Silicon Wafer Strip Solutions for Wet Processing Equipment Applications

Silicon Wafer Strip Solutions for Wet Processing Equipment ApplicationsModutek’s extensive experience in delivering wet processing equipment allows the company to meet the particular needs of each customer. Its equipment can support a wide variety of wet bench processes and its extensive range of products can be customized to solve specialized problems for particular applications. For silicon wafer strip solutions, the company can deliver equipment to support the following applications:

Silicon Nitride Strip

The silicon nitride strip process removes silicon nitride from silicon wafers containing integrated circuits in a hot acid bath. Key factors for a high quality result are the selectivity of the bath strip solution and the repeatability of the process variables. The selectivity of removing silicon nitride while leaving silicon oxide intact must be high and the process must always deliver the same results for the same inputs.

The Modutek Nb series silicon nitride etch bath monitors bath temperature while adding DI water to maintain the acid to water ratio. The process can be tightly controlled to give excellent consistency resulting in the desired selectivity and the required repeatability.

Resist Strip

Modutek offers an advanced ozone cleaning process for photoresist strip without the use of harsh, expensive chemicals. The ozone cleaning process can strip, etch or clean silicon wafers at a lower cost than conventional technology while using an environmentally friendly and safe process.

Oxide Strip (Buffered Oxide Etch – BOE) 

The F series filtered sub-ambient circulation bath for BOE applications can cut down on acid consumption while reducing particles and improving yields. Specifically designed for BOE applications, the Modutek F series bath delivers excellent performance with a large number of options available to meet specific process requirements.

Solvent Based Resist Strip 

Modutek’s SFa series temperature controlled stainless steel recirculating baths can handle a wide variety of solvents. The baths all meet Class 1 Div 1 Group D requirements and can handle solvents such as IPA, acetone and resist strip solutions. The vessels are 316L electropolished stainless steel designed for long vessel life and operate at a temperature of up to 100 degrees Celsius. Available in a range of sizes as well as with custom dimensions, the baths are designed to handle all solvent applications.

SPM Photo Resist Strip

For photo resist strip using the sulphuric acid / hydrogen peroxide mixture SPM process, the Modutek QFa high temperature recirculation quartz baths are an ideal solution. They feature fast, even heating in a seamless, sloped flange design. Operating temperature range is 30 to 180 degrees Celsius with an approximate heat up rate of 2 degrees per minute. Process temperature control can provide an accuracy of up to plus/minus 1 degree Celsius. The quartz bath vessel is made of boron-free internally flame polished virgin fused quartz and Modutek can supply a wide range of standard and custom sizes.

Wet Processing Strip Solutions

Processing engineers considering various silicon wafer strip solutions can be confident that Modutek can supply the appropriate wet processing equipment for their application. The company has been in operation for over 35 years and provides an extensive product line of semiconductor manufacturing equipment. Their experience and expertise allows them to offer both standard equipment for common applications as well as customized solutions for applications outside the norm.

With Modutek, engineers can choose the wafer strip process they want to use, from conventional SPM, solvent or silicon nitride wet processes to the new advanced ozone technology. They can decide which is the most appropriate for their particular application. Modutek can provide recommendations on the wet processing equipment needed and also offer different options when applicable. For a free consultation or quote on selecting equipment for specific wafer strip applications call Modutek at 866-803-1533 or email

How Modutek Supports Customers Using Semiconductor Manufacturing Equipment

How Modutek Supports Customers Using Semiconductor Manufacturing EquipmentSemiconductor manufacturing equipment from Modutek Corporation can tailored to meet a wide variety of customer requirements and the support offered by the company ensures that products work as expected. Process engineers and facility managers in wafer manufacturing facilities, research labs and universities can rely on customized wet processing equipment supported by experienced service teams for onsite testing and subsequent maintenance. Such testing and support ensures that installations operate efficiently, deliver high throughput and experience low levels of downtime.

Equipment Testing

Modutek provides final acceptance testing (FAT) of equipment at their company facilities in San Jose, CA. Customer personnel can be present for the verification process and review the final equipment testing. Customer site acceptance testing (SAT), includes onsite start-up training with experienced Modutek personnel showing operators how the equipment works. Follow-up operational training can be given at all levels, from facility managers to equipment operators.

Service Contracts

Service contracts ensure that the equipment is working optimally and that all settings and adjustments work according to specifications. Modutek offers service contracts for both new and used equipment. Services include verification that the equipment meets factory standards, and checks to make sure the equipment is correctly calibrated.  Recommendations are provided if the equipment is not performing to factory specifications.

Modutek’s service contracts help customers protect their investment and ensure the performance and production characteristics of the equipment meet expectations. For used or for older wet bench systems, Modutek can evaluate equipment condition and performance and suggest updates, revisions or upgrades for improvements that use the latest technology.

Preventive Maintenance Contracts

Modutek offers preventive maintenance contracts to help ensure their customer’s equipment continues to perform optimally. Service checks on Modutek equipment or on the equipment of some competitors are done to detect problems that could slow production, affect quality or lead to unexpected downtime. Service checks can be one-time, or customers can schedule quarterly or annual checks. In each case, any or all of the equipment supplied by Modutek can be verified and Modutek can make recommendations to address potential problems.

Field Service and Support

In addition to testing, training and service contracts, Modutek offers field service for customers who need repairs, who want to upgrade their equipment or who need customized parts to improve their process. Modutek’s field service and support operate worldwide and can undertake repairs and modifications on site. Diagnosis of equipment problems is often possible by remote access, over the phone or via email. Modutek can walk customers through the possible fixes before quoting on an agreed solution.

Modutek’s experience in wet bench technology lets the company provide extensive on site support with the possibility of shipping units back for in house repairs or upgrades if that is the better solution for the customer. When equipment is repaired or modified, a new warranty applies, even on non-Modutek equipment. With more than 35 years of operation, Modutek still supports all their older equipment, and repairs or upgrades may be less expensive than new equipment.

Managers at semiconductor fabs and research facilities can depend on Modutek’s service and support. In addition to supplying state-of-the-art technology and reliable, efficient equipment that produces quality output, the company protects customer investments by supporting its products over their lifetime. In addition, they will identify upgrades and improvements that extend useful life, and offer comprehensive repair services when parts fail. For Modutek, customer service and support is as important as supplying the right equipment for the customer’s needs. If you need quality service and support for the semiconductor manufacturing equipment used at your facility call Modutek for a free quote at 866-803-1533 or email