 Custom designed
units are a specialty of the Sysmax Corporation and can
be manufactured to your specific needs. The unit
shown below is an example of a custom process
station. This unit is a four (4) station system with remote
chemical fill and a robotic capability of two (2) 150MM
cassettes or one (1) 200MM cassette. This unit
includes a Megasonic Rinse Station and an auto lid
to minimize heat loss and evaporation of chemistry. This
is one example of special features provided.
Filtered etch modules and re-circulation can also be
added to systems to meet your process needs.
Give us your requirements and we will build a
system to fit your needs.
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