Modutek Selected for Equipment at Michigan State University Facility for Rare Isotope (FRIB) Project
Editor’s Note: This article was originally published in September 2014 and has been updated with new information and re-posted in November 2023. Modutek Corporation, which specializes in custom wet process equipment for various industries, was selected to provide equipment for Michigan State University’s Facility for Rare Isotope Beams (FRIB) project in 2014. The equipment Modutek provided was a […]
Why Stainless-Steel Stations Are Needed for Solvent Processing
During silicon wafer fabrication, BEOL (Back End of Line) processes may require solvent-based stations to ensure compatibility with semiconductor manufacturing steps. FEOL (Front End of Line) acid-based chemistry may not be suitable for BEOL finishing. Instead, stainless-steel stations with solvents such as acetone, IPA (Isopropyl Alcohol) or EDP (Ethylenediamine Pyrocatechol) complete wafer etching, stripping, and […]
Selecting Equipment for the KOH Wafer Etching Process
KOH etching is increasingly used for creating microscopic structures in silicon. The wafer etching process uses a 20 to 30 percent solution of potassium hydroxide to create cavities in the unmasked parts of a silicon wafer. KOH etching is comparatively safe and etching can be tightly controlled through regulation of the bath temperature and doping […]