Quartz Tube Cleaning Stations: What They Do and the Benefits They Provide

Quartz Tube Cleaning Stations: What They Do and the Benefits They ProvideQuartz tubes are used in the processing of semiconductor wafers at high temperatures inside a diffusion furnace and must be cleaned with corrosive chemicals. Quartz tube cleaning stations have to be customized for the requirements of a particular process. With expertise in chemical handling and the customization of chemical delivery stations, Modutek is ideally situated as both a designer and supplier of quartz tube cleaning stations that meet the needs of their customers. A rugged design combined with automation and drying options make the stations a reliable and flexible choice for quartz tube cleaning.

Benefits that Quartz Tube Cleaning Stations Provide

Quartz tubes are delicate and cleaning them is a critical process. Ideally semiconductor manufacturers need cleaning solutions that are effective while keeping the handling of the tubes to a minimum. With Modutek’s quartz tube cleaning stations the tubes roll during etch this helps reduce chemical usage. Spray nozzles and tubes are then used for DI water rising. The custom design includes options for automation and drying with nitrogen. Construction of the station can reach ten feet in length. In addition to quartz tube cleaning, possible applications include EPI tube cleaning, Poly Silicon tube cleaning, and bottle washing.


Standard Modutek quartz tube cleaning stations are of white polypropylene construction and have manual or automated roller systems. The station has casters and leg levelers and is constructed to the specific size and length needed for the particular application. All stations incorporate an acid cycle and a rinse cycle. PVC safety shields, a Teflon nitrogen gun and a deionized water hand sprayers are standard features.

Options include changing the construction material to FM4910 material and adding a hot nitrogen drying system. Once the basic application features are determined, options such as holding tanks, on board bottle washer automation can be added. Third party certifications are available. Modutek will evaluate each option for the appropriate application and make corresponding recommendations.


Optional automation features include an automated tube roller system and automated program recipes. From the main screen, the operator can see the status of the system and select operations. Options such as drying and bottle washing are integrated into the automation system and can be controlled from there.

When selecting automatic operation, no further control action by the operator is required. When selecting manual operation, an additional screen will come up showing the controls and allowing the operator to carry out the necessary actions. Safety interlocks remain active and the operator can return to the main screen at any time.

The setup section of the automatic system allows authorized personnel to program system parameters such as acid soak time, rinse time and dry time. A maintenance section allows an operator access and test different parts of the system. Access codes for setup, operation and maintenance can be set to ensure only authorized personnel use the different parts of the system.

Both the manual and automated version of Modutek’s quartz tube cleaning stations offer superior performance, reducing product defects due to process impurities during semiconductor manufacturing. The self-contained but customized and flexible nature of the stations allow for easy installation and service. All stations are designed and built in house by Modutek, allowing the company to offer a complete spectrum of support. If you need help selecting a quartz tube cleaning station for your specific application or want a quote, contact Modutek at 866-803-1533 or email modutek@modutek.com.

Modutek At Semicon Conference in China

Modutek At Semicon Conference in ChinaModutek, a leading provider of leading-edge wet benches and wet process equipment, will have a factory representative at the Semicon Conference in Shanghai China from March 15-17, 2016. Modutek will be with their China Rep Laserwort located in Hall N3 at booth 3401. Information about the Semicon Conference can be referenced at http://www.semiconchina.org/ and details on Modutek’s attendance at the conference can be referenced at: Modutek at Semicon Conference in China

Stop by the Modutek /Laserwort booth to get information and answer any questions you have about Automated, Semi-Automated and Manual Wet Process Stations used for acid/base, solvent and ozone cleaning or photo resist strip. Modutek also provides IPA vapor drying and Megasonic cleaning equipment to support your manufacturing applications. In addition environmentally friendly acid neutralization systems and air scrubbers are available with all their equipment.

Additional details on some of Modutek’s products are listed below:

  • Fully-automated Wet Bench Equipment
    • Benefits include:
      • Full automation control with touch screen
      • SolidWorks Simulation Professional software
      • SolidWorks Flow Simulation software
      • Servo motor automation
      • All robotics and software designed in house
      • Complete design, assembly and test done according to your specifications
  • Semi-automated Wet Bench Equipment:
    • Benefits include:
      • Automation control with touch screen
      • SolidWorks Simulation Professional software
      • SolidWorks Flow Simulation software
      • Servo motor automation
      • All robotics and software designed in house
      • Complete design, assembly and test done according to your specifications
  • Manual Wet Bench Equipment:
    • Benefits include:
      • High end manual equipment at competitive pricing
      • Meets or exceeds all current safety standards
      • Designed to meet any process requirements
      • Can accommodate custom designs and processes
      • Low cost of ownership
      • Equipment designed for future expansion

Our fully-automated, semi-automated and manual wet bench equipment supports the following applications:

  • KOH Etching
  • Quartz cleaning
  • Ozone Etching
  • Ozone Cleaning
  • SC1 & SC2 featuring Megasonic Cleaning
  • BOE (Buffered Oxide Etching)
  • MEMs processing
  • Plating
  • All solvent applications
  • Hot phosphoric (Nitride Etching)
  • SPM Cleaning
  • Precision Part Cleaning
  • IPA Vapor Dryer
    • Benefits include:
      • Very low IPA consumption
      • No moving parts inside drying chamber which eliminates wafer breakage
      • Most drying cycles completed within 10-15 minutes
      • No watermarks
      • Drying technology can be easily designed into your wet bench eliminating one transfer step
    • The IPA Vapor Dryer supports the following applications:
      • Ozone Cleaning
      • Wafer Drying

Modutek has over 35 years of experience developing and building wet bench stations and wet process equipment that provides highly reliable results for precision processes. They also provide world-class service, and customer support. Call 866-803-1533 or email Modutek@Modutek.com for a free quote or consultation to discuss your requirements.