Chemical Delivery Systems That Meet Your High Tech Manufacturing Requirements

Chemical Delivery Systems That Meet Your High Tech Manufacturing RequirementsIndustrial and research facilities that handle chemicals for their processes need reliable, safe and customized chemical delivery systems to store the chemicals, make them available at the appropriate process when needed and neutralize them effectively prior to disposal. Modutek designs and builds custom chemical delivery systems to meet the needs of their customers. Typical applications include wet processing stations, wet benches, fume hoods, plating stations, precision cleaning stations and acid exhaust hoods.

The company’s equipment features precise operation, accurate repeatability, excellent reliability and a high level of safety. All chemical delivery systems are designed and manufactured in house at Modutek’s facility in San Jose, California and their engineers can design systems to meet the specific needs of particular customers.

Equipment Description

Modutek’s chemical delivery systems feature all-Teflon fluid paths with double containment cabinet construction and leak detection. Double wall plumbing and data logging are available. Chemical containers can be large totes with a load cell interface for high volumes of chemicals or 55-gallon drums for delivery close to the process. Containers have level sensing with high/high, high, low and low/low signal levels.

Chemical delivery is automated with a touch screen giving important data such as levels and alarms. The status of key components such as pumps and valves is also displayed. The SolidWorks Simulation Professional and SolidWorks Flow Simulation software allow customers to perform chemical mixing and chemical delivery calculations. Since Modutek writes its own software, the operator interface can be customized to correspond to particular customer requirements.

Modutek’s custom chemical delivery systems are built to high quality standards and according to customer requirements. Customers can request final acceptance testing at the Modutek plant to ensure customer satisfaction and to provide evidence of the system’s superior reliability. Testing is carried out with deionized water and customers can see exactly how the equipment operates.


Modutek incorporates advanced technology and high quality components in their chemical delivery systems that reduce customer costs and improve productivity. Reliable and safe operation of the systems helps customers achieve performance and productivity goals. Because Modutek designs each system specifically for a customer’s process and operational requirements, system performance is optimized and waste is reduced. Typical benefits will include lower chemical and water use due to lower waste, an improved safety record, higher throughput and better quality output.

A key benefit comes from the system’s method of storing chemicals. System throughput is high even when chemical changes are frequent because the tote and drum system lets operators change chemicals rapidly. A storage tank lets the process continue even as the drums are re-charged and the large totes mean operators often don’t have to change drums at all.

Modutek’s automation helps minimize operator error with an easy-to-use interface that eliminates manual handling of chemicals. Spills and mistakes when mixing chemicals are eliminated and accidents from mishandling of dangerous chemicals are reduced. The software allows operators to deliver, mix and dispose of chemicals in a precisely controlled fashion that is safe and reproducible. Once a process has been run successfully, the sequences are repeatable with a high degree of accuracy.

Overall, customers who choose Modutek’s chemical delivery systems can expect to receive equipment that exactly meets their needs for reliable and safe chemical handling. They can expect to see reduced operating costs and improved plant productivity. The Modutek systems will perform chemical storage, delivery and mixing exactly according to what they need. For a free quote or consultation contact Modutek at 866-803-1533 or email [email protected].

Silicon Wafer Etching Processes for Wet Processing Applications

Silicon Wafer Etching Processes for Wet Processing ApplicationsThe manufacture of semiconductor components such as processors and integrated circuits relies heavily on the etching of silicon wafers with processes such as KOH etching to generate the required structures and connections. Modutek provides wet bench technology that can be used for a wide variety of these etching applications. Managers in charge of semiconductor manufacturing facilities, research centers or universities as well as process engineers working at these organizations can use wet bench equipment from Modutek to meet their silicon wafer etching needs.

KOH Etching

Etching silicon wafers with potassium hydroxide (KOH) is used to create microscopic structures in the silicon. The etch rate is impacted by the temperature of the etching bath, the concentration of KOH and the crystalline structure and impurities in the silicon. KOH etching is an inexpensive and repeatable process that etches rapidly. Modutek offers PFA Teflon tanks of their TFa or TT series for KOH etching applications.

Silicon Nitride Etch

Silicon nitride is used as a masking material in the fabrication of integrated circuits. It can be deposited on the silicon wafer as a thin film and is etched with hot phosphoric acid. The bath temperature is about 180 degrees Celsius, the boiling point of phosphoric acid. The Modutek series Nb nitride etch bath achieves precise temperature control by regulating the de-ionized water to phosphoric acid ratio. Modutek’s silicon nitride etch baths offer excellent repeatability, accurate process control and a high level of safety.

Piranha Etch

The piranha solution is made up of a mixture of sulfuric acid and hydrogen peroxide and is used to clean silicon wafers during the semiconductor manufacturing process. A common ratio used is 3 parts of concentrated sulfuric acid to one part of 30 percent hydrogen peroxide. The solution cleans organic compounds from substrates and oxidizes most metals. It is often used to clean photoresist from silicon wafers. Modutek can evaluate a customer’s silicon wafer cleaning requirements and propose suitable solutions from its extensive line of wet processing equipment.

Metal Etch

The conductors linking the microscopic electronic structures on a silicon wafer must be metallic to conduct the electric signals. Metals such as aluminum, copper and gold are deposited on the silicon wafer and must be etched. Etching metals can be challenging and effective etching depends on selecting the right chemicals and process.

For example, the Modutek vacuum metal etcher is designed for precise wet etching of aluminum layers. The process takes place under vacuum because the chemical reaction creates hydrogen bubbles that interfere with etching precision. In the vacuum, the bubbles are immediately removed by an evacuating pump. Modutek’s wet process equipment can use a variety of etchants to etch different metals.

Gallium Arsenide (GaAs) Etch

Gallium Arsenide is a semiconductor used in the manufacture of integrated circuits and other electric and electronic devices. It is etched with solutions containing hydrogen peroxide, usually in combination with sulfuric, hydrochloric or phosphoric acids. Modutek’s wet process solutions can handle such etching chemicals at lower cost than dry etching.

Modutek Wet Bench Solutions

As a premier provider of semiconductor manufacturing equipment for over 35 years, Modutek can offer wet processing equipment for a wide variety of semiconductor etching and cleaning applications. Modutek’s wet bench technology delivers reliable, repeatable results safely and accurately. The company can help customers in industry and research find solutions to their semiconductor manufacturing needs. For a free quote or consultation on selecting the right equipment for your silicon wafer etching process, contact Modutek at 866-803-1533 or email [email protected].