Chemical Handling for Wet Processing Equipment

Chemical Handling for Wet Processing EquipmentBecause wet processing of silicon wafers uses different types of chemicals, semiconductor manufacturing facilities need chemical handling equipment to store, deliver and dispose of the chemicals. A complete chemical handling system takes care of all aspects of chemical use and ensures chemicals are delivered to the process when and where needed.

For corrosive, toxic, or flammable chemicals, safe handling is critical. Most of the chemicals used in wet processing can’t be released into the environment without additional treatment. Neutralizing dangerous chemicals on site or storing them in safe containers until they can be transported to a treatment facility must be documented to comply with local regulations.

Since chemicals are often dangerous to the employees operating wet processing systems, the chemical handling equipment has to be designed to minimize spills and reduce employee exposure to chemicals and their fumes. A comprehensive chemical handling system can improve workplace safety, reduce spills and waste, and make chemical processes more efficient.

Chemical Delivery Systems Provides Your Process the Chemicals It Needs

Chemical delivery systems store the chemicals safely and then deliver the right quantities, mixtures, and concentrations directly to the production line. The amount of chemicals delivered has to be precise and repeatable. Successful wet processing often depends on the right mixture or concentration because etching, stripping, and cleaning can vary with the amount of chemicals in the bath. When processing batches, the amounts delivered must be precisely the same for each batch. With continuous processing, the chemicals delivered can’t vary over time.

Modutek has a complete range of chemical delivery equipment, from high volume systems for large continuous production lines to small batch operations. Chemicals can be stored remotely in large totes with a load cell interface or in 55-gallon drums near the wet process station. Modutek’s SolidWorks Simulation Professional and SolidWorks Flow Simulation applications can calculate the exact quantities of chemicals required, and the chemical delivery systems provide precisely the calculated amounts. These systems ensure that chemical handling and process repeatability are excellent.

Modutek’s Collection Systems Remove Used Chemicals from Processing Stations

Once a wet process such as cleaning, etching, or stripping is complete, the used chemicals must be removed from the process stations and collected. Chemicals can be stored in safe containers and sent to a company specializing in neutralizing and disposing of hazardous chemicals, or they may be neutralized on-site.

To collect the chemicals from processing stations, chemical lift stations can pump the chemical waste from the process tank to a storage container. Chemical carts, also called pump carts or collection carts, can be moved near the process tanks to empty smaller amounts of chemicals. Storage can range from small carboys to large collection tanks. For small volumes, waste chemicals can be pumped directly into a five-gallon DOT-approved carboy for subsequent shipping to an off-site neutralization facility.

Acid Neutralization Systems Ensure Compliance with Environmental Standards

Many wet process semiconductor manufacturing steps use strong acids in their process baths. The used acids must be disposed of safely without risks to employees, the general public, or the environment. Local regulations specify how acid waste must be treated to ensure that disposal meets these requirements.

As regulatory compliance becomes more complex, the costs of disposing of chemical waste off-site are increasing. Modutek can provide self-contained acid neutralization systems that are inexpensive to operate. These systems add neutralizing chemicals to the acid waste and track chemical use, waste pH, and discharge quantities. The systems can generate documentation for regulatory compliance and safely dispose of the neutralized waste.

Modutek Offers In-House Expertise for Selecting Chemical Handling Equipment

Modutek can help customers choose the right chemical handling equipment for their facility. In-house experts at Modutek can recommend equipment from a full line of chemical handling systems. Modutek can customize equipment for special applications and ensure that the systems meet customer needs. Contact Modutek today for t a free consultation to discuss your chemical handling needs.

Why Chemical Collection Carts are Needed for Chemical Handling

When high-volume chemical delivery systems are not needed because of small production volumes, chemical collection carts can provide safe chemical handling. Also known as chemical delivery carts or chemical pump carts depending on their role, these chemical carts can safely deliver chemicals to the process and remove them for disposal.

Safe handling of aggressive chemicals is especially important for small facilities that can benefit from the use of chemical collection carts. Labs, research centers and universities often have limited space and lack chemical treatment capability. Using chemical collection carts for the removal of used chemicals and safely delivering them to a specialized chemical treatment provider means small production sites don’t have to worry about adhering to disposal regulations.

Modutek’s Chemical Cart Characteristics and Features

Modutek’s chemical carts are designed for safety, ease of use, and flexibility. The incorporated on-cart holding tank can vary from 5 to 25 gallons and the carts can hold a 55-gallon drum in an optional configuration. The tanks are mounted on swivel casters with brakes and measure 18 inches wide, 36 inches long, and approximately 42 inches high.

With a three-eighths inch pneumatic pump and all-pneumatic operation, no electrical connection is required. Construction is white polypropylene with an all-Teflon fluid path and a stainless-steel option is available for solvent applications. The carts feature independent suction and discharge tubes and there is a high-level sensor with a pump interlock in the holding tank.

Operation of the carts for the dispensing of solvents, acids, or bases and the removal of waste chemicals is straightforward. The suction tube transfers chemicals from an external tank to the holding tank while the discharge tube drains holding tank chemicals and transfers them to an external container. A single pump cart can be used for multiple applications.

Chemical Collection Carts Are a Safe Way of Handling Chemicals

While still requiring manual operation, chemical pump carts can reduce the possibility of spills and accidents. With the use of carts, the transfer of chemicals between containers takes place in a controlled and structured fashion. Aggressive chemicals can be kept at a distance from the operators and workplace safety increases.

In normal use, the pump cart can be rolled up to the chemical processing station and can transfer the required chemicals. For chemical removal and disposal, for example, the suction tube of the cart can transfer the waste chemicals from the process tank to the cart holding tank. The cart can then be rolled out for chemical disposal.

Facilities that use chemicals for their production lines may have their own neutralization and disposal systems, but smaller facilities including universities and research labs often outsource chemical neutralization and disposal to specialized service providers. If the manufacturing facility neutralizes its own waste chemicals, the pump cart can transfer the collected waste from the holding tank into the neutralizing and disposal system. If an external service provider is used for chemical disposal, Modutek’s carts make it easy to ship the containers holding the waste.

The holding tanks on Modutek’s carts feature double containment for extra safety. If the waste chemicals are not neutralized on site, they are stored in a Department of Transport (DOT) approved container for pickup by the specialized chemical processing company. In this case, no in-house chemical neutralization processing is required.

Modutek designs and builds its own systems and equipment in-house. This means that the company can easily customize chemical collection carts to meet special customer requirements. Modutek works closely with customers to identify what they need and works and develops systems and equipment to meet their specific requirements. Contact Modutek for a free consultation and quote on equipment needed to support your chemical processing and disposal needs.

How Chemical Carts Provide Safe Handling and Disposal of Chemicals

How Chemical Carts Provide Safe Handling and Disposal of ChemicalsChemical handling equipment is an important part of a semiconductor manufacturing operation because the aggressive chemicals used in etching and cleaning semiconductor wafers have to be stored, delivered to the process, and disposed of safely. Chemical carts, also referred to as chemical pump carts or chemical collection carts, are a convenient way to remove waste chemicals from process tanks and ready them for disposal. These carts are compact units that can be rolled up to the processing line to pump out processing tank contents. Carts have to be designed for safe pumping and containment of the chemicals and for moving them to a safe location for further treatment.

Chemical Cart Design Features

Modutek’s chemical carts allow operators to quickly remove used chemicals from a process line and let the process continue to the next step with a minimum of delay. The carts are easily rolled up to the process tank that contains the used chemicals and operators can safely transfer even toxic or corrosive chemicals. Modutek’s chemical carts have the following features:

  • Compact profile at 36 inches long, 18 inches wide, and 42 inches high
  • Made of white polypropylene resistant against acids; also available in stainless steel for solvent applications
  • Mounted on swivel casters that can be locked
  • Suction wand for emptying process tanks
  • Independent discharge tube for transfer of waste chemicals to a neutralization system
  • Pneumatic pump, three-eighths inch
  • On-cart five-gallon chemical tank with double containment that is Department of Transport approved
  • High-level sensor interlocked with pump for additional safety
  • All-Teflon piping

Once operators have pumped waste chemicals into the cart tank, the cart can be rolled out to a neutralization area or the waste can be shipped off-site for neutralization and disposal by a specialized company. In either case, the amount of chemicals and the treatment are recorded to ensure compliance with local environmental regulations.

Chemical Handling Equipment Increases Workplace Safety

Chemical handling equipment such as chemical carts allows operators to receive, store, deliver and discharge dangerous chemicals safely. Well-designed chemical handling equipment can reduce waste, deliver accurate dosages to the process and track chemical use. Containment of spills is an important safety and environmental issue that can be addressed by good design practices. Modutek’s extensive experience with wet process technology and the acids used to ensure that the company’s chemical handling systems operate in a completely safe and reliable manner.

Chemical Handling Functions Require Different Types of Equipment

While chemical carts used for the disposal of used chemicals fulfill one particular role, similar units can take on other functions. Chemical delivery systems handle chemical reception, storage, and delivery to the process. They can include remote bulk storage such as in large tote chemical containers that can supply high volumes of chemicals or 55-gallon drums located at the process. Chemical delivery systems can include software for dosage control and software can control the mixing of chemicals as well.

Chemical lift stations can fulfill a role similar to chemical carts but the units are permanently installed. They are sometimes located behind the wet process station they are serving, but Modutek has developed a space-saving design that allows an integration of the lift station in the process line. When chemical waste or waste water enters the lift station tank, the liquids are pumped to a neutralization area for further treatment.

Modutek’s product line of chemical handling equipment allows manufacturers to make their workplaces safer and save money. Chemical carts and other chemical handling equipment can be customized in terms of flow, capacity, and functionality to respond exactly to customer needs. Modutek can leverage its experience in semiconductor manufacturing equipment to help customers choose the right systems and ensure that the chosen systems perform as needed.

How Chemical Carts Support Chemical Disposal

How Chemical Carts Support Chemical DisposalWhen difficulties associated with chemical disposal and regulatory compliance increase, it’s time to think about either removing used chemicals for off-site disposal or using dedicated equipment for disposal according to official guidelines. Chemical carts can be rolled over to process stations and can pump used chemicals from the process tanks to a container on the cart. The used chemicals can then be turned over to a disposal company or can be neutralized and treated in an onsite facility. The manufacturing process can continue with a fresh batch of chemicals while documentation and handling of the used chemicals can be carried out according to local regulations.

Chemical Carts Remove Chemicals Quickly and Safely

Once the chemicals for a process step have fulfilled their function and the process step is complete, the used chemicals have to be drained from the process tank so that the next process batch can begin. The use of chemical handling equipment such as pump carts is a flexible solution allowing operators to remove used chemicals from the process tanks for different process steps.

An operator can roll the chemical pump cart to the tank that contains the used chemicals. A suction wand allows the operator to pump the chemicals out of the process tank. The used chemicals are pumped into a dedicated storage tank on the chemical pump cart and the cart can then be rolled out to a designated disposal area.

Depending on whether the company handles chemical neutralization and disposal in house or not, the chemicals can be transferred to a disposal system or turned over to an external chemical disposal specialist. In either case, documentation for the handling of chemicals according to local laws and regulations can be prepared before final disposal.

Modutek’s Chemical Carts Feature Ease of Use and Enhanced Safety

At 36″ long x 18″ wide x 42″ tall, Modutek’s chemical pump carts are compact and easy to roll out. Made of white polypropylene, the carts run on swivel casters with brakes and feature independent suction and discharge tubes. Pumping is with a 3/8th inch pneumatic pump. The five gallon chemical tank on the cart has a double containment system and is DOT (Department of Transportation) approved. A high level sensor on the tank is interlocked with the pump for additional safety. The plumbing is all Teflon and each cart can handle multiple applications.

As an option, chemical carts can be delivered in a stainless steel design for solvent applications. Other options include a pressure interlock safety switch, a large capacity tank and a double dump design. Modutek can help customers decide on the options they need and make sure that the chemical pump carts meet their requirements.

Modutek’s Chemical Handling Products Fulfill Manufacturing and Research Facility Needs

Modutek manufactures a complete line of chemical handling equipment to meet the needs of manufacturing plants and research facilities. In addition to chemical carts, Modutek’s chemical handling systems include chemical delivery systems, chemical collection systems and chemical lift stations. The systems can store chemicals, deliver them to process stations and remove them to neutralization areas. The chemical handling equipment is designed to interface with existing or new manufacturing lines and can be customized for almost any application. For example, storage in large tote containers with a load cell interface reduces drum changes and the lift station functions can be incorporated into a process station in a space-saving design. Throughout the design process, Modutek works closely with customers to identify production line issues and develop effective solutions. The company prioritizes customer satisfaction and delivers equipment of the highest quality with low operating costs and a low total cost of ownership. Contact Modutek for a free consultation or quote on selecting the right chemical handling equipment to meet your specific requirements.