As a Process Engineer you probably know a lot about using wet benches and chemical stations. You know that wet benches are for wet etching and that a very precise process needs to be maintained for cleaning wafers and devices. You also know the difference between wet benches and litho benches. While wet benches are used for wet etching, litho benches are used for resist processing.
However, there may be a number of other things you’re yet to know about wet benches. Here are 5 things you need to know about wet benches;
- Manual vs. semi automatic vs. automatic wet benches
Advanced manufacturers like Modutek also have manual, automatic, and semi-automatic wafer benches. The main difference comes in operation. Manual wet benches are operated 100% manually. However, the wet benches are still exhaustive featuring all the functionalities you may need. Moreover, you can request custom designs and processes. Modutek’s semi-automated wet benches are servo controlled with 3 degrees of freedom which gives you precise developing, etching, and cleaning processes. Fully automated wet benches are the most expensive of the three but also the most extensive in design. Complete with SolidWorks Simulation Professional and SolidWorks Flow Simulation Software, these wet benches complete most tasks with ease.
- Dry-to-Dry wet benches eliminate the need to dry in separate tools
Dry-to-Dry wet benches are your ultimate tool. Modutek’s dry-to-dry wet benches utilize the MVD Series IPA Dryer. With this Dryer, your wafer comes out dried and can proceed to the next step without going through a separate Drying tool. This instantly eliminates transfer time which is in affective way to improve throughput.
- The stainless steel solvent station guarantees clean room applications
Modutek currently has a dry-to-dry stainless steel solvent station in which solvent applications are achieved with minimal strain. Made from 304 stainless-steel, the construction is available for manual, semi-automatic, as well as fully-automated applications. Complete with SolidWorks Flow Simulation and SolidWorks Simulation Professional, the solvent station provides high etch rates and increased throughput. Moreover all the robotic parts to be designed and assembled and tested at Modutek’s San Jose facility. Modutek provides highly reliable equipment with a one year guarantee.
- Wet benches can be hazardous
For all their benefits, wet benches can be hazardous and must be handled carefully throughout. Hydrogen fluoride which is present in the acids used in wet bench processes may cause delayed tissue damage upon contact with the skin. It depletes of calcium from muscles and bones. When working with wet benches, it’s important to wear appropriate gloves (such as chemical resistant Nitrile clean-room gloves) at all time. Additional protective gear including face shields and chemical aprons are also recommended.
- You can actually nullify some of the threat using a chemical fume hood
While it’s almost impossible to eliminate all the risks posed by the chemicals and processes associated with wet benches, you can always use a fume hood to increase safety at the workplace. Modutek’s chemical fume hood is constructed from standard polypropylene and supports both acids and bases. The hood comes complete with utility sinks, GFI electrical outlets, and a goose neck faucet. It’s easy to install though you can always contact Modutek for assistance. You can even request a custom design.
Modutek has 30+ years in designing and supporting wet benches and wet bench equipment. We are best known for developing very high quality and highly reliable equipment, and for supporting consistent manufacturing processes. Contact us on 866-803-1533 or 408-362-2000 for more information.