Modutek’s New Chemical Mixing and Delivery System

Modutek’s New Chemical Mixing and Delivery SystemIn chemical process engineering, reliability is paramount. You need a system that delivers results more than once or twice, but repeatedly. In addition, you’d be looking at durability qualities as well as ease of use and maintenance. Modutek’s chemical delivery systems are designed just for that.

The new Modutek chemical mixing and delivery system stands out from the rest in terms of performance and offers a great degree of customizability. Combining user friendly software with a compact design and a wide range of control features, this system delivers results safely, quickly, and cost-effectively.

Modutek’s chemical delivery systems are designed for use with a complete range of wet processing equipment. Starting from a fully automated line through to a manual wet processing station, the company combines technology and skill to derive a turnkey design that delivers 100% on all clean room requirements.

The chemical delivery interface to your equipment can consist of one gallon bottles to 330 gallon totes. All of Modutek’s delivery and mixing systems are designed around your specifications. Once installed the delivery and mixing systems will provide a precise and safe chemical supply to your end point of use.

One advantage of Modutek’s systems is that all control software are designed and written in house. Even tests are completed in house allowing us to discover possible problem areas early and fix them appropriately. Modutek does not outsource or subcontract design or testing of delivery systems. All parts and every process is designed, created, and tested at our company in San Jose, CA. You can get final acceptance testing before the system is installed at your location. All tests are carried out using DI water. The SolidWorks Flow Simulation and the SolidWorks Simulation Professional deliver on point calculations.

Benefits of the system

The main benefit of the system is that it is 100% made and supported by Modutek. So, we understand every process in the performance of the system and will be able to provide quality customer support over the course of its use.

Other benefits include;

  • Custom design to meet your project requirements
  • An all Teflon fluid path
  • Software is user friendly
  • Increased throughput resulting from quick chemical change
  • Eliminates operator interface

Product specifications

  • A 5 acid mixing system
  • Has 2-10 gallon delivery tanks
  • FM 4910 material construction
  • All acid resistant materials
  • 150% double containment with optical leak detect
  • Stainless steel seismic bracing
  • Photohelic exhaust gauge with interlock to EPO switch
  • One (1) 8-inch exhaust port
  • 5 10-liter acid supply bottles for each system
  • Non-intrusive low level sensors for each acid bottle
  • 5 Teflon metering pumps for each system
  • 2% mixing accuracy
  • 2 10-gallon mixing tanks for each system
  • Low-high and high-high sensing on both mixing tanks
  • 2 Teflon delivery pumps
  • All Teflon plumbing with Flare-type connectors
  • PLC main control
  • LED overhead lighting
  • Color touch screen control
  • 3-color light tower

Other specifications

  • Multiple configurations available on customers request
  • Double wall plumbing available on request
  • Data logging available on request


The new chemical delivery system is primarily a wet processing system. It can be used with:

  • Tech benches
  • Acid exhaust hoods
  • Precision cleaning stations
  • Fume hoods, and
  • Plating stations

About Moduteck

Modutek is a semiconductor manufacturing equipment, wet bench and chemical delivery systems provider with facilities located in San Jose, California. If you have any questions or want a quote on a chemical mixing and delivery system call us at 866-803-1533 for more information.

Rotary Wafer Etching Equipment from Modutek

Rotary Wafer Etching Equipment from ModutekModutek’s Model-SPS rotary wafer etching equipment is a powerful machine capable of rotating continuously for up to 80rpm. Currently ranked as one of the best performing and most reliable in the market, this machine stands above the rest in terms of both usability and control, and promises unmatched safety.

The system is best described as an automated, economical, and ergonomically planned batch processing machine, built for precise chemical etching, stripping, developing, wafer reclaim, resist etching or cleaning of substrates or semiconductor wafers.

Here is all you need to know about the in-demand wafer etching system.

  • It is a dual-tank wet station
  • It allows for wafer cleaning or rinsing, or chemical etching with transfers occurring between tanks ergonomically.
  • Starting the system is simple. First, the operator loads wafer boats as appropriate into the carrier assembly then closes the fume door. With that accomplished, all you need to do is press a START button.
  • All system processes are pre-programmed. The carrier assembly transfers the wafer boats to the chemical process tanks and the processing proceeds with rotational agitation for a preset period of time.
  • Normally, you’ll want to allow the pre-set time to elapse and the system to return to an off-state automatically. However, you can choose to abort the process midway through. Whichever the case, once the system comes to a stop, the carrier assembly is transferred to a rinse tank for rinse cycles, also known as Quench-Quick, Dump-Overflow rinsing.
  • Rinsing is also the last process in the system. After rinsing the system will sound an audible alarm to signal the end of processing.
  • Meanwhile, the carrier assembly will continue to spin until you press the RESET button. At this point, the carrier is moved for removal to the drying unit.

System features

  • Closed loop motor control complete with an encoder for increased rotational agitation precision
  • High throughput
  • Microprocessor power and touch screen control. The control functions are easily accessible and easily operable.
  • Program up to five process “recipes” via the touch screen control interface. The interface will display all the recipes in an organized manner and display results on a single interface, increasing convenience of monitoring.
  • Continued rotation of the wafer boat during processing, and the rapid transfer between process baths and quench tanks ensure consistency in results.
  • Environment friendly
  • Double containment construction
  • Utilize the fail-safe feature when power at N2 pressure is out
  • Bath temperature control
  • Protection of all parts that come in contact with corrosive fluids. These parts are either constructed from inert plastic or sealed appropriately.

Wafer etching system specifications

Agitation- axial rotation over 0 – 80 rpm

Process chemistry temperature – control to +/- 1 / 2 degrees over ambient 100 degrees

Process time – between 0 – 9999 seconds or 0.0 – 999.9

Product capacity – 50 x 6” wafers or 25 x 8” wafers at a time

Pre-rinse time – within 0 – 9999 seconds

Quick dump cycle – between 0 – 9999 seconds

Other system options

The Model-SPS wafer etching equipment comes with several other system options including; gravity chemical refilling, fume condensation, process tank material options, resistivity monitoring in the rinse tank, chemical recirculation, heating/cooling in process tanks, and large-size wafer options.

Contact us

Modutek is your preferred semiconductor/wafer etching equipment supplier in San Jose, California with over 30 years experience in providing; industry-standard electrical schematics, solid models, plumbing and instrumentation design, and flow simulation services for high-tech manufacturers, research facilities, and universities.

Visit our offices on 6387 San Ignacio Avenue or call us on 866-803-1533 for more information.