Monthly Archives: May 2015

Using RCA Clean in a Wet Bench Process

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Using RCA Clean in a Wet Bench ProcessBefore processing a silicon wafer under high temperatures, semiconductor process engineers will use RCA clean as part of a wet bench process. This procedure removes organic residue from a silicon wafer and replaces the surface layer of oxide with a thin, new layer. The application of two chemical solutions, SC-1 and SC-2, make up this process.

SC-1 removes impurities attached to silicon, quartz and oxide surfaces in a 15 minute soak. In addition, it initiates the regeneration of surface oxide layers. The mixture consists of:

  • 1 part NH4OH (ammonium hydroxide)
  • 1 part H2O2 (hydrogen peroxide)
  • 5 parts deionized (DI) water.

After an SC-1 application, cleanliness is ensured by soaking a wafer in SC-2 for 10 minutes. This mixture does not etch silicon, but targets and eliminates microscopic metal hydroxides, alkali residue and any other remaining metal. SC-2 consists of:

  • 1 part HCl (hydrochloric acid)
  • 1 part H2O2 (hydrogen peroxide)
  • 5 parts DI water

Fortunately, Modutek offers an array of wet bench equipment that support both steps of RCA clean. With a custom station, you can rinse and dry wafers in one place within 15 minutes.

Modutek Wet Bench Equipment

Modutek produces high-tech, high-yield wet bench processing equipment suited for RCA clean. Stations conserve DI water and operate with precise process controls via SolidWorks Flow Simulation software. Expedite your applications with a station designed in-house according to your specific requirements. Standard features include:

  • DI water hand spray
  • Continuous flow DI water chamber
  • Teflon N2 gun

Modutek IPA Vapor Dryer

Eliminate the need for separate rinsing and drying chambers with Modutek’s Marangoni drying system, also called an IPA Vapor Dryer. Incorporated into your wet bench, the IPA Vapor Dryer’s single chamber makes finalizing the cleaning process quick and convenient. In addition, this advanced system allows for ozone introduction in a post-solution clean. Safe and simple bottle change happens at deck level where IPA vapor precipitates inside your gallon container under level sensor protection. Additional safety features include an Emergency Power Off button and the absence of moving parts inside the drying chamber. IPA vapor distributes evenly through the top of the chamber, reducing IPA use while providing sufficient surface tension drying for all substrates and silicon wafers.

Modutek has been designing and manufacturing wet bench equipment for customers for 30+ years. Certified specialists will work with you from design to installation, ensuring you have the perfect wet bench and IPA Vapor Dryer for your cleaning and processing applications. Email [email protected] or call 866-803-1533 for inquiries.

Tips for Selecting the Right Wafer Fabrication Equipment for Your Application

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Tips for Selecting the Right Wafer Fabrication Equipment for Your Application

Selecting the right wafer fabrication equipment for your company’s manufacturing requirements is an important decision. Whether you manufacture solar panels, semiconductors, or LED displays, it’s necessary to have a reliable wet bench station constructed by an experienced wet process equipment provider. From the military industry to the medical industry, process and facilities engineers need to consider five factors before selecting an appropriate bench.

High Quality Control Standards and Safety

Due to repeated use, wet bench stations should be both durable and safe. Modutek Corporation ensures equipment meets both conditions by minimal outsourcing of their design and manufacturing process. In addition, all stations come equipped with a chemical fume hood that efficiently expels hazardous chemicals. Testing at their facilities in San Jose, CA confirms functionality and compliance with all current safety standards.

Custom Fabrication Options

Production rates increase when wet bench stations are tailor-made according to your requirements and application. Modutek utilizes PFA, Halar, PVDF and PVC-C welding expertise to construct a station that makes meeting prototype specifications effortless. Modutek specializes in custom designs, providing numerous features for etching, plating, and cleaning. These include:

  • SolidWorks Flow Simulator software
  • Stainless steel construction
  • Teflon plumbing
  • Overhead deck lighting
  • CO2 fire suppression
  • Rear access

Wafer Size

Consider your specific applications and the wafer or substrate sizes a wet bench can handle before making a purchase. Modutek’s selection of wet bench stations process wafer sizes up to 12” and glass solar panels up to 30” x 60”.

A Full Service Vendor    

Don’t settle for off-site service and repair. Wafer fabrication equipment vendors should eliminate the issue of shipping faulty wet benches and related equipment. Fortunately, if your wet bench requires maintenance, Modutek’s specialists come to you. Receive a diagnosis and schedule a convenient repair over the phone.

A Devoted Vendor with a Wide Selection

Whether you need a fully-automated, semi-automated, or manual wet bench, you want a vendor that employs quality resources and expertise to create them all. Modutek offers all three types of stations that are customized according to your requirements.

Fully-Automated Wet Benches

Enjoy a hands-off approach with fully-automated wet process stations. These are available in any size from Modutek. Standard features include Emergency Power Off (EPO) and a one year warranty on all parts.

Semi-Automated Wet Benches 

Etch and clean with precise semi-automatic wet benches. Modutek incorporates servo motor automated robots with touch screen controls in all of their semi-automatic stations. This supplies you with three degrees of flexibility for any processing need. In-house development gives you full turnkey support and the same consistency found in advanced, fully-automated systems.

Manual Wet Benches

Use manual wet benches to reduce the price of using robotics in your clean room applications. Modutek’s standard benches include all the safety features found in automated systems and support both acid and base processes with white polypropylene construction.

Modutek’s Experience

Modutek has built and supplied custom wafer fabrication equipment for 30+ years. Certified specialists work with you from design to final installation and supply future assistance through field service repair. Email [email protected] or call 866-803-1533 for a free quote.