Three Position Transfer Agitation System
A fully automated
three-position transfer system with adjustable vertical agitation
stroke and speed in each process tank. Microprocessor-based
controller with operator access console.
FEATURES:
- Reduced operator handling
- Process repeatability ensures consistent results
- Vertical agitation at process stepHigh throughput
- Various size wafers/substrates can be accommodated
- Microprocessor-based system offers reliable and precise
process control
- Modular design for minimal downtime
- Economical cost Installation in current sink (with modification)
TYPICAL OPERATION:
The operator programs the tank cycle sequence and the process parameters through die operator access console. The operator loads the wafer cassettes mid presses the START button to initiate the
cycle. The cassettes are transferred into process tank #1, mid are subjected to continuous vertical agitation at the desired stroke and frequency for a. preset time period. After time expires, the cassettes are automatically transferred to tank
4-2. When processing at tank 42 is completed, the cassettes are transferred to tank #3. At completion of the final cycle, the end of the cycle is signaled by an audible alarm. The operator presses the RESET button and the cassettes are transferred to the unload position. The operator removes the cassettes, and the system is now ready for the next run. Note: Sequences can be programmed to fit individual applications.
SPECIFICATIONS:
Production capacity: 50 wafers up to and including 200 mm
Agitation cycle: vertical (up and down motion)
Process time: 0-9999 seconds
Rinse time: 0-9999 seconds
Quick dump cycle: 0-99 cycles
Electrical power 120 VAC 50/60 Hz, 2A (other voltage available)
Compressed air or N2 pressure: 80 pso.20cfm
OPTIONS:
Custom wafer/substrate cassette carriers
Dump riser controls and valves
Two and four position units are available (Call us for price mid delivery quotes)
Dec-94
>> Back to TAS 2-2 |
