Monthly Archives: June 2016

Tips on Selecting the Right Options for Your Wet Bench Equipment

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Tips on Selecting the Right Options for Your Wet Bench EquipmentModutek wet benches are of white polypropylene construction with 304 stainless steel construction available for solvent applications. The company will build any size and length to meet customer requirements. Safety features include safety interlocks, PVC safety shields, emergency power off mushroom buttons and wiring to NFPA 70 and 79. All models have a Teflon N2 gun, a deionized water hand spray and a continuous flow deionized water manifold.

Fully Automated Stations

Modutek’s fully automated wet bench stations use SolidWorks Simulation Professional and SolidWorks Flow Simulation software to optimize the semiconductor fabrication processes and improve performance. The cost of the units covers the basic station and robotics to handle automated operation. These wet process stations are suitable for customers who need high yields, improved etch rates, better throughput and who want the highest output quality.

In addition to increased performance, fully automated stations eliminate human operator error in calculating the chemical dosage and operating the station. The automated system tracks chemical usage to reduce waste and maintain a consistent process environment. Once programmed, the automated station runs the same software and the process is fully repeatable.

Semi-Automated Stations

The semi-automated stations give customers the advanced features and precision of fully automated stations without having to pay the fully automated price. Stations have a graphic user interface on a PCL touch screen to control servomotors with three degrees of freedom and with encoder feedback. Customers can get process uniformity and accurate handling while saving money.

Modutek semi-automated stations are an excellent option for customers who want the precision of robotic controls without paying for full automation. The semi-automated stations still use the SolidWorks Professional and Flow software packages to ensure customers achieve excellent results while spending less.

Manual Stations

Manual wet benches are a cost effective way for customers to get the safety features and operating characteristics of the Modutek wet process equipment family with competitive pricing and an overall low cost of ownership. The manual stations are an effective way for customers to start using wet process equipment and they can later expand the units to add automation options. The manual equipment is of the same quality as the automated stations and delivers excellent performance without the cost of robotics.

Solvent Stations

For solvent stations Modutek uses a 304 stainless steel construction with fire suppression. Solvent stations are available with the same fully automated, semi-automated or manual options as the other wet processing stations and they share the same advanced features. Solvent stations are for customers who have applications with acetone or IPA or who want to carry out photo resist stripping or EDP etching.

Dry to Dry Wet Process Equipment

Modutek’s Dry to Dry equipment saves time by eliminating transfers and increases throughput and yield. It uses an IPA dryer to avoid having to dry in a separate tool. The same automation options as for other wet processing equipment are available for the Dry to Dry models. The unit is a convenient option for customers who want to simplify their process and increase output.

Custom Options

Because Modutek designs and produces all wet benches and related equipment in house without subcontracting, the company can use in house expertise to develop custom solutions for particular applications that may not fall within the standard option set. Customers can be assured that, no matter what the wet process application, Modutek engineers can propose a custom solution if the broad range of standard options is not suitable. For more information or for a free quote contact Modutek at 866-803-1533 or email Modutek@Modutek.com.

Advantages Modutek Offers Over Other Semiconductor Equipment Manufacturers

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Advantages Modutek Offers Over Other Semiconductor Equipment ManufacturersFounded in 1980, the Modutek Corporation has established itself as an industry leader among semiconductor equipment manufacturers. Modutek provides a full product line of wet process equipment and related products, including wet bench stations, nitride etch baths, high temperature quartz-heated baths, sub ambient filtration, rinsing systems as well as chemical delivery systems. The company has maintained its position through a focus on innovation and on delivering high quality semiconductor equipment. In addition to offering a broadly based standard product line, the company can design custom solutions for a wide variety of applications according to the specific requirements of customers.

 

Key Company Characteristics

 

Modutek has been in the semiconductor equipment manufacturing business for over 35 years and has developed a reputation for high quality and reliability during that time. The company retains a skilled group of design engineers who keep up with new technology and innovate in areas such as process automation. Modutek leverages its expertise developed over the years to deliver solutions that respond exactly to the particular needs of each customer.

 

Located in San Jose, California, Modutek designs and builds its equipment in house and does not subcontract out the manufacture or assembly of its products. This policy allows the company to ensure that all equipment is of the highest quality and Modutek stands behind its products with its warranties and guarantees.

 

A key part of the company’s success is its outstanding customer support. Extensive customer support manpower is not only available but has unparalleled expertise because all equipment and software is designed and produced in San Jose. This insures that local personnel have the experience and product information required to deliver support to customers.

 

Specific Advantages of Ordering From Modutek

 

Decision-makers and production managers at manufacturing plants, research facilities or university labs that have a need for semiconductor manufacturing equipment look for companies with specific characteristics. They want reliable suppliers who can deliver high quality equipment that meets their needs. They need expert help in working through the design process, purchasing the right configuration and with post sales support.

 

Because of Modutek’s long history as a supplier in this industry, the company has a proven reputation that customers can verify. The record of existing installations and the experiences of current customers allow potential buyers to evaluate Modutek’s record and confirm company claims for high quality equipment and reliability of supply before making a purchase.

 

Keeping design and production of products and software in house allows Modutek to fully control and maintain high quality of its products. Customers wanting information about materials used or design practices can get answers first hand from the people responsible. This is especially valuable when discussing guarantees and warranties.

 

With their own engineers working on all aspects of semiconductor equipment supply, Modutek can easily make changes to designs and customize products to meet specific needs. Customers can start by evaluating the wide range of standard products but, if they have specific applications that require unusual features or requirements, Modutek can accommodate them.

 

Modutek’s in house design and production practices give customers access to technical specialists who have hands-on experience with the equipment. A Modutek design engineer can give customers information about a product or even suggest design changes for custom equipment. This capability, together with a commitment to a high level of customer service, lets Modutek offer service before and after a sale that is both customer-oriented and effective in solving problems.

 

For customers that need highly reliable wet process or related equipment, Modutek stands out among semiconductor equipment manufacturers as a supplier that fulfills requirements and provides outstanding customer support. For a free quote or consultation call Modutek at 866–803-1533 or email Modtuek@modutek.com.

Modutek Receives Order for Single Chamber HF Last/ IPA Vapor Dryer

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Modutek Corporation, a premier provider of semiconductor manufacturing equipment has received a customer order for a new innovative IPA vapor dryer. The new IPA vapor dryer includes HF (hydrofluoric acid) injection (ratio controlled) as a first step before the standard IPA vapor drying process. This provides an oxide etch to bare silicon. The Hydrophobic wafers are now rinsed to pH controlled level. Once the pH level is met the IPA vapor dry process begins in the same chamber.  This eliminates the requirement to move a cassette of Hydrophobic wafers to a separate drying station.  The new dryer system improves yields by reducing or eliminating water spots and reduces defects with particle-neutral drying.

IPA Vapor Dryer Features

Modutek’s IPA vapor dryer has a single drying chamber for DI water rinsing and IPA vapor drying. The on board HF metering ensures precision mix ratios. The oxide etch with IPA drying uses an in situ process with a rinse to pH before the IPA drying cycle begins. The system features a filter bypass for contamination control and no cassette contact points during etch, rinse and dry.

IPA vapor, generated in standard one-gallon bottles, is introduced into the drying tank through the top cover. The bottles are easy to change at deck level and the top entry of the IPA vapor ensures an even distribution. Modutek’s IPA vapor dryers handle all process sizes from standard wafer carriers to glass substrates. Modutek designs, assembles and tests all the company’s equipment in their facilities in San Jose California and does not subcontract the design or assembly of their dryers.

Modutek Dryer Benefits

Most Modutek dryer cycles conclude within 10 to 15 minutes with a very low consumption of IPA. The technology eliminates watermarks and, because there are no moving parts in the dryer, there is no chance of wafer breakage. By designing the dryer technology into the wet bench, one transfer step can be eliminated. Modutek has extensive experience with custom installations and can help design an IPA vapor dryer to meet the requirements of any application.

About Modutek:

Modutek serves domestic and international customers who have needs in any type of wet processing or lab setting and builds chemical delivery systems for pharma, biochemical, nuclear, solar and wet bench manufacturing. Modutek has a full background in chemical delivery and is a turnkey wet process system integration manufacturing operation.