As a result of improvements to equipment design and materials, silicon wet etching process controls have improved to produce higher wafer yields with reduced defects. Modutek provides silicon wet etching equipment engineered to incorporate such improvements that are designed for reliability, safety, and low cost of ownership. The wet etching products from Modutek include features that offer specific advantages and deliver improved results. Process engineers and fabrication facility managers can order customized equipment to meet their needs and to ensure they receive the process improvements they expect.
Modutek’s QFa Series High-Temperature Recirculating Quartz Baths and the Qa Series Constant Temperature Quartz Baths are designed to set the quality standard in quartz baths. Used for etching, stripping, and heating, the baths feature fast, even heating to improve process yield and minimize damage from runaway temperatures. The high-quality internally flame-polished virgin fused quartz process vessels reduce downtime and increase reliability due to longer vessel life.
Although Modutek’s Teflon tanks come in standard carrier sizes, the company will build custom sizes to match any requirement. Tank configurations are Temperature Controlled Recirculating Baths, Temperature Controlled Static Baths and Teflon Ambient Baths. Inline heating or immersion heating are available. Modutek can help design the optimal configuration for both new as well as existing systems you may already have.
Modutek’s silicon wet etching baths deliver excellent process control while retaining flexibility in installation and operation. The control system monitors the temperature of the bath to determine when adding de-ionized water is required to maintain the acid-to-water ratio. As water is lost to evaporation, the boiling point of the bath increases and the control system adds small amounts of water to the boiling liquid, ensuring that the water mixes in immediately. This method tightly controls the boiling of the chemicals and avoids “bumping.” The availability of remote metering means that the product is easy to install and Modutek can help find the best solution for any process station.
Modutek’s line of Quick Dump Rinsers can increase process efficiency by reducing rinse times and DI water consumption. The Rinsers feature state-of-the-art engineering to eliminate particle entrapment and minimize rinsing times. Dual overhead spray manifolds, a contoured vessel design and a large machined dump door ensure efficient and rapid operation.
For facilities that could benefit from using KOH etching, Modutek offers customized solutions manufactured according to customer specifications. KOH etching is a repeatable process that delivers fast etching at a low cost. Modutek’s solutions use the company’s Teflon tanks with advanced welding techniques and all-PFA material. The products can be designed to particular specifications or to be compatible with your existing wet bench equipment. Once the wet etching process is established, continual adjustments are not necessary. Modutek can integrate the new products into an existing line to deliver process improvements and increased efficiency.
Making use of improved designs or higher-quality materials can generate substantial benefits from reduced costs and better throughput. The increased ability to manufacture customized products that are optimized for a particular application can further improve silicon wet etching results. For any questions about silicon wet etching products or for help selecting the right manufacturing equipment for your requirements, call Modutek at 866-803-1533.