Modutek Corporation
Phone (408) 362-2000 | Fax (408) 362-2001 6387 San Ignacio Avenue, San Jose, CA 95119 USA
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Sysmax SAS SystemsCAS SystemsTAS SystemsSPS SystemsVES SystemsCustom Units

Sysmax - "SAS-10-2" (single agitation system)

Air is the only utility required

  • Handles 2-standard wafer cassettes through (150 mm) Automation conversion time less than 30 minutes.
  • Horizontal or vertical stroke capability Controlled agitation speed and stroke.  Unload position above etch bath.  
  • Remote 'start' 'reset' buttons.
  • Stroke variable from 0" to customer required specification(8" is standard).
  • One year guarantee.
  • Only one 1/4" air or N2 line is needed to connect the SAS for operation. Pressure from 60 to 80 psi is all the utility required.

These are just some of the advantages the SAS unit has to offer.  

Cassettes are loaded, 'start' is activated, Wafers descend into the process bath and move up and down per the stroke dimension you have pre-set. Timing can be accomplished with your existing timer or can be included as one of the many options available. At the end of the time period the 'reset' button is held and the cassettes are moved to the unload position above the process bath for ease of removal.

Every manual process can be quickly updated to remove the tedium and physical fatigue associated with this repetitious maneuver. You will also benefit from the quality obtained from the repeatability of this equipment.

Remember-no electrical power is required.
Ask us for a quote on multiple units. Call for a Sysmax Inc. product line card.

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