Modutek’s Differences You Can Depend On

modutek-graphicModutek Corporation is based in San Jose, CA and we’ve been in continuous business operation since 1980. During this time, we have grown through product advancements and company acquisitions and have always strived to provide products that exceed the requirements and expectations of our customers. Having the ability to order all of your wet processing equipment with one manufacturer with all the equipment manufactured at one location is one of the key differences we offer.

All our quotation requests for the products are provided according to your specifications with our 30 plus years of industry experience behind it.  We don’t confine you to catalog ordering at Modutek. Our customization, commitment, product quality, dependability, service, support and equipment start-up is what sets us apart from the competition. We have sold wet benches along with a broad line of semiconductor manufacturing equipment to over 500 companies in the United States and internationally since 1980. Our extensive product line includes the following:

  • Fully automated wet benches
  • Semi-automated wet benches
  • Manual wet benches
  • Free standing IPA Vapor Dryer
  • Megasonic cleaning systems
  • Complete line of process components and rinsers
  • Control systems for all applications
  • Rotary etchers
  • Wet bench upgrade
  • Acid and base neutralization systems
  • Air Scrubbers
  • Chemical delivery and mixing systems
  • Chemical collection systems
  • In-house service and support
  • Contract manufacturing

Our Service and Support:

We provide one year warranties on all of our products and accessories, and our field support team is available to answer your questions and resolve equipment problems by calling our toll free number: 1-866-803-1533. The level of support would depend on your specific contract with Modutek Corporation. Our fully automated equipment has remote assess capability. This allows our engineers to update software and troubleshoot your station anytime with internet access. After the install is completed our support engineers will qualify the system and train your operators. Overall support would depend on your specific contract and requirements.

Our Equipment:

We design all our equipment in-house and our own staff of engineers will review your specific requirements. We will typically start with one of our proven standard platforms and design a custom system for your requirements. We have manufactured hundreds of systems, and many of these systems have very complex processes for etching, precision cleaning, stripping and chemical mixing. We offer manual operation and full-data logging in real time systems, communication support, monitoring / controlling process bath chemistry and many other system features.

Our Reputation

We’ve been referred to as the “best kept secret” by some of our current customers. This is due in part to our vast product line, willingness to work directly with you to solve your problems and give you the “one-stop support” to make your job easier.

Visit our web site at and see the difference. Contact us directly through the web site or by calling 1-866-803-1533.  We will respond within 24 hours during the week day.

Modutek’s Chemical Fume Hoods: Ordering Made Easy

Modutek-Chemical-Fume-HoodsWhen it comes ordering chemical fume hoods for your lab, Modutek gives you a wide variety of options to meet your requirements. With our wet processing capabilities, we can add the features you require that give you flexibility and overall design advantage. Whether you require a table top exhaust hood or a freestanding hood supported with a HEPA filter filtration system, Modutek can customize our equipment to meet your specifications and requirements.

There are no catalog numbers to limit your choices. All lab and research projects have their own unique equipment requirements. We are your one-stop shop that can provide all your lab equipment needs for all types of wet processing, wet bench and related manufacturing. Below are the features and benefits of Modutek’s chemical fume hoods and how we make ordering easy:

  • Modutek’s chemical fume hoods are made from high-quality materials. This includes stainless steel construction to handle solvent applications and white polypropylene to handle acid and base processes.
  • Each unit is manufactured having electrical outlets at deck level. The units can be manufactured using standard, ground-fault circuit interrupter (GFI) or explosion proof electrical outlets. GFI outlets are required in most states since they provide the best protection from electric shock. Explosion proof electrical outlets are used in hazardous and corrosive environments. Choose the outlet that best suits your manufacturing needs.
  • If you need a chemical fume hood built with a utility sink with a gooseneck faucet, we offer that option. This type of faucet is an option many of our customers choose as part of their requirements.
  • Temperature controlled chemical baths are also available with our chemical fume hoods or exhaust stations for your laboratory.
  • Modutek’s chemical fume hoods can also be designed with overhead fan filter units (FFU) if they are part of your requirements.
  • A carboy chemical containment system is included with our chemical fume hoods. This system captures waste solvents produced during wet processing, and other related chemical processing applications.
  • Counter balanced safety shields are also provided with the chemical fume hoods manufactured by Modutek.
  • Overhead LED lighting is also included on-deck.
  • Custom designed chemical fume hoods built per your specifications. What does your specific application require? What size and length chemical fume hoods do you need? We can create any size and length to meet your requirements.

Other options you can get on your Modutek chemical fume hood include dedicated drains to carboy with DOT containment, lift stations designed into the benches, fan filter units (HEPA), Teflon N2 gun and DI water hand spray, and extended warranty. If you need additional information on Modutek’s chemical fume hoods you can contact us at 866-803-1533.

Choose Modutek’s Quartz Baths When Safety and Reliability Are a Must

Choose Modutek's Quartz Baths When Safety and Reliability Are a MustThe Quartz Baths designed and manufactured by Modutek Corporation are safe and reliable as well as being cost-effective so it can be integrated into your current production system. With over 30 years of experience developing and evolving the bath designs, they are seen in the industry as the quality standard of quartz baths.

Pure quartz is nearly inert and will not react with most other substances. It is for this reason quartz is the perfect choice for semiconductor processes. Not only is it non-reactive, it is also stable at relatively high temperatures. It has a Mohs hardness of 7 and lacks cleavage which enables it to handle most demanding applications.

Modutek offers different Quartz Bath Products to meet your processing needs:

The QFa Series Quartz Baths provide the following benefits:

  • Fast heating that is more even than other manufacturers
  • A nested, 4-sided heating element that heats to 360 degrees Fahrenheit with a serrated overflow barrier
  • A seamless, sloped flange design
  • Minimizes damages which could result from runaway temperatures
  • Dual safety snap switch
  • Improved up-time and reliability because of the longer vessel life
  • Easier laminar flow while it reduces particulate contamination

It can be used with a variety of chemicals including H2SO4, H202, SC1 and other chemicals. It has an operating range of 30 º – 180 ºC. The operating temperature range can be controlled in ± 1 ºC (depends on controller and process). The operating temperature range has a heat-up rate of 2 º C per minute. (This rate will be affected by the size of the system, the fluid being used and other factors.) It can be used for cleaning, etching and stripping and has a ¾” male Flaretek circulating fluid inlet/outlet.

Options include a liquid level sensor, process temperature controller, custom vessel sizes to meet your specifications, quartz diffuser plate and autolid.

The Qa Series Quartz Bath is a constant temperature quartz bath. It has redundant safety devices, seamless, sloped flange design and a bonded, 5-sided circuit heating element. Benefits include improved process yield by faster, more efficient, and even heating. It minimizes the potential damage caused by runaway temperatures. It also increases uptime and reliability because of longer vessel life.

The options available for the Qa Series Quartz Baths include having a magnetic stirrer, a gravity drain, an aspirator (dilution) valve system, remote operation timer switches, quartz bubbler, and process controller.

Both Series Quartz Baths come in a variety of sizes. If you would like to learn more about the Modutek Corporation Quartz Bath models or want a quote, you may reach us at 866-803-1533.

Modutek’s DR Series Quick Dump Rinser

Modutek Quick Drump Rinser DR Series

Modutek’s DR Series Quick Dump Rinser

Throughout wafer manufacturing, few steps are as critical as the D.I. (deionized water) rinse cycle. In most cases, your product is exposed to more D.I. water than any other process fluid. For this reason, a truly effective rinsing system can contribute dramatically to the reduction of particles and defect densities. A considerable amount of time has been given to help you make this transaction into our DR series quick dump rinser easy and affordable. Whether it’s upgrading your existing rinsing line or installing new wet process station we have the plan that will work best for you.

Our overall DR series Quick Dump Rinser is designed with two major features. One: Easy installation into new or used equipment and two: Low DI water consumption due to our rinse features.

Modutek's Quick Dump Rinser during the spray cycleSuperior and consistent rinsing is achieved by (1) strategically located D.I water spray nozzles, (2) bottom filling (3) N2 agitation and (4) bottom fill that creates a vortex agitation in the rinse tank (optional).

The interior volume of the DR Series Quick Dump Rinser was reduced to minimum size relative to the wafer cassette. This, along with a 360˚ overflow weir and rapid dump time ensures that all large and small contaminants are quickly removed from the surface of the wafer and surrounding areas, thereby preventing recontamination of the wafer.

Modutek C15sa Rinser Controller is used in conjunction with the Quick Dump RinserModutek’s C15sa Rinser Controller is specifically designed for use with the DR Series Quick Dump Rinser wafer rinse system and provides a high degree of process flexibility. The user has the ability to program dump cycle, fill cycles, start cascade and spray delay. In addition, our C15sa controller has the ability to be programmed for resistivity and incorporates an access code which prevents tampering with the program.

In order to rinse to resistivity, the DR Series is used in conjunction with the Modutek Resistivity Monitor RM30a (optional feature). The RM30a has the ability to monitor resistivity and temperature inside the DR series rinser as well as incoming water into the wet bench. Once resistivity setting is reached inside the Quick Dump Rinser the rinse cycle discontinues at the next full level. This results in a process specific rinse, ensuring that a minimal amount of DI water is used.

Modutek Quick Dump Rinser during full rinse cycleIn addition to all of these features Modutek’s Quick Dump Rinser is designed for new or used wet bench installations. With this design you can easily upgrade your old rinser and not incur the cost of a new wet bench. The water savings and the increased throughput will help cover the cost of the overall upgrade. If you would like to learn more about Modutek’s Quick Dump Rinser and how it can improve your wafer manufacturing process, call 866-803-1533 or email [email protected].

Acid Neutralization Systems Provided by Modutek

Acid Neutralization Systems Provided by ModutekAn Acid Neutralization System is vitally important for any company that uses chemicals in their manufacturing process. Chemicals need to be neutralized before they can be discharged. Normally, the requirement in most industries is that chemical waste be discharged with pH range of between 5 to 9 pH. The benefits of Modutek’s Acid Neutralization Systems are discussed below.

Modutek has been designing and manufacturing Acid Neutralization Systems since in the 1990s. Each system is self-contained, is inexpensive to operate, and can be installed easily at your company. Because these Acid Neutralization Systems are designed in-house, they can be modified to fit in the space you have available. Along with the physical dimensions of the Acid Neutralization System, the throughput capacity can also be tailored for your specific production needs.

Industries that generally use Acid Neutralization Systems include Photovoltaic Solar Cell Manufacturers, Pharmaceutical or Biotechnology, Semiconductors, Aerospace, Laboratories, Chemical Processing/Manufacturing, Metal Plating/Finishing, and Medical Devices. No matter what industry your company is in, if you need an Acid Neutralization System, the systems manufactured by Modutek Corporation have many benefits:

  • All Acid Neutralization Systems manufactured by Modutek Corporation are completely self-contained
  • The compact systems are available in two-stage or three-stage systems
  • They are available in many sizes ranging from 5 to 500 gpm
  • They can be installed indoors or outdoors for added flexibility
  • They feature fully automatic operation that treats both acidic or alkaline waste streams
  • Automatic discharge occurs only within desired limits
  • The final monitor chamber is set up for ease of sampling and recording all pH before discharge occurs
  • Stripchart recorders offer continuous monitoring and recording of the pH discharge
  • The system includes an alarm system for high and low pH in the final chamber as well as a PLC with Touch Screen

The Acid Neutralization Systems from Modutek provide the following options:

  • Integrated Lift Stations
  • BMS Systems
  • Surge Pumps
  • Paperless Chart Recorders
  • Data Logging
  • Remote Alarm Panels
  • Process Equipment Integration

The Acid Neutralization Systems from Modutek can easily be incorporated with the other equipment used in your manufacturing process. We offer various sizes which can be customized to meet your requirements. If you would like to learn more about Acid Neutralization Systems produced by Modutek Corporation, call 866-803-1533 or email [email protected].

Semiconductor Manufacturing Equipment: Benefits of Purchasing from Modutek Corporation

Semiconductor Manufacturing Equipment (SME) from Modutek Corporation is designed and configured according to the client’s specifications and are key components used in semiconductor manufacturing operations worldwide. Whether a company uses one of the manual wet benches, a fully automated wet bench station or a rotary wafer etching system, you can depend on Modutek to work closely with you to understand your specific application and supply a system that meets your application needs.

Semiconductor devices are used in nearly every industry today. They permit different machines to communicate with one another and with us. Through robotics, they do many jobs that are considered unsafe or too exacting that a human could never repeat them as often and as exacting as needed. They allow us to explore the universe around us and are as near as your computer.

Semiconductor manufacturing requires four basic steps:

  • Producing pure silicon ingots and then silicon wafers;
  • Making integrated circuits onto the silicon wafers;
  • Assembling the integrated circuits into a finished product;
  • Testing the back-end process of these products.

Our team of experts understands Semiconductor Manufacturing equipment and the industry requirements and has a combined 76 years of experience. You can trust that our team will know and understand your specific manufacturing requirements and will provide you the equipment that meets or exceed them.

What industries use Modutek Corporation SME systems? Obviously, the Semiconductor industry is one of the industries using our equipment. You will also find Modutek Corporation equipment being used in the Micro-Electro-Mechanical System (MEMS) industry, Solar, Wafer Reclaim, Aerospace, Pharmaceutical and Biomed, Electroless Plating and Electroplating companies.

Modutek has been in continuous operation in the Semiconductor Manufacturing industry since 1980, and we are experts in process control which is needed in process engineering. With our process control, any process engineer can easily design his or her process around our highly reliable products and equipment.

Some of the benefits of using semiconductor manufacturing equipment developed by Modutek  include:

  • Reliable chemical flow throughout the bath for better process control
  • Specially designed tanks to help meet your process requirements
  • Long company history with manufacturing design experience
  • Advanced documents for long-term support (electrical schematics, P&ID and BOM)
  • All chemical baths are guaranteed for continuous temperature control and flow control
  • True process control allows for process engineers to build their process around our consistent application environment.

When you turn to Modutek Corporation, you be assured that we are able to meet or exceed your semiconductor manufacturing equipment needs. Contact us at 866-803-1533 or via email at [email protected] to speak with us today.

Chemical Fume Hoods – Using Technology to Keep Workers Safe

Chemical Fume Hoods are necessary for businesses that use caustic chemicals or cleaners that are hazardous for those working around them. Modutek Corporation, which has been in business since 1980, manufactures some of the best Chemical Fume Hoods available today.

Properly designed and installed Chemical Fume Hoods are necessary to reduce a lab worker’s exposure to hazardous fumes, vapors, gases and dust created during lab tests. They are also used for Research and Development (R&D) analysis and in University laboratories. A Chemical Fume Hood works by confining any hazardous airborne material as well as diluting it with large amounts of air. This is drawn through an exhaust and filter system which is then expelled through the roof of a building or, if a company chooses a ductless system, the air is filtered and re-circulated.

Chemical Fume Hoods designed and manufactured by Modutek are used in a variety of applications in a number of different industries. They can remove and filter smells, fumes, gases, airborne chemicals, dust and other related airborne contaminants. Modutek’s Chemical Fume Hoods provide quick and low-cost hazardous chemical exhausting to keep your work area safe for your employees.

Some of the benefits of using the Modutek’s Chemical Fume Hood system include:

  • Low-cost of ownership that comes with a one-year warranty on all parts; however an extended warranty is available.
  • Meets or exceeds all current industry safety standards.
  • Our Chemical Fume Hoods are easy to install and set up.
  • Chemical Fume Hoods can be designed to meet your current testing needs.
  • We work closely with each client to setup a specific custom design or configuration.
  • The equipment is designed to allow for future expansion.

There are a number of options available for Modutek’s Chemical Fume Hoods including a ductless fume hood design that collects fumes directly from the source and re-circulates the filtered air. The ductless application comes with carbon filter, dust filter or can be used with fume/air scrubbers. Ductless Chemical Fume Hoods can be used with a fume/air scrubber or other similar filters and do not evacuate air to the outside.

Other options for the Chemical Fume Hoods designed and manufactured by Modutek include, but are not limited to:

  • FM4910 (PVC-C) material of construction
  • Utility sink with gooseneck faucet
  • Easily accessible electrical outlets at deck level
  • Fan Filter Units (HEPA)
  • A lift station designed into the bench
  • Drains dedicated to carboy with DOT containment
  • Overhead deck lighting
  • Teflon N2 gun and DI water hand spray
  • Counter balance safety shields

If you would like more information about the Modutek Corporation Chemical Fume Hoods, or any of our other products, please contact us today at 866-803-1533.

Discover the Advantages of Modutek’s IPA Vapor Dryer

IPA vapor dryer (Marangoni Drying) in fab

Our IPA Vapor Dryer, also called Marangoni Drying, provides an alternative to current drying processes used in semiconductor and related manufacturing. The Modutek IPA Vapor Drying system is housed in one free-standing chamber. The unit also allows for quick and easy bottle changes to eliminate down time. Discover the other advantages of the Modutek IPA Vapor Dryer.

Why is Marangoni Drying so popular for semiconductor production? The process originally developed in 1990, allows for the production of ultra clean and dried surfaces on flat substrates. This is accomplished as the water/IPA slowly drains around the substrate wafer. Nitrogen gas breaks the surface tension of the wetting film which dries the substrate. The process also allows for very low particle counts, no watermarks and no feature damage.

The following are some of the benefits of the IPA (isopropyl alcohol) Vapor, drying process:

  • The IPA Vapor Dryer does not have moving parts which are common in spin drying. This allows for the production of thinner substrates.
  • The IPA Vapor Dryer reduces the chance of particle contamination due to residue after evaporation, often seen as a problem with spin rinse dryers.
  • Because the IPA Vapor Dryer is different from other drying processors, fewer chemicals are needed which reduces chemical costs and the need for disposing of them. This is important from an environmental standpoint.
  • Production costs are also reduced with the IPA Vapor Dryer because drying times can be as short as 10 to 15 minutes. The fact that there are no moving parts also means there should be less maintenance required.
  • Reduced particle counts make the IPA Vapor Dryer the preferred choice over other drying processes.
  • Excellent for high aspect ratio structures.
  • Production is increased because the IPA Vapor Dryer reduces the chance of substrate breakage during the cleaning and drying process.
  • The IPA Vapor Dryer also reduces damage caused by electro-static discharge because there is no build up between metallic surfaces. The result is higher production of quality substrates.
  • The IPA Vapor Dryer also leaves no watermarks, a common problem resulting in yield loss.

IPA Vapor Drying is important for the semiconductor industry as well as those industries that use this technology including computer disk drive manufacturers, solar panel manufacturers, and manufacturers using electro-chemical cells. Industries that use micro-electronic mechanical systems (MEMS), such as the automotive and medical equipment, would also benefit from the substrates produced by IPA Vapor Drying.

If your company needs a drying process upgrade, consider our IPA Vapor Dryer for your application. Call us at 866-803-1533 to discuss your needs and to get a quote.