Modutek Receives Order for Single Chamber HF Last/ IPA Vapor Dryer

Modutek Corporation, a premier provider of semiconductor manufacturing equipment has received a customer order for a new innovative IPA vapor dryer. The new IPA vapor dryer includes HF (hydrofluoric acid) injection (ratio controlled) as a first step before the standard IPA vapor drying process. This provides an oxide etch to bare silicon. The Hydrophobic wafers are now rinsed to pH controlled level. Once the pH level is met the IPA vapor dry process begins in the same chamber.  This eliminates the requirement to move a cassette of Hydrophobic wafers to a separate drying station.  The new dryer system improves yields by reducing or eliminating water spots and reduces defects with particle-neutral drying.

IPA Vapor Dryer Features

Modutek’s IPA vapor dryer has a single drying chamber for DI water rinsing and IPA vapor drying. The on board HF metering ensures precision mix ratios. The oxide etch with IPA drying uses an in situ process with a rinse to pH before the IPA drying cycle begins. The system features a filter bypass for contamination control and no cassette contact points during etch, rinse and dry.

IPA vapor, generated in standard one-gallon bottles, is introduced into the drying tank through the top cover. The bottles are easy to change at deck level and the top entry of the IPA vapor ensures an even distribution. Modutek’s IPA vapor dryers handle all process sizes from standard wafer carriers to glass substrates. Modutek designs, assembles and tests all the company’s equipment in their facilities in San Jose California and does not subcontract the design or assembly of their dryers.

Modutek Dryer Benefits

Most Modutek dryer cycles conclude within 10 to 15 minutes with a very low consumption of IPA. The technology eliminates watermarks and, because there are no moving parts in the dryer, there is no chance of wafer breakage. By designing the dryer technology into the wet bench, one transfer step can be eliminated. Modutek has extensive experience with custom installations and can help design an IPA vapor dryer to meet the requirements of any application.

About Modutek:

Modutek serves domestic and international customers who have needs in any type of wet processing or lab setting and builds chemical delivery systems for pharma, biochemical, nuclear, solar and wet bench manufacturing. Modutek has a full background in chemical delivery and is a turnkey wet process system integration manufacturing operation.

What Fume Scrubbers Do and the Benefits They Provide

What Acid Fume Scrubbers Do and the Benefits They ProvideManufacturing processes such as semiconductor etching or the cleaning of parts with strong chemical solvents generate exhaust fumes containing the process chemicals in gaseous or droplet form. Such fumes have to be neutralized before they can be released into the atmosphere or into the air inside the manufacturing or research facility. The fumes are harmful to human health and may be corrosive to plant machinery. Companies face fines if they release fumes into the outside atmosphere and may contravene labor standards if the fumes reach the factory floor or lab work areas.

Modutek’s Acid Fume Scrubbers use a wet packed bed to remove acid and base chemical traces in chemical process exhaust fumes. The fumes pass over wet packing material and the chemicals are removed as they come into contact with a neutralizing solution in the beds. Well-designed fume scrubber beds expose the fumes to a large surface area covered in neutralizing solution. The harmful gases dissolve in the solution, are neutralized and are no longer present in the air. A wide range of fume volume handling capability makes the Modutek fume scrubbers suitable for all kinds of manufacturing facilities and university or company research labs.

Custom Designs

Modutek offers a wide range of models to address the various fume scrubbing requirements that customers may have. Air handling capacities range from 500 CFM to 25,000 CFM and each scrubber is designed to meet the customer’s air quality standards. The scrubbers come with a NEMA 4 control cabinet, a complete set of flow and pressure gauges, control of the scrubber water level and a metered discharge. Seismic and structural certification is available. The scrubber models have the flexibility to meet many requirements such as treating air from acid exhaust hoods, plating stations, precision cleaning stations and wet benches.

High Efficiency

Modutek’s Fume Scrubbers operate at high efficiencies to neutralize chemical fumes from exhaust air and minimize water usage. Automatic pH control of the scrubber water optimizes operation and allows removal of acid and base chemical fumes of up to 99 percent. The scrubbers use packing material from packing media industry leader Lantec to maximize the surface area of the scrubber solution exposed to the fume gases and reduce water usage to a minimum.

Modutek Acid Fume Scrubber Features

Acid Fume scrubbers from Modutek are designed for low cost of ownership with a low use of consumables. A bottom drain and the Lantec packing material facilitate maintenance. The scrubbers are made of black polypropylene with UV protection and they feature double containment for extra safety.

To ensure and maintain efficient operation, the scrubbers recirculate the scrubber water and feature a demister section and removal of water-soluble vapor. These features together with the design flexibility of the scrubbers and the company’s capability to offer highly customized units make Modutek’s Acid Fume Scrubbers an excellent choice for use in many factories and labs. Manufacturing processes such as semiconductor fabrication and biomedical devices as well as research labs using chemical processes can make sure that they maintain the clean air quality they need. If you need more information or a quote on Modutek’s Acid Fume Scrubbers call 866-803-1533 or email [email protected].

How Quartz Baths Are Used in a Manufacturing Process

How Quartz Baths Are Used in a Manufacturing ProcessThe manufacture of semiconductor components requires the cleaning, stripping and etching of semiconductor wafers using corrosive chemicals in a tightly controlled environment. Two important factors for achieving improved yields of functional components are keeping the bath free from contaminants and accurately controlling the temperature. High quality quartz baths fulfill these requirements with a tank material that is impervious to the chemicals used in the baths and that facilitates fast even heating by conducting heat efficiently. A well-designed quartz bath is the most effective solution for processing semiconductor wafers in chemicals such as sulfuric or hydrochloric acids, even at elevated temperatures.

Important Characteristics of Quartz Baths

To process semiconductor wafers effectively, quartz baths must be well designed and be made of quality materials. To avoid introducing unwanted impurities into the process the bath must be made of quartz of the highest purity. It must be available in a variety of sizes and heat up rapidly, featuring tight temperature control. Operation must be safe and reliable, ideally based on extensive experience in the design and supply of these products.

Modutek Recirculating Quartz Baths

The Modutek Series QFa quartz baths are high temperature recirculating units manufactured to the highest quality standards. Modutek has over thirty years experience in designing quartz baths and the company uses the expertise acquired with this evolution to offer the best in the industry. Key qualities resulting from this evolutionary process are safety, reliability and low cost of ownership.

For its recirculating quartz baths, Modutek uses semiconductor grade flame polished quartz to keep potential contamination to a minimum. The baths feature fast, even heating and a seamless, sloped flanged design that helps ensure safe operation. Temperatures in the range of 30 to 180 degrees C. can be controlled to plus/minus 1 degree C. and the heat-up rate can be up to 2 degrees C. per minute. Bath sizes range from 7.75 x 7.75 x 9 inches to 21.50 x 11.50 x 10.50 and 17.87 x 10.75 x 14.50 inches while custom sizes are available as well.

Modutek Constant Temperature Quartz Baths

With many of the same quality and operating features as the QFa models, the quartz baths of Modutek Qa series meet the same goals of high safety and reliability combined with a low cost. The process vessel is made of internally flame polished virgin fused quartz, boron-free, and the baths have the same accurate temperature control of 1 degree C. with a heat-up rate of 2 degrees C. per minute. Options include a magnetic stirrer, a quartz bubbler and remote operation timer switches and available sizes are similar to those for the recirculating baths. Modutek quartz baths can be used with confidence to improve semiconductor processing performance.

If you need help selecting quartz baths to use with your manufacturing process, contact Modutek at 866-803-1533 or email [email protected].

Quartz Tube Cleaning Stations: What They Do and the Benefits They Provide

Quartz Tube Cleaning Stations: What They Do and the Benefits They ProvideQuartz tubes are used in the processing of semiconductor wafers at high temperatures inside a diffusion furnace and must be cleaned with corrosive chemicals. Quartz tube cleaning stations have to be customized for the requirements of a particular process. With expertise in chemical handling and the customization of chemical delivery stations, Modutek is ideally situated as both a designer and supplier of quartz tube cleaning stations that meet the needs of their customers. A rugged design combined with automation and drying options make the stations a reliable and flexible choice for quartz tube cleaning.

Benefits that Quartz Tube Cleaning Stations Provide

Quartz tubes are delicate and cleaning them is a critical process. Ideally semiconductor manufacturers need cleaning solutions that are effective while keeping the handling of the tubes to a minimum. With Modutek’s quartz tube cleaning stations the tubes roll during etch this helps reduce chemical usage. Spray nozzles and tubes are then used for DI water rising. The custom design includes options for automation and drying with nitrogen. Construction of the station can reach ten feet in length. In addition to quartz tube cleaning, possible applications include EPI tube cleaning, Poly Silicon tube cleaning, and bottle washing.


Standard Modutek quartz tube cleaning stations are of white polypropylene construction and have manual or automated roller systems. The station has casters and leg levelers and is constructed to the specific size and length needed for the particular application. All stations incorporate an acid cycle and a rinse cycle. PVC safety shields, a Teflon nitrogen gun and a deionized water hand sprayers are standard features.

Options include changing the construction material to FM4910 material and adding a hot nitrogen drying system. Once the basic application features are determined, options such as holding tanks, on board bottle washer automation can be added. Third party certifications are available. Modutek will evaluate each option for the appropriate application and make corresponding recommendations.


Optional automation features include an automated tube roller system and automated program recipes. From the main screen, the operator can see the status of the system and select operations. Options such as drying and bottle washing are integrated into the automation system and can be controlled from there.

When selecting automatic operation, no further control action by the operator is required. When selecting manual operation, an additional screen will come up showing the controls and allowing the operator to carry out the necessary actions. Safety interlocks remain active and the operator can return to the main screen at any time.

The setup section of the automatic system allows authorized personnel to program system parameters such as acid soak time, rinse time and dry time. A maintenance section allows an operator access and test different parts of the system. Access codes for setup, operation and maintenance can be set to ensure only authorized personnel use the different parts of the system.

Both the manual and automated version of Modutek’s quartz tube cleaning stations offer superior performance, reducing product defects due to process impurities during semiconductor manufacturing. The self-contained but customized and flexible nature of the stations allow for easy installation and service. All stations are designed and built in house by Modutek, allowing the company to offer a complete spectrum of support. If you need help selecting a quartz tube cleaning station for your specific application or want a quote, contact Modutek at 866-803-1533 or email [email protected].

Wet Bench Ergonomics and Safety

Wet Bench Ergonomics and SafetyImplementing ergonomic engineering principles to reduce operator strain and effort can increase safety and help prevent accidents. Established safety guidelines such as those of the Semiconductor Equipment and Materials International (SEMI), the “SEMI S8-0712 – Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment,” can help manufacturers design their installations accordingly. Such designs make it easy for operators and technicians to reach controls and work with semiconductor wafers. Modutek follows these guidelines and has included specific features in their wet benches and other equipment to allow for ergonomic and safe operation. In addition, when dealing with specific customer requirements or retrofitting existing installations, Modutek can develop customized ergonomic solutions.

Swing Arm Interface Mount

When technicians have to monitor a process or operate tools when troubleshooting they must be able to see the operator interface and input commands safely and ergonomically without stretching or assuming unnatural positions. The normal resting location of the interface is to the side and out of the way. The swing arm allows operators to pull the interface out and over so it is visible and within reach when they are monitoring the process or handling tools.

The swing arm can rotate on three axes and tilt to let operators place it in any desired position. Once the operator pulls the interface into place and orients it in an optimal way, a single push button actuates pneumatic locking by pressing two large bearings together, preventing further movement. With this rigid and low bounce design, the interface can be positioned with one hand, and the design eliminates further movement such as might result from the operation of the touch screen.

Its epoxy powder coating and anodized aluminum finish together with its internal cabling make the swing arm easy to clean with low particulate generation for clean room applications. The fact that one technician can place the arm into a convenient position and lock it with one hand means that a second person to assist with the operations is often not required.

Easy to Load Wafer Holding Devices

The impact of safe and ergonomic design increases greatly when applied to operations that have to be carried out regularly and frequently. When wafer trays and holding devices are designed to make it easy for operators and technicians to use them, even small improvements in ergonomic design can make a big difference in both productivity and safety.

In Modutek wet benches, robot arms move the wafer holding trays to the front of the station to a position optimally located for easy and effortless loading and unloading. Modutek applies such ergonomic design principles to wet bench access for increased safety of operators and technicians working in semiconductor fabrication facilities and research labs.

Ergonomically Designed Upgrades and Customization

When a facility is upgraded or additional equipment is retrofitted, standard ergonomic designs may not meet the needs of the completed installation. Equipment that fully satisfies ergonomic design principles on its own may be difficult to operate when placed in specific configurations. Modutek can apply the company’s experience with ergonomic design to customize installations, ensuring that a customer’s specific ergonomic requirements are met and that the installation as a whole is easy and safe for operators and technicians.

Modutek processing stations are available in a wide variety of configurations and the company works with the customer’s engineering team to custom design the best processing equipment for the particular application. The ergonomic engineering required to ensure easy and safe operation is integrated in these designs and guides the company when customizing their equipment for specialized needs.

If you need help selecting or upgrading wet bench equipment for your application and have specific ergonomic requirements, contact Modutek at 866-803-1533 or email [email protected].

The Evolution of Semiconductor Manufacturing and Wafer Fabrication Equipment

The Evolution of Semiconductor Manufacturing and Wafer Fabrication EquipmentSemiconductor manufacturing equipment such as wafer processing systems and wet bench stations has evolved considerably over the past 15 to 20 years. The processes used have become more efficient by improving repeatability and increasing throughput while processing larger wafers and etching structures with smaller geometries and more detailed component parts. Automation of wafer fabrication equipment to run these processes have become increasingly complex and environmental considerations are now more critical. Chemical stations such as those provided by Modutek Corporation have played an important role in this evolution and continue to be on the forefront of further development and technical innovation.

Increased Productivity

A key element in the evolution of semiconductor manufacturing equipment is increasing productivity due to process improvements. The larger sizes of the substrate and the greater density of the structures to be etched have allowed an increase in yield. Throughput due to better process organization has increased efficiency. These changes have decreased costs and improved quality.

While wafer sizes have increased and the semiconductor structures created by etching have decreased in size, integrating the process elements such as chemical storage, chemical delivery, etching, cleaning and drying has been a major contributor to the evolution of wet bench stations. Modutek and other suppliers of wafer fabrication and processing systems have been able to reduce total manufacturing time and increase throughput while maintaining quality and reducing defects due to mistakes. Often several tasks can be combined and the downtime due to chemical changes can be reduced to a minimum.


The development of automation systems from Modutek and other suppliers has also played an important role. While open loop controls are still available for processes that need operator input, fully automated systems featuring reliable and accurate closed loop control help improve wet bench performance. Automation can reduce errors and allows semiconductor manufacturing systems to achieve better repeatability. Chemical dosage is always the same, timing is identical for all batches of a particular process and clearly defined process steps allow technicians to pinpoint problem areas and apply further optimization.

Environmental Factors

Environmental regulations have influenced the evolution of semiconductor manufacturing equipment by requiring companies to reduce their environmental footprint. For wet bench processing systems this means ensuring that possible chemical spills are contained and discharges of chemicals are neutralized so they don’t damage the surrounding environment.

Modutek and other companies have seized on these challenges to improve process efficiency in their process equipment by reducing chemical usage and recycling of chemicals when possible. Software allows the calculation of exact dosages and automation carries out the mixing without waste or spillage. Sensors in the chemical baths give feedback on the chemical composition or the neutralization process and ensure that the desired pH value is attained before recycling where appropriate or discharging when needed. Accurate tracking of chemicals in storage and in use lets operators reduce chemical waste to a minimum.

The Evolution Continues

Modutek and other companies specialized in semiconductor manufacturing equipment face continuing challenges to meet the demands of wafer fabrication shops that want to either achieve improvements of current processes or manufacture more densely packed components using new processes. Satisfying customer demand in this area requires that a company provide a wide spectrum of processing equipment that uses the latest technology. For wet bench processing this means offering manual, semi-automated and fully automated etching, cleaning, plating and chemical solvent stations with a wide variety of options that include custom and retrofit systems. If you are looking for reliable wet benches and wafer fabrication equipment built specifically for your business’ needs, call Modutek at 866-803-1533 or email [email protected] to discuss your specific requirements.

MEMS Manufacturing with Wet Processing Equipment

MEMS Manufacturing with Wet Processing EquipmentMEMS (Micro Electro Mechanical Systems) are made up of miniature components that can acquire, analyze and process data and generate a desired mechanical output. Wet processing equipment can be used to manufacture these mechanical components and create electrical links. The structures in MEMS that are fabricated using wet processing equipment can range in size from several micrometers to millimeters. Devices using MEMS are characterized by high performance, excellent reproducibility and low cost. When wet processing equipment is used in their manufacture, these characteristics may be enhanced and costs may even decrease.

The components making up MEMS include sensors, electronics, transducers and micro-structures. Micro-sensors can acquire practically any physical quantity, such as temperature, pressure, magnetic fields or radiation. Micro-electronics can range from simple circuits to powerful microprocessors. Micro-transducers change electrical quantities to physical outputs and the outputs can act on microstructures included in the MEMS. For example, a temperature sensor might detect a high temperature. The micro-electronics evaluate the process and determine that cooling liquid is required. A transducer receives a corresponding command and opens a valve, allowing cooling liquid to flow. Other possible micro-structures include micro-motors which can drive miniature pumps, micro-flaps to control gas flow and miniature mirrors to control light beams.

Wet processing equipment provides the micro-fabrication capabilities to meet some of the requirements of MEMS manufacturing. The production of electrical links, the removal of sacrificial layers and the creation of micro-structures to support components are all possible in chemical baths. For example, a sensor, microprocessor and actuator all need to be supplied with electrical power and their signals must be electrically interconnected. A metal etcher can create the necessary conductor links. A miniature mechanical actuator or a micro-motor may have to be supported and they can be placed on layers built up and etched for that purpose. Then these components, which have moving parts, must be given space for that motion. A sacrificial layer underneath the parts which move can be etched away.

While wet processing can help with MEMS fabrication, it can support this new technology in other ways as well. A key characteristic of MEMS is excellent reproducibility of performance outputs when their fabrication is accurate. Automated wet processing equipment ensures that process parameters are consistent and product variability is low. The dimensions of the resulting micro-structures are accurate enough that the resulting MEMS can maintain a high and consistent performance.

Another advantage of using wet process is production cost. The attractiveness of MEMS is high performance at low cost, and wet process equipment batch manufacturing can decrease the cost of producing MEMS compared to other fabrication options. Overall, using wet processing equipment to support MEMS manufacturing is an attractive option worth considering.

Modutek Corporation provides advanced semiconductor manufacturing and wet processing equipment and provides extensive experience in customizing equipment to meet all their customer’s requirements. If you have any questions about using Modutek’s wet processing equipment or other products or need help in choosing the right equipment for your application, email us at [email protected] or call us at 866-803-1533.

What to Look For In a Semiconductor Equipment Supplier

What to Look For In a Semiconductor Equipment SupplierWhen purchasing semiconductor manufacturing equipment, it is critical to identify what is important for the application. Establishing objective criteria can help select a supplier that is able to meet the needs of a particular project. Whether the purchaser is an engineer working on a manufacturing process, a facilities manager responsible for a semiconductor fab line, or a researcher looking for lab equipment, identifying the required supplier characteristics can help to ensure that the equipment will perform adequately and deliver the projected results. While the detailed requirements may be different for particular purchases, there are several overall qualities to look for before making the purchase.

  1. The supplier must be an established company with a good track record. It must be able to provide proof that it has the expertise necessary for satisfying the requirements of the project. Reference installations of similar equipment and the names of satisfied customers can establish that a supplier is competent and reputable.
  2. Before considering a company as a supplier, look for the capability to provide a range of equipment for a broad set of applications. A particular project may have special requirements and need some customization. Selecting companies that can meet special needs due to their extensive experience with customized products can help with the purchase of equipment that exactly meets the requirements of the application.
  3. An application will have specific requirements expressed in the technical specifications for the equipment to be purchased. The supplier must understand the requirements and propose equipment that meets all the specifications and is suitable for the intended use. A guarantee before purchase that specific benchmarks will be met confirms that the supplier understands your needs.
  4. It is important to purchase up-to-date technology to avoid having to operate obsolete equipment resulting in inferior performance. The supplier must offer state-of-the-art equipment and be able to demonstrate a continuous development and improvement of existing products.
  5. Maintenance and downtime can significantly increase the cost of equipment beyond the purchase price. Suppliers need to show that the equipment they propose is high quality and they must detail their expectations for maintenance costs and projected downtime based on experience from similar installations.
  6. When equipment breaks down or performance is not as expected, the supplier must have customer support and service capabilities that quickly address any problems on site. Look for details of supplier support and service personnel and evidence that a supplier has the capabilities to provide onsite service and repair.

Modutek scores high on all of the above characteristics as a qualified supplier of semiconductor manufacturing equipment. The company has been providing such equipment to industry, research facilities and university labs for over 30 years. They have a broad range of equipment and extensive experience in customization. Modutek offers the latest technology in high-quality, low maintenance systems and has onsite repair capability. Semiconductor manufacturing equipment from Modutek, including wafer fabrication equipment and wet benches, is an excellent choice for projects in the high tech industry. For more information on Modutek and its products and services, please contact Modutek toll free at 866-803-1533 or email [email protected].

Benefits of Using Modutek Acid Neutralization Systems

Benefits of Using Modutek Acid Neutralization SystemsAcid neutralization systems adjust the pH value of a process stream in self-contained systems, either continuously or in batches. Effluent monitoring ensures that automatic discharges take place only when the pH values are within set limits. The systems are easy to install with high efficiency and low cost operation. A wide variety of available sizes allows accurate matching to the requirements of particular applications.

Normally acid neutralization systems adjust the pH of a process discharge to within adjustable limits, depending on the application. When discharged into a public sewer, neutralization within a pH range of 6 to 9 is typical. For mildly acidic or alkaline streams with high flow rates and stable characteristics, compact and low cost continuous flow neutralization can be used. When the pH levels fluctuate, inflows are irregular or when the flows are highly acid or alkaline, the use of batch systems is appropriate. These systems neutralize the particular batch and only allow a discharge when the set criteria are reached. A final monitoring chamber for sampling and for recording discharge pH gives operators full control of the effluents.

Flexible Application

Modutek’s acid neutralization systems are available in a wide variety of sizes and configurations. They are designed to suit the requirements of different production facilities and applications, including for semiconductor fabrication, in research centers and in universities. Sizes range from 5 to 500 gpm and installation can be indoor or outdoor, depending on availability of plumbing and electrical connections. The self-contained units are compact and easy to install with an on board reagent tank option. Systems up to 100 gpm are of unitized construction with steel reinforced thermo welded polypropylene while larger systems are skid-mounted.

System Features and Characteristics

Modutek designs its systems with an emphasis on safety and reliability while keeping costs low and saving space. Neutralization systems can operate in fully automatic mode for both acid and alkaline streams. Secondary containment is standard and automatic mode ensures that discharge only occurs when the stream is within permitted pH values. For normal operation, a two-stage system is usually sufficient but three-stage systems are available for especially demanding applications. The control system requires a 120 V AC supply but the mixers and pumps can operate on 120 V or 208 V AC.

The control of the process stream pH is micro-processor based while alarms are handled by a PLC with a touch screen. This combination results in high accuracy and reliability while making it easy to calibrate the sensors and adjust the set points. Neutralizing chemicals are injected into the process with two metering pumps for each stage. Larger systems add pressure control valves.

Alarms include high and low pH in the final monitoring chamber and low level in the reagent storage tanks. There is a liquid sensor in the double containment and all the alarms can be tied into relays for remote signaling at the control panel. Ethernet access for remote signaling is also available and a digital chart recorder monitors and tracks the pH of the process discharge. As a result, there is a continuous record of the pH levels and of alarm conditions during automatic operation.

Overall Benefits

Modutek’s acid neutralization systems offer operators handling chemicals a complete range of neutralization options and system sizes in convenient configurations. The low cost systems are inexpensive to install and reliably ensure that process streams stay within required pH ranges. While operation is fully automatic, comprehensive alarms and monitoring lets the operator check that the system is functioning as intended. If you need more information or would like a quote for your specific requirements contact Modutek by calling 866-803-1533 or sending an email to [email protected].

How the Ozone Cleaning Process Supports Green Technology

How the Ozone Cleaning Process Supports Green TechnologyAs many people become more environmentally conscious, it is important to understand the manufacturing process behind semiconductors. The majority of companies use chemical solvents during the process, which requires special handling and is not environmentally friendly. In contrast Modutek provides equipment that uses a method that is not only more cost effective but is also environmentally friendly. This method is the Ozone cleaning (stripping) process.

There are three distinct advantages to the Ozone cleaning process:

  • Is cleaner than using a chemical cleaning processes.
  • Is more cost effective.
  • Is safer.

How the Ozone Cleaning Process Works

Most semiconductor manufacturers use chemicals in their process. While these chemicals serve their purpose, it also means that the solvents introduce another element to the process that makes it both more complex and less environmentally friendly. The chemicals must be processed in a way so that they are disposed of properly according to environmental regulations.

Modutek designed the ozone cleaning (stripping) process to both reduce the contamination inherent with the process as well as the cost. Without using chemicals, there is considerably less to cleanup during the manufacturing process. The equipment is specifically designed to reduce or eliminate the need for solvents.

One of the reasons it is more efficient and cleaner than the chemical process is that it works at ambient (room temperature) or below. By eliminating the need for chemicals like solvent base strippers or sulfuric acid and hydrogen peroxide, the Ozone cleaning process or stripping process gets the same results without needing to change the temperature of the components.

Of course, every company has its own process, and some of them require the use of at least a few solvents. In these cases, Modutek’s equipment can eliminate the use of solvents required.

Why It’s Safer

The more chemicals a process requires, the more solvent there is at the end, and the more potentially hazardous that solvent is. They must be contained and properly handled based on environmental regulations, and special training is required for those who have to handle it. There is an increased risk of spills and other risks as well.

Also, the more chemicals a company uses, the more exposure employees and customers have to those chemicals because they cannot be completely removed from the final product. There are inherent risks with any chemical a person is exposed to, no matter how small. The Ozone cleaning process (stripping process) completely eliminates the use solvents.

It’s Cost Effective

One of the biggest benefits of the process is that it is considerably more cost effective than the traditional methods. Companies do not need to invest in nearly as many chemicals to complete the process, which also means that the process will not be delayed if the supplies do not arrive when they are expected. That also means less inventory cost.

At the other end of the process, there is less to cleanup once the process is complete. Special containers for handling the solvents will not be required, and there is less hazardous waste that would need to be disposed.

While the process does require its own training, it does not have nearly as many safety risks that will require mandatory annual training to ensure safety guidelines are followed. With less personal protective gear, the Ozone cleaning process is simply more cost effective in nearly every way.


Traditional cleaning processes require chemical solvents, which increases the risks and the costs. It takes longer to process and dispose the required solvents, and the final product is not as clean as a product that has been through the Ozone cleaning process. In addition this alternative cleaning process is more cost effective and environmentally friendly. If you’re interested in using Modutek’s Ozone cleaning (stripping) process at your manufacturing facility contact them at 866-803-1533 for a free quote or email [email protected].