Using Modutek’s Teflon Tanks with KOH and TMAH Etching Processes

Using Modutek's Teflon Tanks wModutek’s TFa and TI series PFA Teflon Tanks, along with our other wet bench equipment, fully support KOH etching (Potassium Hydroxide) and TMAH etching (Tetramethylammonium hydroxide)processes.  Our Teflon Tanks are designed together with other wet bench equipment to decrease impurities and unwanted byproducts due to advanced welding techniques with PFA sheet material. Continual adjustments to the Si etching process are not necessary after the initial process has been established.  We construct all our Teflon Tanks and related equipment per individual customer specifications, and we routinely design products that are compatible with a customer’s existing wet bench equipment.

Modutek’s Teflon Tanks have an operating temperature range from 30 – 100º C, with a process temperature control of ± 0.5º C and a heat-up rate from 2-3º C per minute (depending on the size of system).  Our modular design allows for new installation or upgrades into any wet etching station configuration.

Teflon® tank configurations that support KOH and TMAH Etching:

  1. Temperature Controlled Re-circulating Baths (TFa Series)
  2. Temperature Controlled Static Baths (TI Series)

Teflon Tank design features:

  • Manual cover with overlapping seal
  • Minimizes water lost
  • No concentration deficiency over long etch time

Heat source options include: 

  1. Teflon® inline heating
  2. Immersion heating in overflow weir for TFa Series and main tank for TI Series

Static KOH etching bath with condensing coilsCustom Teflon® Tanks and Additional Options:

  • Custom size Teflon® tanks can also be built to match any size (no limitations)
  • Bottom drain features
  • Magnetic stirrer for agitation (TI and TT series)
  • Water condensing refluxor system available on all baths
  • Auto lid feature
  • DI water or IPA spiking system available

Benefits of Teflon Tanks:

  • Modular design
  • Two available heat sources
  • All Teflon® fluid path
  • Process temperature control of ± 0.5º C
  • Process etch uniformity wafer to wafer <2%
  • In house heater maintenance and repair
  • 360 degree overflow filtration
  • Uniform heating throughout the bath

KOH etching tank with condensing coils and semi auto robotModutek provides world-class service, installation and support for all our Teflon Tanks and related wet bench equipment. We provide quality products and services that focus on reliability, precision, throughput, usability and up-time. For more information contact us by calling 866-803-1533 or by email from our site.

Modutek’s Advanced Wet Benches and Wet Process Equipment

Wet-Benches-and-Wet-Bench-C2bModutek offers a full line of Wet Benches and Wet Process Equipment to meet your needs. These include Manual, Semi-Automated, Fully Automated, Linear Robot, Rotary Etch, Dry to Dry, and Stainless steel. These can all be designed and manufactured to meet your specific requirements.

Modutek’s wet processing and wet bench systems provides high-quality and affordable semiconductor and batch immersion process tools with safety and reliability designed into every tool.  Modutek’s equipment is engineered to your processes and chemistry, with additional options that include megasonic and ultrasonic tanks, custom robots, materials of choice and exhaust options.

Modutek’s wet benches and wet processing systems are being used in major semiconductor, medical and solar fab facilities across the country, as well as worldwide. Our Wet Benches are designed for Semiconductor Etching, Cleaning & Striping, Solar Wafer Processing, University Research Labs, Precision Parts Cleaning and other related applications.

Wet Bench Sample Process Applications Include:

  • Etching: Nitride, Silicon Etch, Oxide, KOH and TMAH Etching
  • Stripping: Solvent Resist Strip, Acid Resist Strip
  • Cleaning: Pre-Photo, Photomask Clean, Pre-Diffusion, Pre-Epi, Wafer Reclaim, Pre-Panel Build Clean and Post-Saw Clean

Modutek has over 30 years of extensive experience creating semiconductor wet bench equipment, tanks and baths for many processes.  Our equipment can handle most acids, chemicals, solvents in ultra-clean environments.  We also have an outstanding record when it comes to safety, wet bench reliability, maintainability and cost of ownership. We offer several material choices including: FM4910 (PVC-C), Stainless Steel or Polypropylene.

A Customized Design Integrated with Our Wet Process Equipment

All of Modutek’s wet benches, batch immersion systems, wet processing systems, chemical delivery systems and chemical handling equipment are fully customizable equipment, and can be engineered according to the specific use and constraints of your fab.  All of our wet bench systems are designed to be used with our automated chemical delivery systems and integrated chemical delivery and wet process systems. These systems can all be designed with flow guarantees by utilizing our SolidWorks Simulation Professional and SolidWorks Flow Simulation that provides the process flow characteristic you require. This advanced software will improve your etch rates and throughput which increases yields.  This gives you a turn laminar flow effect in process tank.

Customized Wet Benches, Wet Stations, Wet Processing Systems, Wet Bench Systems and Silicon Wafer Cleaning and Wafer Etching Systems:

All of Modutek’s wet benches and wet processing equipment are:

    • Flexible and Upgradeable according to your needs
    • Easy to Use and Well Controlled

All wet bench systems are designed from one of our flexible platforms to your process and fab design, via Modutek’s unique design process.

    • Low Maintenance

Modutek’s SolidWorks Simulation Professional provides easy to use, flexible and configurable controls. Modutek designs and manufactures all of its own robotics.

    • Designed Specifically to Your Requirements

Up-time and reliability is everything. Our design provides easy access to all component areas, and Modutek uses OEM, not custom components so spares and replacements are readily obtainable.

    • Production Ready

Quality and safety are designed and built right into our wet benches. We focus on equipment footprint, high throughput and low cost of ownership to meet your process needs. Our PLC and touch screen GUI allow for process recipes and data logging.

    • Designed for Safety

Modutek’s design elements, including exhausting, safety interlocks, material of construction, proper ergonomics, provide low maintenance and high reliability.

    • Highly Reliable

Field proven reliability developed from our 30+ years of experience. Each Modutek system is designed using our SolidWorks simulation professional and SoldWorks flow simulation software.

    • Well Supported

Modutek provides world-class service, installation and support. Our high quality Wet Benches and Wet Process equipment  provide reliability, precision, throughput, usability and up-time. Contact us by calling 866-803-1533 or by email from our site.