Wet Processing Equipment Applications

Wet Processing Equipment ApplicationsModutek provides a complete line of silicon processing solutions with state-of-the-art wet processing equipment designed to deliver high quality output at a low total cost of ownership. Applications include wafer etching, cleaning, drying, stripping and metal etching. Specific solutions include KOH etch and nitride etch. State-of-the-art design and engineering ensures that equipment is reliable, safe and low-maintenance.

The rotary wafer etching system can etch, clean, reclaim, develop and strip semiconductor wafers and substrates. It features a dual tank design with a transfer between tanks for etching and cleaning or rinsing. A carrier assembly holds the wafer boats and takes up to 50 six-inch or 25 eight-inch wafers at a time. When the operator closes the fume door and presses the start button, the carrier assembly carries out a continuous rotational agitation in the chemical tank for a pre-set time. The assembly then automatically transfers the wafers to the rinse tank in less than three seconds. After the Quench-Quick Dump-Overflow rinse cycles, the wafers can be moved to the drying unit.

The system can be programmed with up to five process recipes and a touch screen controller displays a summary of the recipe and the process. Axial rotation of the wafers at up to 80 rpm ensures adequate agitation for consistent results. The system is flexible enough to handle different semiconductor processing applications and can carry out automatic batch processing.

Modutek’s vacuum metal etcher is designed for precision etching of aluminum layers on semiconductor wafers. The fully automated unit etches aluminum in a vacuum to eliminate hydrogen bubbles that interfere with the etching and produce “snow” and bridging on the etched wafers. At the beginning of a cycle, the unit evacuates the plenum, drawing acid into the etch tank. Etching continues until the preset time is elapsed or the end-point detector senses that lines have been etched through the aluminum layer. When etching is complete, the acid drains back into the acid reservoir and nozzles spray deionized water over the wafers. The metal etcher is characterized by a fast throughput and a high yield.

Modutek’s IPA Vapor Dryer provides a way to clean dry wafers without water spots. The unit can introduce ozone into the drying chamber to eliminate organic impurities. Most drying cycles take only 10 to 15 minutes. As low-cost drying solution, Modutek can custom design their IPA vapor dryers to meet your specific requirements and application.

In addition to equipment that can be used for a variety of semiconductor processing, Modutek offers specific solutions such as KOH etching and nitride etching. For KOH etching, Modutek uses an individualized approach that produces solutions for specific customer applications with the company’s Teflon tanks. The tanks are all-PFA material and sheets are welded using advanced techniques designed to reduce impurities. Modutek KOH etching solutions are designed to work with a customer’s existing wet bench equipment.

For nitride etching, Modutek provides a new Nb series Silicon Nitride Etch Bath. The system features a dual system that monitors the chemical boiling while ensuring tight control of the nitride etching process. As a result, the system provides unparalleled control of the nitride etch process and uniformity while achieving elevated levels of safety and reliability.

Modutek’s wet processing equipment is designed to meet the application needs of any semiconductor fabrication or research facility, either with standard products or with custom-designed solutions. Call Modutek at 866-803-1533 for any questions you have about wet processing equipment or if you need help in choosing the right equipment for your specific requirements.

MEMS Manufacturing with Wet Processing Equipment

MEMS Manufacturing with Wet Processing EquipmentMEMS (Micro Electro Mechanical Systems) are made up of miniature components that can acquire, analyze and process data and generate a desired mechanical output. Wet processing equipment can be used to manufacture these mechanical components and create electrical links. The structures in MEMS that are fabricated using wet processing equipment can range in size from several micrometers to millimeters. Devices using MEMS are characterized by high performance, excellent reproducibility and low cost. When wet processing equipment is used in their manufacture, these characteristics may be enhanced and costs may even decrease.

The components making up MEMS include sensors, electronics, transducers and micro-structures. Micro-sensors can acquire practically any physical quantity, such as temperature, pressure, magnetic fields or radiation. Micro-electronics can range from simple circuits to powerful microprocessors. Micro-transducers change electrical quantities to physical outputs and the outputs can act on microstructures included in the MEMS. For example, a temperature sensor might detect a high temperature. The micro-electronics evaluate the process and determine that cooling liquid is required. A transducer receives a corresponding command and opens a valve, allowing cooling liquid to flow. Other possible micro-structures include micro-motors which can drive miniature pumps, micro-flaps to control gas flow and miniature mirrors to control light beams.

Wet processing equipment provides the micro-fabrication capabilities to meet some of the requirements of MEMS manufacturing. The production of electrical links, the removal of sacrificial layers and the creation of micro-structures to support components are all possible in chemical baths. For example, a sensor, microprocessor and actuator all need to be supplied with electrical power and their signals must be electrically interconnected. A metal etcher can create the necessary conductor links. A miniature mechanical actuator or a micro-motor may have to be supported and they can be placed on layers built up and etched for that purpose. Then these components, which have moving parts, must be given space for that motion. A sacrificial layer underneath the parts which move can be etched away.

While wet processing can help with MEMS fabrication, it can support this new technology in other ways as well. A key characteristic of MEMS is excellent reproducibility of performance outputs when their fabrication is accurate. Automated wet processing equipment ensures that process parameters are consistent and product variability is low. The dimensions of the resulting micro-structures are accurate enough that the resulting MEMS can maintain a high and consistent performance.

Another advantage of using wet process is production cost. The attractiveness of MEMS is high performance at low cost, and wet process equipment batch manufacturing can decrease the cost of producing MEMS compared to other fabrication options. Overall, using wet processing equipment to support MEMS manufacturing is an attractive option worth considering.

Modutek Corporation provides advanced semiconductor manufacturing and wet processing equipment and provides extensive experience in customizing equipment to meet all their customer’s requirements. If you have any questions about using Modutek’s wet processing equipment or other products or need help in choosing the right equipment for your application, email us at [email protected] or call us at 866-803-1533.

How the Silicon Nitride Etch Process Is Supported By Modutek

The silicon nitride etch process is used in the manufacture of integrated circuits to selectively remove silicon nitride with respect to silicon oxide. Engineers and process specialists in the industry who work with semiconductor equipment manufacturers owe a great deal of their expertise to the quality of the etching equipment at their disposal today.

Background

Integrated circuit fabrication processes include selectively removing silicon nitride using wet or dry etching. Selectivity between materials removed and not removed should be high. However, selectivity is not the only consideration, in a manufacturing environment a process engineer needs consistent and repeatable results from high quality and reliable equipment.

Field Oxides Provide Mask Layer

Field oxides deposit a dielectric mask layer over silicon using a patterning mask layer exposing the silicon or oxide, and growing the thick oxide called field oxide. The preferred choice of dielectric for the mask layer is silicon nitride. This process is LOCOS, Localized Oxidation of Silicon. A poly silicon layer is frequently present beneath the nitride. This is a Poly Buffered LOCOS stack. Thus, both silicon nitride and poly silicon must be removed without affecting the silicon oxide.

Aging Effects and High Particle Count

Wet etching techniques are used for stripping nitride and silicon when oxides are present. Silicon nitride is etched in phosphoric acid that is boiling. Amounts of nitric acid may be in the bath. These baths are susceptible to aging and having higher particle counts because the silicate concentration in the bath increases. Others use separate baths for nitride and poly silicon. This increases the number of baths required and can lead to pitting of the pad oxide, which engineers overcome by using a bath with phosphoric, hydrofluoric, and nitric acids. Bath life is extended by hydrofluoric and nitric acids. Nitric acid is required to oxidize silicon. The initial etching selectivity of nitride to oxide may be undesirably low, selectivities of 9:1 observed, and depends on fluorine concentration. Higher initial etch selectivities are preferred.
Before etching silicon nitride or poly silicon to silicon oxide, you should add silicon to the etch process bath. The silicon enhances initial etch selectivity. Fluorosilicates also can be used. These compounds dissolve readily in phosphoric acid without particles. The compounds increase the etch selectivities to 40:1 and 33:1 for silicon nitride and poly silicon. The additional silicon stabilizes may be in the bath from initial use until its use is terminated. Variations of this procedure are tested and reviewed by engineers and researchers.

Equipment Innovations

IC equipment suppliers provide manufacturers and researchers with leading edge products required for producing smaller geometry semiconductors, thin-film heads, and MEMS, and also need to offer service, support, and retrofitted systems. These products are usually designed to meet specific requirements of manufacturers.

Silicon Nitride Etch Baths that Provide Safety, Control and Flexibility

The Nb Series Operation Process used with Modutek’s silicon nitride etch bath guarantees process control, safety and flexibility with a two-level diagnostic system monitoring temperature while maintaining acid to water ratio through D.I. water supplementation. By using a new remote metering system, the Nb Series is easy to install and service in new or existing stations. Process engineers know that this kind of equipment needs to be manufactured and supported by a company that:

  • Has extensive experience and expertise;
  • Uses the latest technology;
  • Meets specific customer requirements;
  • Provides high quality and reliable equipment;
  • Offers excellent technical support and onsite repairs

Modutek has over 30years of experience providing high quality and reliable equipment to support the silicon nitride etch process and is a leader among semiconductor equipment manufacturers. If you need to discuss your process requirements or would like a free quote, call Modutek at 866-803-1533 or visit www.modutek.com.

Why You Need Modutek’s Complete Line of Wet Processing Equipment

Why You Need Modutek’s Complete Line of Wet Processing EquipmentWith almost four decades of experience manufacturing wet process equipment for the chemical etching industry, Modutek prides itself on the outstanding quality, durability and cost-effectiveness of its products. Our product line covers the entire range of industry techniques and can support your efforts in any of the following processes:

  • Silicon Nitride Etch
  • Aluminum Etch
  • RCA Clean (SC1 and SC2)
  • Buffered Oxide Etch
  • Develop Process
  • Photo Resist Strip
  • Piranha
  • HF
  • KOH (Anisotropic Etch)
  • Aqua Regia
  • Metal Etch

The Features

Whether you opt for white polypropylene construction for acid and base processes or stainless steel construction for solvent applications, our stations are available in any size or length. Secondly, they are all wired per NFPA 70 & 79 with an EPO mushroom button as well as all safety interlocks. All benches have an N2 head case purge with photohelic interlock to the EPO. Of course, they include a continuous flow DI water manifold plus casters for easy movement and leg levelers for when you get there. All of our equipment comes with a one-year warranty and we even provide the manual on paper as well as an online document.

There are also a range of optional features available including PVC-C construction, third-party certification (NFPA, CE mark or NEC), seismic zone 4 structural certification, HEPA fan filters, dedicated drains and carboys with DOT containment, overhead deck lighting, 3-color light towers and counterbalance safety shields.

The Benefits

Modutek’s full line of wet processing equipment – manual or automatic, standard or custom – offers a host of benefits including proven design that meets all price requirements and safety standards, a low cost of ownership, built-in expansion capabilities, all at a competitive price. In short, Modutek has the exact high-end wet processing equipment to suit your current and future needs.

The Bottom Line

Building a custom wet etching station? Upgrading your existing process? Purchasing new wet stations? Modutek can help! In fact, our line of in-house manufacturing equipment encompasses every process. In particular, we can supply you with:

  • Quartz: High temperature acid baths with available circulation and filtration.
  • Stainless Steel: Solvent applications with circulation and filtration.
  • Plastic: Certified welders; PVDF, Halar, Teflon, HDPE, Polypro and FM4910 material
  • Support Equipment: IPA Vapor dryers, Chemical Neutralizers, Fume Scrubber, Sub-Ambient Systems, Chemical Mixing, Chemical Delivery and Chemical Collect.

Modutek- Proven Experience

Modutek prides itself on 35+ years of continuous operation in providing semiconductor, MEMS and solar manufacturing equipment solutions. This experience gives you the reliability you deserve. From beginning to end, we work directly with you, from design approval to installation and final acceptance. With our in-house manufacturing capabilities of wet processing equipment to the final design and build of your custom process stations, we are your one-stop destination. For more specific information about our wet process equipment, please visit us online at Modutek.com or call us directly at 866-803-1533.

Modutek’s New Chemical Mixing and Delivery System

Modutek’s New Chemical Mixing and Delivery SystemIn chemical process engineering, reliability is paramount. You need a system that delivers results more than once or twice, but repeatedly. In addition, you’d be looking at durability qualities as well as ease of use and maintenance. Modutek’s chemical delivery systems are designed just for that.

The new Modutek chemical mixing and delivery system stands out from the rest in terms of performance and offers a great degree of customizability. Combining user friendly software with a compact design and a wide range of control features, this system delivers results safely, quickly, and cost-effectively.

Modutek’s chemical delivery systems are designed for use with a complete range of wet processing equipment. Starting from a fully automated line through to a manual wet processing station, the company combines technology and skill to derive a turnkey design that delivers 100% on all clean room requirements.

The chemical delivery interface to your equipment can consist of one gallon bottles to 330 gallon totes. All of Modutek’s delivery and mixing systems are designed around your specifications. Once installed the delivery and mixing systems will provide a precise and safe chemical supply to your end point of use.

One advantage of Modutek’s systems is that all control software are designed and written in house. Even tests are completed in house allowing us to discover possible problem areas early and fix them appropriately. Modutek does not outsource or subcontract design or testing of delivery systems. All parts and every process is designed, created, and tested at our company in San Jose, CA. You can get final acceptance testing before the system is installed at your location. All tests are carried out using DI water. The SolidWorks Flow Simulation and the SolidWorks Simulation Professional deliver on point calculations.

Benefits of the system

The main benefit of the system is that it is 100% made and supported by Modutek. So, we understand every process in the performance of the system and will be able to provide quality customer support over the course of its use.

Other benefits include;

  • Custom design to meet your project requirements
  • An all Teflon fluid path
  • Software is user friendly
  • Increased throughput resulting from quick chemical change
  • Eliminates operator interface

Product specifications

  • A 5 acid mixing system
  • Has 2-10 gallon delivery tanks
  • FM 4910 material construction
  • All acid resistant materials
  • 150% double containment with optical leak detect
  • Stainless steel seismic bracing
  • Photohelic exhaust gauge with interlock to EPO switch
  • One (1) 8-inch exhaust port
  • 5 10-liter acid supply bottles for each system
  • Non-intrusive low level sensors for each acid bottle
  • 5 Teflon metering pumps for each system
  • 2% mixing accuracy
  • 2 10-gallon mixing tanks for each system
  • Low-high and high-high sensing on both mixing tanks
  • 2 Teflon delivery pumps
  • All Teflon plumbing with Flare-type connectors
  • PLC main control
  • LED overhead lighting
  • Color touch screen control
  • 3-color light tower

Other specifications

  • Multiple configurations available on customers request
  • Double wall plumbing available on request
  • Data logging available on request

Applications

The new chemical delivery system is primarily a wet processing system. It can be used with:

  • Tech benches
  • Acid exhaust hoods
  • Precision cleaning stations
  • Fume hoods, and
  • Plating stations

About Moduteck

Modutek is a semiconductor manufacturing equipment, wet bench and chemical delivery systems provider with facilities located in San Jose, California. If you have any questions or want a quote on a chemical mixing and delivery system call us at 866-803-1533 for more information.

Quick Tips About Using Wet Benches

Quick Tips About Using Wet BenchesAs a lab tech or process engineer, you understand that having the best tools and equipment to work with is critical. Whether you work in manufacturing or research, keeping up with the latest technology changes is sometimes what will save even the greatest products from falling short. At Modutek Corporation, we understand that using highly reliable wet benches and wet bench chemical equipment is a big part of your job. We have been working to provide excellent products for over 30 years, and we offer a great deal of expertise on all of our products which include fully automated, semi automated, and manual wet bench stations. Whether you are manufacturing semiconductors, solar panels, disk drives, flat panel displays, or any other highly specialized product, we can provide you with high quality and reliable wet bench equipment that meets all your requirements.

Getting the Right Equipment for the Job

Every process requires reliable equipment to complete the job. When purchasing wet benches, we work with you to insure our equipment will meet all your specific process requirements. In addition, we also build and design our equipment for future expansion, just in case you are in need of additional accessories or capacity in the future.

Selecting the Right Equipment at the Right Price

Every business or research facility should be able to afford the most advanced wet bench technology available. At Modutek, we carry three unique wet bench or wet processing stations depending on your application requirements:

  • Wet Bench Manual Stations: Manual stations are the most cost effective option when selecting your new equipment. Able to support both acid and solvent applications, our manual benches are an excellent solution that offers a wide range of safety features and perks without the robotics.    
  • Wet Bench Semi-Automated Stations: These high-tech wet benches come in countless configurations perfect for any application. Semi-automated systems allow users to experience process uniformity at a lower price than the fully automated systems.
  • Wet Bench Fully Automated Stations: For technicians who need all the bells and whistles of full robotics, our fully automated stations are designed specifically for your business. Our in-house engineers generate unique operating software right at our facility, allowing your unit to come prepared to work straight out of the box.

Keeping You Safe

All of our wet processing equipment either meets or exceeds all current safety standards. Each wet bench comes standard with PVC safety shields, Emergency Power Off (EPO) with mushroom button, and safety interlocks, keeping you and your coworkers safe from harmful chemicals.

If you have any questions regarding our wet benches or how they can improve your research or product, give us a call today at (866) 803-1533 or (408) 362-2000. You can also email us at [email protected] for more information and one of our service experts will contact you to discuss your requirements and also provide a free quote.

Modutek Selected for Equipment at Michigan State University’s Facility for Rare Isotope Beams (FRIB) Project

Modutek-Michigan-State-Case-StudyModutek Corporation, which specializes in custom wet process equipment for various industries, has been selected to provide equipment for Michigan State University’s Facility for Rare Isotope Beams (FRIB) project.  The equipment Modutek will provide is a precision cleaning tool for superconducting radiofrequency resonators, which are the essential parts of FRIB’s linear accelerator (known as LINAC).

FRIB has been organized and established by Michigan State University (MSU) as a U.S. Department of Energy Office and designated as a National Science user facility.  This facility will be used to support the mission of the Office of Nuclear Physics.  The FRIB project will accelerate various elements from hydrogen to uranium to over 200 MeV/nucleon (about half the speed of light) in a superconducting linear particle accelerator which will create rare isotope beams through in-flight separation. These rare isotope beams will allow scientists to make new discoveries in nuclear physics, astrophysics, and in beneficial applications of rare isotope beams.

Built according to MSU’s specifications in a 6-month time period, the 33 ft. long precision cleaning tool from Modutek is designed to clean the accelerator’s Niobium (Nb) metal tubes with harsh chemicals in very controlled environments.   High-purity (RRR) niobium tubes and cavities are used as resonators in superconducting accelerators because of their mechanical and superconducting properties.   Modutek needed to design the equipment to insure that the niobium tubes would be cleaned to remove any impurities so the cabinet and bench material will hold up to constant exposure to acids and harsh chemicals.

The precision cleaning tool consists of a chemical delivery and reclaim system, parts cleaning compartment, cavity etch compartment, waste water pumping system along with 55 gallon waste chemical drums that allows acids to be purged and neutralized.  The tightly controlled system includes multiple toxic gas sensors, alarms and automatic door locks for added safety.  In order to insure against leads, all of Modutek’s welders and tools are certified for plastic welding and plumbing of the chemical tanks.

As with the linear accelerator’s process tool for Michigan State, Modutek’s projects are about providing customization in order to meet the customer’s requirements.  Their process tools, process tanks and components are built to customer spec under highly guarded proprietary agreements.

From its beginnings back in 1980, Modutek has expanded over the last 30+ years from a component manufacturing company to a custom wet process tool manufacturing company. This transition included a series of acquisitions, including a robotics company which promoted the development of automated wet benches.   When the semiconductor manufacturing became more environmentally regulated in the late 80s, the company developed products for the acid neutralization and also added pollution control capabilities.

Today Modutek provides precision cleaning equipment to both domestic and international customers who need any type of wet processing equipment. This includes chemical delivery systems for pharmaceutical, biochemical, nuclear and solar as well as going with the ebb and flow of the chip industry with wet bench manufacturing.  Modutek is a well-positioned company, with capabilities in both chemical delivery as well as being its own OEM — essentially providing a turnkey solution for wet process system integration in a manufacturing operation.

Elite projects that include the MSU superconducting linear accelerator which require highly specialized equipment have become Modutek’s trademark. “The intricacies of this project, with materials like Flametec and our quality-control on welding and other techniques, open up a world of possibilities for us,” said Wagner.   “I think our hands-on approach and responsiveness will continue to propel us forward.”

Take advantage of the specialized knowledge and experience that Modutek can provide for your unique requirements. Call us at 866-803-1533 to discuss your requirements and get a free quote.

Tips for Selecting the Right Wet Bench Equipment for Your Application

tips-for-selecting-the-righYou can save a substantial amount of time and money with the right wet etching equipment for almost any given application. Instead of leaving the next purchase to chance, work with a vendor you can trust that has experience and an in-house staff of experts. You need to find a vendor that you can build a lasting relationship with to ensure that you always have top tier wet bench equipment for your applications, now and in the future.

  1. Select Equipment That Is Made With High Quality Control Standards

Personal inspection is always recommended. However, a vendor that always follows ASTM and high personal standards can mitigate risk. Ongoing repair and support services can bolster quality control initiatives and increase the lifespan of new wet bench equipment. Poor internal quality control from a vendor or a supplier can result in numerous issues, including problems with installation or ongoing problems with overall application efficacy.

  1. Select Equipment With Custom Fabrication Options

You should not have to work around new wet bench equipment. Instead, let cutting-edge technology help make your next project a success. Explore custom fabrication options from a vendor that offers on-site repair and installation. Vendor tech support should also be a top priority when making a substantial investment in new equipment.

  1. Select Equipment From a “One Stop Shop” Vendor

Additions, repairs, and new parts all should go through the same rigorous quality control process your initial purchase went through. Optimal and fully functional wet benches and wet bench chemical stationswill need continual attention as your needs change. Additionally, your purchase should be backed by a vendor that has the existing capabilities to provide everything you need to make new equipment fully functional for your application now and in the future.

  1. Select Equipment From an Established Vendor

Often, the vendor you choose to purchase equipment from is more important than the initial piece of equipment purchased. An established vendor will be able to provide continual parts and support. However, working with an emerging vendor can have more inherent risk. A new vendor might not have the existing customer base, financial stability, and general experience you need to get top equipment after an initial order. Purchase equipment from a vendor that has at least a couple of decades of experience and a strong reputation in the industry.

  1. Select Equipment From a Vendor With a Product Line That Will Meet Future Needs

Select wet bench equipment from a vendor that has the capabilities to meet your future needs. Instead of going through the rigmarole of finding a vendor that sells the equipment you need for your application on a regular basis, purchase equipment from a vendor that you can have a lasting relationship with. Get more than new wet etching equipment. Get involved with a vendor that will be able to help ensure all of your future projects are a success and provide ongoing support.

Modutek is a highly established vendor that has been providing high quality and reliable wet bench equipment to the high tech industry for over three decades. Contact us at 866-803-1533 or email us at [email protected] to learn more about how we can provide the equipment you need for your current application and how we can help your future projects and business prospects thrive.

Using Modutek’s Teflon Tanks with KOH and TMAH Etching Processes

Using Modutek's Teflon Tanks wModutek’s TFa and TI series PFA Teflon Tanks, along with our other wet bench equipment, fully support KOH etching (Potassium Hydroxide) and TMAH etching (Tetramethylammonium hydroxide)processes.  Our Teflon Tanks are designed together with other wet bench equipment to decrease impurities and unwanted byproducts due to advanced welding techniques with PFA sheet material. Continual adjustments to the Si etching process are not necessary after the initial process has been established.  We construct all our Teflon Tanks and related equipment per individual customer specifications, and we routinely design products that are compatible with a customer’s existing wet bench equipment.

Modutek’s Teflon Tanks have an operating temperature range from 30 – 100º C, with a process temperature control of ± 0.5º C and a heat-up rate from 2-3º C per minute (depending on the size of system).  Our modular design allows for new installation or upgrades into any wet etching station configuration.

Teflon® tank configurations that support KOH and TMAH Etching:

  1. Temperature Controlled Re-circulating Baths (TFa Series)
  2. Temperature Controlled Static Baths (TI Series)

Teflon Tank design features:

  • Manual cover with overlapping seal
  • Minimizes water lost
  • No concentration deficiency over long etch time

Heat source options include: 

  1. Teflon® inline heating
  2. Immersion heating in overflow weir for TFa Series and main tank for TI Series

Static KOH etching bath with condensing coilsCustom Teflon® Tanks and Additional Options:

  • Custom size Teflon® tanks can also be built to match any size (no limitations)
  • Bottom drain features
  • Magnetic stirrer for agitation (TI and TT series)
  • Water condensing refluxor system available on all baths
  • Auto lid feature
  • DI water or IPA spiking system available

Benefits of Teflon Tanks:

  • Modular design
  • Two available heat sources
  • All Teflon® fluid path
  • Process temperature control of ± 0.5º C
  • Process etch uniformity wafer to wafer <2%
  • In house heater maintenance and repair
  • 360 degree overflow filtration
  • Uniform heating throughout the bath

KOH etching tank with condensing coils and semi auto robotModutek provides world-class service, installation and support for all our Teflon Tanks and related wet bench equipment. We provide quality products and services that focus on reliability, precision, throughput, usability and up-time. For more information contact us by calling 866-803-1533 or by email from our site.

Modutek’s Advanced Wet Benches and Wet Process Equipment

Wet-Benches-and-Wet-Bench-C2bModutek offers a full line of Wet Benches and Wet Process Equipment to meet your needs. These include Manual, Semi-Automated, Fully Automated, Linear Robot, Rotary Etch, Dry to Dry, and Stainless steel. These can all be designed and manufactured to meet your specific requirements.

Modutek’s wet processing and wet bench systems provides high-quality and affordable semiconductor and batch immersion process tools with safety and reliability designed into every tool.  Modutek’s equipment is engineered to your processes and chemistry, with additional options that include megasonic and ultrasonic tanks, custom robots, materials of choice and exhaust options.

Modutek’s wet benches and wet processing systems are being used in major semiconductor, medical and solar fab facilities across the country, as well as worldwide. Our Wet Benches are designed for Semiconductor Etching, Cleaning & Striping, Solar Wafer Processing, University Research Labs, Precision Parts Cleaning and other related applications.

Wet Bench Sample Process Applications Include:

  • Etching: Nitride, Silicon Etch, Oxide, KOH and TMAH Etching
  • Stripping: Solvent Resist Strip, Acid Resist Strip
  • Cleaning: Pre-Photo, Photomask Clean, Pre-Diffusion, Pre-Epi, Wafer Reclaim, Pre-Panel Build Clean and Post-Saw Clean

Modutek has over 30 years of extensive experience creating semiconductor wet bench equipment, tanks and baths for many processes.  Our equipment can handle most acids, chemicals, solvents in ultra-clean environments.  We also have an outstanding record when it comes to safety, wet bench reliability, maintainability and cost of ownership. We offer several material choices including: FM4910 (PVC-C), Stainless Steel or Polypropylene.

A Customized Design Integrated with Our Wet Process Equipment

All of Modutek’s wet benches, batch immersion systems, wet processing systems, chemical delivery systems and chemical handling equipment are fully customizable equipment, and can be engineered according to the specific use and constraints of your fab.  All of our wet bench systems are designed to be used with our automated chemical delivery systems and integrated chemical delivery and wet process systems. These systems can all be designed with flow guarantees by utilizing our SolidWorks Simulation Professional and SolidWorks Flow Simulation that provides the process flow characteristic you require. This advanced software will improve your etch rates and throughput which increases yields.  This gives you a turn laminar flow effect in process tank.

Customized Wet Benches, Wet Stations, Wet Processing Systems, Wet Bench Systems and Silicon Wafer Cleaning and Wafer Etching Systems:

All of Modutek’s wet benches and wet processing equipment are:

    • Flexible and Upgradeable according to your needs
    • Easy to Use and Well Controlled

All wet bench systems are designed from one of our flexible platforms to your process and fab design, via Modutek’s unique design process.

    • Low Maintenance

Modutek’s SolidWorks Simulation Professional provides easy to use, flexible and configurable controls. Modutek designs and manufactures all of its own robotics.

    • Designed Specifically to Your Requirements

Up-time and reliability is everything. Our design provides easy access to all component areas, and Modutek uses OEM, not custom components so spares and replacements are readily obtainable.

    • Production Ready

Quality and safety are designed and built right into our wet benches. We focus on equipment footprint, high throughput and low cost of ownership to meet your process needs. Our PLC and touch screen GUI allow for process recipes and data logging.

    • Designed for Safety

Modutek’s design elements, including exhausting, safety interlocks, material of construction, proper ergonomics, provide low maintenance and high reliability.

    • Highly Reliable

Field proven reliability developed from our 30+ years of experience. Each Modutek system is designed using our SolidWorks simulation professional and SoldWorks flow simulation software.

    • Well Supported

Modutek provides world-class service, installation and support. Our high quality Wet Benches and Wet Process equipment  provide reliability, precision, throughput, usability and up-time. Contact us by calling 866-803-1533 or by email from our site.