Monthly Archives: February 2015

5 Things About Wet Benches You Should Know

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wet benches

As a Process Engineer you probably know a lot about using wet benches and chemical stations. You know that wet benches are for wet etching and that a very precise process needs to be maintained for cleaning wafers and devices. You also know the difference between wet benches and litho benches. While wet benches are used for wet etching, litho benches are used for resist processing.

However, there may be a number of other things you’re yet to know about wet benches. Here are 5 things you need to know about wet benches;

 

 

  • Manual vs. semi automatic vs. automatic wet benches

Advanced manufacturers like Modutek also have manual, automatic, and semi-automatic wafer benches. The main difference comes in operation. Manual wet benches are operated 100% manually. However, the wet benches are still exhaustive featuring all the functionalities you may need. Moreover, you can request custom designs and processes. Modutek’s semi-automated wet benches are servo controlled with 3 degrees of freedom which gives you precise developing, etching, and cleaning processes. Fully automated wet benches are the most expensive of the three but also the most extensive in design. Complete with SolidWorks Simulation Professional and SolidWorks Flow Simulation Software, these wet benches complete most tasks with ease.

  • Dry-to-Dry wet benches eliminate the need to dry in separate tools

Dry-to-Dry wet benches are your ultimate tool. Modutek’s dry-to-dry wet benches utilize the MVD Series IPA Dryer. With this Dryer, your wafer comes out dried and can proceed to the next step without going through a separate Drying tool. This instantly eliminates transfer time which is in affective way to improve throughput.

  • The stainless steel solvent station guarantees clean room applications

Modutek currently has a dry-to-dry stainless steel solvent station in which solvent applications are achieved with minimal strain. Made from 304 stainless-steel, the construction is available for manual, semi-automatic, as well as fully-automated applications. Complete with SolidWorks Flow Simulation and SolidWorks Simulation Professional, the solvent station provides high etch rates and increased throughput. Moreover all the robotic parts to be designed and assembled and tested at Modutek’s San Jose facility. Modutek provides highly reliable equipment with a one year guarantee.

  • Wet benches can be hazardous

For all their benefits, wet benches can be hazardous and must be handled carefully throughout. Hydrogen fluoride which is present in the acids used in wet bench processes may cause delayed tissue damage upon contact with the skin. It depletes of calcium from muscles and bones. When working with wet benches, it’s important to wear appropriate gloves (such as chemical resistant Nitrile clean-room gloves) at all time. Additional protective gear including face shields and chemical aprons are also recommended.

  • You can actually nullify some of the threat using a chemical fume hood

While it’s almost impossible to eliminate all the risks posed by the chemicals and processes associated with wet benches, you can always use a fume hood to increase safety at the workplace. Modutek’s chemical fume hood is constructed from standard polypropylene and supports both acids and bases. The hood comes complete with utility sinks, GFI electrical outlets, and a goose neck faucet. It’s easy to install though you can always contact Modutek for assistance. You can even request a custom design.

Contact

Modutek has 30+ years in designing and supporting wet benches and wet bench equipment.  We are best known for developing very high quality and highly reliable equipment, and for supporting consistent manufacturing processes. Contact us on 866-803-1533 or 408-362-2000 for more information.

 

Tips on Buying Silicon Wafer Cleaning Equipment

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Tips on Buying Silicon Wafer Cleaning EquipmentFor all manufacturing involving semiconductors and micro electrical mechanical systems (MEMs), one of the most important requirements is to maintain a precise cleaning process of silicon. This reduces yield problems that occur from both the organic and inorganic residues. As the size geometry and size of semiconductors continue to become smaller, there are higher risks associated with contamination of wafers especially by particle contaminators. For increased efficiency in your manufacturing processes you will need to purchase high quality and reliable silicon wafer cleaning equipment for your manufacturing facility.

Here are 5 factors to consider when shopping for silicon wafer cleaning equipment:

  • Buy from a company with experience and expertise

Silicon wafer cleaners are different from other products you will buy on the market and fit into manufacturing environment.  When you are purchasing this equipment you will need to look for a company that has a proven track record with in-house expertise and support. You also need to confirm that the equipment they provide will meet all of your manufacturing requirements.   Upcoming companies with little experience are likely to sell you substandard products or products that are not fully qualified to meet your requirements. Companies that have been in the field for a long time will offer various equipment options based on their experience working with various customers.

  • Buy equipment manufactured using the latest technology

As the quality and geometry of the MEMs and semiconductors advance, the technology used to make wafer cleaners have also advanced. Finer geometries require finely washed and cleaned silicon unlike in previous years which involved just simple immersions in hot alkaline. The modern cleaning equipment uses megasonic cleaning, centrifugal spraying, and ultrasonic cleaning technologies. The enclosed systems effectively clean all particles and contaminant films. You’re better off buying from a company that implements such advanced technology.

Photoresists require sophisticated cleaning methods like the piranha cleaning process which uses a mixture of sulfuric acid and hydrogen peroxide to clean organic residues off substrates. This process requires that the equipment and procedure used be carefully followed to insure safety.

  • Confirm that the equipment supports user manufacturing requirements

Cleaning equipment will always feature different cleaning aspects. You should check the manufacturer’s specifications to ensure that they match your requirements to ensure optimization of the resource. Wafer cleaners with additional features may be unnecessarily expensive if you never use some of the features.

  • High quality and reliable tools

Money will always be a factor when it comes to purchasing wafer cleaning equipment, but quality and reliability must never be compromised. High quality and reliable equipment will last longer, work better and will not compromise the reputation of the manufacturer.

  • Buy from a company that offers technical support and onsite repair

Many companies will sell you a product, but will not always offer good technical support and onsite repair if there is a problem. If a manufacturer does not offer good technical support or if the system does not work reliably, your manufacturing yields will be compromised. It is advisable to buy from a company that will offer technical support and repair of their wafer cleaning equipment in case of breakdown or malfunction.

Summary

With these factors in mind, work with a manufacturing supplier that provides reasonably priced yet effective silicon wafer cleaning equipment that is both efficient and durable. At Modutek Corporation, we strive to do this for all our customers and have been providing the high quality of equipment, service and support for over 30 years. Call us for a free quote at 866-803-1533 or visit our site at www.modutek.com.