettes of 150MM wafers
Agitation cycle: vertical (up and down)
Process time: 0-9999 see
Rinse time: 0-9999 seconds
Quick dump cycle: 0-99 cycles
Electrical power- 120 VAC 50/60 Hz, 2A (other voltage available)
Compressed air or N2 pressure: 80 psi/20cfm.
OPTIONS:
Custom wafer/substrate cassette carriers
Dump riser controls and valves |
