Using Modutek’s Teflon Tanks with KOH and TMAH Etching Processes

Using Modutek's Teflon Tanks wModutek’s TFa and TI series PFA Teflon Tanks, along with our other wet bench equipment, fully support KOH etching (Potassium Hydroxide) and TMAH etching (Tetramethylammonium hydroxide)processes.  Our Teflon Tanks are designed together with other wet bench equipment to decrease impurities and unwanted byproducts due to advanced welding techniques with PFA sheet material. Continual adjustments to the Si etching process are not necessary after the initial process has been established.  We construct all our Teflon Tanks and related equipment per individual customer specifications, and we routinely design products that are compatible with a customer’s existing wet bench equipment.

Modutek’s Teflon Tanks have an operating temperature range from 30 – 100º C, with a process temperature control of ± 0.5º C and a heat-up rate from 2-3º C per minute (depending on the size of system).  Our modular design allows for new installation or upgrades into any wet etching station configuration.

Teflon® tank configurations that support KOH and TMAH Etching:

  1. Temperature Controlled Re-circulating Baths (TFa Series)
  2. Temperature Controlled Static Baths (TI Series)

Teflon Tank design features:

  • Manual cover with overlapping seal
  • Minimizes water lost
  • No concentration deficiency over long etch time

Heat source options include: 

  1. Teflon® inline heating
  2. Immersion heating in overflow weir for TFa Series and main tank for TI Series

Static KOH etching bath with condensing coilsCustom Teflon® Tanks and Additional Options:

  • Custom size Teflon® tanks can also be built to match any size (no limitations)
  • Bottom drain features
  • Magnetic stirrer for agitation (TI and TT series)
  • Water condensing refluxor system available on all baths
  • Auto lid feature
  • DI water or IPA spiking system available

Benefits of Teflon Tanks:

  • Modular design
  • Two available heat sources
  • All Teflon® fluid path
  • Process temperature control of ± 0.5º C
  • Process etch uniformity wafer to wafer <2%
  • In house heater maintenance and repair
  • 360 degree overflow filtration
  • Uniform heating throughout the bath

KOH etching tank with condensing coils and semi auto robotModutek provides world-class service, installation and support for all our Teflon Tanks and related wet bench equipment. We provide quality products and services that focus on reliability, precision, throughput, usability and up-time. For more information contact us by calling 866-803-1533 or by email from our site.

Modutek’s Advanced Wet Benches and Wet Process Equipment

Wet-Benches-and-Wet-Bench-C2bModutek offers a full line of Wet Benches and Wet Process Equipment to meet your needs. These include Manual, Semi-Automated, Fully Automated, Linear Robot, Rotary Etch, Dry to Dry, and Stainless steel. These can all be designed and manufactured to meet your specific requirements.

Modutek’s wet processing and wet bench systems provides high-quality and affordable semiconductor and batch immersion process tools with safety and reliability designed into every tool.  Modutek’s equipment is engineered to your processes and chemistry, with additional options that include megasonic and ultrasonic tanks, custom robots, materials of choice and exhaust options.

Modutek’s wet benches and wet processing systems are being used in major semiconductor, medical and solar fab facilities across the country, as well as worldwide. Our Wet Benches are designed for Semiconductor Etching, Cleaning & Striping, Solar Wafer Processing, University Research Labs, Precision Parts Cleaning and other related applications.

Wet Bench Sample Process Applications Include:

  • Etching: Nitride, Silicon Etch, Oxide, KOH and TMAH Etching
  • Stripping: Solvent Resist Strip, Acid Resist Strip
  • Cleaning: Pre-Photo, Photomask Clean, Pre-Diffusion, Pre-Epi, Wafer Reclaim, Pre-Panel Build Clean and Post-Saw Clean

Modutek has over 30 years of extensive experience creating semiconductor wet bench equipment, tanks and baths for many processes.  Our equipment can handle most acids, chemicals, solvents in ultra-clean environments.  We also have an outstanding record when it comes to safety, wet bench reliability, maintainability and cost of ownership. We offer several material choices including: FM4910 (PVC-C), Stainless Steel or Polypropylene.

A Customized Design Integrated with Our Wet Process Equipment

All of Modutek’s wet benches, batch immersion systems, wet processing systems, chemical delivery systems and chemical handling equipment are fully customizable equipment, and can be engineered according to the specific use and constraints of your fab.  All of our wet bench systems are designed to be used with our automated chemical delivery systems and integrated chemical delivery and wet process systems. These systems can all be designed with flow guarantees by utilizing our SolidWorks Simulation Professional and SolidWorks Flow Simulation that provides the process flow characteristic you require. This advanced software will improve your etch rates and throughput which increases yields.  This gives you a turn laminar flow effect in process tank.

Customized Wet Benches, Wet Stations, Wet Processing Systems, Wet Bench Systems and Silicon Wafer Cleaning and Wafer Etching Systems:

All of Modutek’s wet benches and wet processing equipment are:

    • Flexible and Upgradeable according to your needs
    • Easy to Use and Well Controlled

All wet bench systems are designed from one of our flexible platforms to your process and fab design, via Modutek’s unique design process.

    • Low Maintenance

Modutek’s SolidWorks Simulation Professional provides easy to use, flexible and configurable controls. Modutek designs and manufactures all of its own robotics.

    • Designed Specifically to Your Requirements

Up-time and reliability is everything. Our design provides easy access to all component areas, and Modutek uses OEM, not custom components so spares and replacements are readily obtainable.

    • Production Ready

Quality and safety are designed and built right into our wet benches. We focus on equipment footprint, high throughput and low cost of ownership to meet your process needs. Our PLC and touch screen GUI allow for process recipes and data logging.

    • Designed for Safety

Modutek’s design elements, including exhausting, safety interlocks, material of construction, proper ergonomics, provide low maintenance and high reliability.

    • Highly Reliable

Field proven reliability developed from our 30+ years of experience. Each Modutek system is designed using our SolidWorks simulation professional and SoldWorks flow simulation software.

    • Well Supported

Modutek provides world-class service, installation and support. Our high quality Wet Benches and Wet Process equipment  provide reliability, precision, throughput, usability and up-time. Contact us by calling 866-803-1533 or by email from our site.

Modutek’s Chemical Fume Hoods: Ordering Made Easy

Modutek-Chemical-Fume-HoodsWhen it comes ordering chemical fume hoods for your lab, Modutek gives you a wide variety of options to meet your requirements. With our wet processing capabilities, we can add the features you require that give you flexibility and overall design advantage. Whether you require a table top exhaust hood or a freestanding hood supported with a HEPA filter filtration system, Modutek can customize our equipment to meet your specifications and requirements.

There are no catalog numbers to limit your choices. All lab and research projects have their own unique equipment requirements. We are your one-stop shop that can provide all your lab equipment needs for all types of wet processing, wet bench and related manufacturing. Below are the features and benefits of Modutek’s chemical fume hoods and how we make ordering easy:

  • Modutek’s chemical fume hoods are made from high-quality materials. This includes stainless steel construction to handle solvent applications and white polypropylene to handle acid and base processes.
  • Each unit is manufactured having electrical outlets at deck level. The units can be manufactured using standard, ground-fault circuit interrupter (GFI) or explosion proof electrical outlets. GFI outlets are required in most states since they provide the best protection from electric shock. Explosion proof electrical outlets are used in hazardous and corrosive environments. Choose the outlet that best suits your manufacturing needs.
  • If you need a chemical fume hood built with a utility sink with a gooseneck faucet, we offer that option. This type of faucet is an option many of our customers choose as part of their requirements.
  • Temperature controlled chemical baths are also available with our chemical fume hoods or exhaust stations for your laboratory.
  • Modutek’s chemical fume hoods can also be designed with overhead fan filter units (FFU) if they are part of your requirements.
  • A carboy chemical containment system is included with our chemical fume hoods. This system captures waste solvents produced during wet processing, and other related chemical processing applications.
  • Counter balanced safety shields are also provided with the chemical fume hoods manufactured by Modutek.
  • Overhead LED lighting is also included on-deck.
  • Custom designed chemical fume hoods built per your specifications. What does your specific application require? What size and length chemical fume hoods do you need? We can create any size and length to meet your requirements.

Other options you can get on your Modutek chemical fume hood include dedicated drains to carboy with DOT containment, lift stations designed into the benches, fan filter units (HEPA), Teflon N2 gun and DI water hand spray, and extended warranty. If you need additional information on Modutek’s chemical fume hoods you can contact us at 866-803-1533.

Modutek’s Chemical Delivery Systems (CDS) Is State-of-the-Art

modutek chemical delivery systemModutek’s Chemical Delivery Systems and Chemical Mixing Equipment have been designed to work in conjunction with our complete line of wet benches (Manual, Semi-Automated and Fully Automated) and wet processing equipment in a cleanroom environment. Our chemical delivery systems and precise mixing systems were produced to minimize waste and lessen the overall operational costs by reducing labor costs and manual pour missteps that can occur with other systems.

Modutek offers a wide range of chemical handling equipment. This equipment can used be for delivery, distribution, recovery, and transport of ultra-pure clean room chemicals used with new or existing wet benches and wet processing systems. We have designed and built tailor-made systems for MEMs, semiconductor, and Solar cleanrooms as well as for other industrial applications. Totes, drums, bottles and carboy systems are also available. We also offer custom valve manifold boxes and carts. Our system controls and software is engineered and designed by our own internal engineering staff. All of our systems are designed to fit your unique requirements for specific chemical delivery, mixing or recovery system needs using our 30 plus years of industry experience.

Key Features of our Chemical Delivery Systems Include:

  • Compatibility with Module’s full line of wet processing equipment
  • Precision mixing is available
  • Control of chemical delivery in large volumes
  • SolidWorks Simulation Professional and SolidWorks Flow Simulation provides actuate delivery calculations
  • Leak Detection
  • Double containment cabinet construction
  • Data logging is available
  • Chemical drum or tote incorporates level sensing that is displayed on touch screen
  • Teflon plumbing
  • Multiple Configurations available to meet your requirements

Chemical-Delivery-SystemThere are many benefits of using Modutek’s Chemical Delivery Systems. Not only are our systems completely compatible with the complete line of Modutek’s wet processing benches and wet process equipment, it can also be incorporated with many existing systems that are not made by Modutek.

The Key Benefits of our Chemical Delivery Systems include:

  • An all Teflon fluid path
  • Custom design around your requirements
  • Eliminates manual pouring
  • Includes user friendly software
  • Improves throughput due to quick chemical change

Modutek’s products can be used in a large number of applications. Not only are they perfect for wet processing stations, they can also be used with fume hoods and other applications. In fact, they can be used in any of the following applications:

  • Wet processing stations
  • Tech benches
  • Fume hoods
  • Plating station
  • Precision cleaning stations
  • Acid exhaust hood

Chemical Delivery System - 3D ModelEach Chemical Delivery System and Chemical Mixing Equipment includes a self-contained 55-gallon drum for chemical delivery and recapture with a dedicated controller and integral 5-gallon reserve tank which provides continuous chemical delivery when the drums are being changed. They also include a flexible, 55-gallon drum or bulk tote that expands in increments when additional chemicals are needed. The systems also include a 5-gallon carboy the recaptures chemicals or mixtures that are not able to be drained into a waste system. This chemical delivery system is controllable either from the wet station or by the flexible controller.

Modutek’s Chemical Delivery System and Chemical Mixing Equipment is created to deliver, distribute, recover and transport the chemicals for your unique manufacturing requirements. If you need more information or would like a quote for your specific requirements contact Modutek by calling 866-803-1533 or sending an email to [email protected].

Modutek’s Temperature Control Circulator Provides Reliability for Etching Applications

Modutek’s Temperature Control Circulator Provides Reliability for Etching Applications

Modutek’s RCe Series line of sub-ambient Temperature Control Circulator is an excellent choice for your Buffered Oxide Etch (BOE) and HF application. Temperature control varying by only 0.2ºC is the result of interfacing our temperature control circulator with your silicon wet etching bath or other etch bath (whether you purchase a new one or use your existing equipment). Its design is compact and measures 20.5” x 25.0” x 15.5”, allowing it to fit easily behind or under a wet processing station.

Replacing a non-compliant R22 Freon compressor unit with our 134A Freon compressor will be an advantage, as it will assure that your unit meets current codes. Compressor size, heater size, and fluid parts options will allow you to select a temperature control circulator that will meet your requirements.

The electrical box with on board logic control will monitor temperatures of processes, heaters, and coolers. It will monitor reservoir levels and wi10px;ll sound an alarm for low flow. It will also alert you if the temperature is over what it should be for those processes that require a specific or constant temperature.

Circulator units all come with a 1500 watt stainless steel heater. 2500 watt and 3500 watt upgrades are available, as well, should they be required. Our line includes an upgrade to Deionized (DI) water all stainless steel fluid path, which is unique to our circulators. The water requirement for our RCe-01 standard series is the industry standard, reverse osmosis or city water.

While the ¼ hp compress is standard for our temperature control circulator units, alternate options available include ½ hp, ¾ hp, and 1 hp. Our team of engineers will work closely with your engineers to ensure you have the right system for your application. We can also make some modifications, if they are needed, all in-house rather than outsourcing them.

Our temperature control circulators are environmentally friendly and CE compliant. They include independent circuit breaker protection. An external status display makes it easy to see what is happening. Maintenance on our units is reasonably easy.

Please keep in mind the Modutek’s RCe Series temperature control circulator does have specific facility requirements. Main power requirement of 120 VAC, 50/60HZ, 20A rating for the standard RCe025-1500. The large compress and heater line of the RCe series will have similar requirements with 208VAC, 4-wire Circuit rating. A ½” FNPT inlet/outlet will be needed for circulating fluid.

Precise temperature control is assured when you choose Modutek for your silicon wet etching process or when you choose to replace an existing chiller that is non-compliant. Modutek’s temperature control circulator was designed to be the most advanced chiller/heater unit available. It is reliable as well as safe. Consider using Modutek for precise temperature control in your etching process or replacing your existing non-compliant chiller. Call us at 866-803-1533 or send an email to [email protected] if you would like more information or a quote.

Advantages of Modutek’s Complete Line of Wet Processing Chemical Stations

Advantages of Modutek’s Complete Line of Wet Processing Chemical Stations

Modutek’s complete line of wet processing stations covers any and all of your manufacturing requirements. From manual process equipment to a full Dry to Dry process, we have numerous designs from which to choose. Our advantage is that we build according to your specifications which eliminate catalog purchases. This gives you the exact equipment you require rather than having to accept the limits of what is available. All equipment is designed and built in at our facility in San Jose, CA. This eliminates the “middleman” and gives you a one stop purchasing experience. This will definitely save you money and time. Please review the manufacturing advantages we offer on each wet bench design listed below.

Dry to Dry Wet Processing Benches

Like our Fully Automated Equipment, Dry to Dry process equipment can be obtained from Modutek in a variety of configurations to satisfy your wet process requirements. Our mechanical and electrical engineers work with your engineering team together to design the best equipment for your application, whether you require cleaning, etching or a combination drying. Since process sizes can vary from smaller wafer carriers to large (30”x60”) glass solar panels, so can our stations. In-house design and building of cleaning, etching or wet process stations means you have turnkey support. Our MVD Series IPA Dryer is used in our dry to dry process station, allowing you to move on to the next step in the process without needing a separate tool for drying in between. Throughput and yield are improved by eliminating transfer time. Process flow is aided by use of our SolidWorks Flow Simulation and SolidWorks Simulation Professional, which is advanced software made to improve throughput and etch rates, resulting in increased yields. We never outsource or subcontract the design of our robotics, but design, manufacture and test all robotics at our location in San Jose, CA. Modutek offers final acceptance testing, and all testing uses DI water.

Fully Automated Wet Processing Benches

A complete line of wafer fabrication equipment, which is fully automated, is available from Modutek in a variety of configurations. Our mechanical & electrical engineers will coordinate with your engineers to design the most efficient wet processing equipment for your budget. Most applications include cleaning, etching and drying with custom specifications welcomed. All process sizes are available from 30”x60” solar panels all the way down to standard wafer carriers. In-house design, fabrication, and testing means you have complete turnkey support for wafer fabrication equipment purchased from Modutek. The software is designed and coded by our software engineers, as well, and the SolidWorks Flow Simulation and SolidWorks Simulation Professional are designed to give you your required process flow characteristics. The advanced software provides improved etch rates along with throughput which will result in increased yields. Our facility in San Jose, CA, is where all robotic equipment is completed, from designing and building to testing. No outsourcing or subcontracting is done with our automation design. Modutek always offers final acceptance testing and DI water is used for all wafer fabrication equipment testing.

Semi-Automated Wet Processing Benches

Semi-Automated Stations are another option you can choose when you use Modutek’s Wafer Processing Equipment. This format includes manual wet benches, which can be configured in a wide variety of ways. Semi-automated robots offer uniformity at a lower cost than the fully automated equipment. Servo controlled robots have 3 degrees of freedom. Precise etching or cleaning processes are possible due to this motion control. In-house design and manufacture of robots result in turnkey support. In-house software engineers design and code our software at our facility. SolidWorks Flow Simulation and SolidWorks Simulation Professional are made to help you with required process flow characteristics. All automation design is done in-house, never outsourced or subcontracted. Modutek has a new line of automation that expands the Sysmax Inc. line. Modutek acquired Sysmax Inc. in 2002 and supports their complete SPS Series product line, as well as the Vac Etch (VES) Series and the Transfer Automation System (TAS) series equipment.

Manual Wet Processing Benches

A wide variety of configurations are possible with Modutek’s manual wet processing stations. Both solvent and acid applications are supported by the standard construction. All benches, whether manual or automated, offer the same process and safety features, but the manual benches do not have robotics, so their cost is lower. Each wet bench order has sign off drawings prepared by our electrical and mechanical engineers. You receive the satisfaction you deserve due to our more than 30 years of continuous business operation. Complete turnkey support is available due to all components being designed and built in-house.

Stainless Steel Solvent Wet Benches

Stainless Steel Solvent Stations by Modutek offer a Dry to Dry configuration and Fume Hood design, in manual, semi-automated, or fully automated. Solvent applications can be easily achieved with this stainless steel construction. A few process operations for which these benches can be used include acetone, photo resist striping, and IPA. The process flow characteristics required can be achieved with the help of our SolidWorks Flow Simulation or SolidWorks Simulation Professional software. It is advanced software that increases yields by improving etch rates and throughput.

If your application requires robotics, these are designed, assembled and tested at our facility in San Jose, CA. No outsourcing or subcontracting – our robotic design is all done in-house. Stainless Steel Solvent Stations final acceptance testing can be done any time at Modutek, and all testing uses DI water. Modutek provides a complete line of Wet Benches and Wet Processing Stations designed to meet your specific needs.

Acid Neutralization Systems Provided by Modutek

Acid Neutralization Systems Provided by ModutekAn Acid Neutralization System is vitally important for any company that uses chemicals in their manufacturing process. Chemicals need to be neutralized before they can be discharged. Normally, the requirement in most industries is that chemical waste be discharged with pH range of between 5 to 9 pH. The benefits of Modutek’s Acid Neutralization Systems are discussed below.

Modutek has been designing and manufacturing Acid Neutralization Systems since in the 1990s. Each system is self-contained, is inexpensive to operate, and can be installed easily at your company. Because these Acid Neutralization Systems are designed in-house, they can be modified to fit in the space you have available. Along with the physical dimensions of the Acid Neutralization System, the throughput capacity can also be tailored for your specific production needs.

Industries that generally use Acid Neutralization Systems include Photovoltaic Solar Cell Manufacturers, Pharmaceutical or Biotechnology, Semiconductors, Aerospace, Laboratories, Chemical Processing/Manufacturing, Metal Plating/Finishing, and Medical Devices. No matter what industry your company is in, if you need an Acid Neutralization System, the systems manufactured by Modutek Corporation have many benefits:

  • All Acid Neutralization Systems manufactured by Modutek Corporation are completely self-contained
  • The compact systems are available in two-stage or three-stage systems
  • They are available in many sizes ranging from 5 to 500 gpm
  • They can be installed indoors or outdoors for added flexibility
  • They feature fully automatic operation that treats both acidic or alkaline waste streams
  • Automatic discharge occurs only within desired limits
  • The final monitor chamber is set up for ease of sampling and recording all pH before discharge occurs
  • Stripchart recorders offer continuous monitoring and recording of the pH discharge
  • The system includes an alarm system for high and low pH in the final chamber as well as a PLC with Touch Screen

The Acid Neutralization Systems from Modutek provide the following options:

  • Integrated Lift Stations
  • BMS Systems
  • Surge Pumps
  • Paperless Chart Recorders
  • Data Logging
  • Remote Alarm Panels
  • Process Equipment Integration

The Acid Neutralization Systems from Modutek can easily be incorporated with the other equipment used in your manufacturing process. We offer various sizes which can be customized to meet your requirements. If you would like to learn more about Acid Neutralization Systems produced by Modutek Corporation, call 866-803-1533 or email [email protected].

Wafer Processing Equipment Designed to Meet Your Requirements

Wafer Processing Equipment Designed to Meet Your Requirements

Modutek Corporation has been a leader in the design and production of Wafer Processing Equipment for over 30 years. When you need to purchase high quality reliable Wafer Processing Equipment, turn to a company you can trust that has a long track record of experience and expertise.

Manufacturing semiconductor wafers for integrated circuits with continually reduced geometry sizes requires the use of Wafer Processing Equipment that provides highly reliable and consistent results. Modutek Corporation keeps abreast of the latest technology changes and implements this technology as needed in the semiconductor wafer processing equipment they design and manufacture. Whether your company manufactures semiconductors for medical, industrial, solar, military, or another industries, Modutek has silicon Wafer Processing Equipment that will meet your requirements.

  • Wet Processing Manual Stations are available in different configurations to support both solvent and acid applications. Some of the benefits of these manual wet processing stations include meeting or exceeding all current standards for safety, lower cost than semi and fully automated equipment and the equipment can be designed to meet your requirements.
  • Semi-Automated Stations can also be configured to meet your company’s needs. The robots included with the semi-automated Wafer Processing Equipment ensure uniform processing without the fully-automated price. If precise developing, cleaning and/or etching processes are important, take a closer look at the Semi-Automated Acid Station. Benefits of this equipment include SolidWorks Simulation Professional and Flow Simulation software which is developed in-house. We also include servo motor automation and automation controls with the ease of a touch screen.
  • Fully Automated Stations provide the high degree of automation for silicon wafer processing. To ensure you receive the best possible Wafer Processing Equipment for your application, our team of engineers will work closely with you from testing to final delivery. Not only can we design the best equipment to meet your requirements, our in-house software engineers will revise the SolidWorks Flow Simulation software to your specifications. With over 30 years of continuous operation and excellent customer support, you can trust Modutek Corporation to provide the right Wafer Processing Equipment for your needs.
  • The Rotary Wafer Etching System allows for automated batch processing for chemical etching, resist etching, developing, stripping or cleaning of semiconductor substrates. It uses a dual tank wet station in a compact design. After the initial preset process is complete, the system transfers the carrier assembly to the Quench-Quick Dump-Overflow rinse cycles. Some of the benefits of the Rotary Wafer Etching System include an automated wafer transfer from process to rinse that takes less than 3 seconds, along with a continuous rotation which is adjustable up to 80 rpm. Its compact design is also freestanding, and it can handle multiple wafer sizes.
  • Silicon Wafer Cleaning Equipment moved to the forefront of the semiconductor wafer technology market due to the increase of the wafer reclaim marketing in 2013. Modutek Corporation specializes in microelectronic cleaning and has provided semiconductor manufacturing and wafer cleaning equipment for more than 30 years.

When you need the right Wafer Process Equipment for your business’ needs, call us to discuss your requirements. We can provide a free quote on any of the equipment we manufacture. Call us today at 866-803-1533 or send an email to [email protected] for more information.

Semiconductor Manufacturing Equipment: Benefits of Purchasing from Modutek Corporation

Semiconductor Manufacturing Equipment (SME) from Modutek Corporation is designed and configured according to the client’s specifications and are key components used in semiconductor manufacturing operations worldwide. Whether a company uses one of the manual wet benches, a fully automated wet bench station or a rotary wafer etching system, you can depend on Modutek to work closely with you to understand your specific application and supply a system that meets your application needs.

Semiconductor devices are used in nearly every industry today. They permit different machines to communicate with one another and with us. Through robotics, they do many jobs that are considered unsafe or too exacting that a human could never repeat them as often and as exacting as needed. They allow us to explore the universe around us and are as near as your computer.

Semiconductor manufacturing requires four basic steps:

  • Producing pure silicon ingots and then silicon wafers;
  • Making integrated circuits onto the silicon wafers;
  • Assembling the integrated circuits into a finished product;
  • Testing the back-end process of these products.

Our team of experts understands Semiconductor Manufacturing equipment and the industry requirements and has a combined 76 years of experience. You can trust that our team will know and understand your specific manufacturing requirements and will provide you the equipment that meets or exceed them.

What industries use Modutek Corporation SME systems? Obviously, the Semiconductor industry is one of the industries using our equipment. You will also find Modutek Corporation equipment being used in the Micro-Electro-Mechanical System (MEMS) industry, Solar, Wafer Reclaim, Aerospace, Pharmaceutical and Biomed, Electroless Plating and Electroplating companies.

Modutek has been in continuous operation in the Semiconductor Manufacturing industry since 1980, and we are experts in process control which is needed in process engineering. With our process control, any process engineer can easily design his or her process around our highly reliable products and equipment.

Some of the benefits of using semiconductor manufacturing equipment developed by Modutek  include:

  • Reliable chemical flow throughout the bath for better process control
  • Specially designed tanks to help meet your process requirements
  • Long company history with manufacturing design experience
  • Advanced documents for long-term support (electrical schematics, P&ID and BOM)
  • All chemical baths are guaranteed for continuous temperature control and flow control
  • True process control allows for process engineers to build their process around our consistent application environment.

When you turn to Modutek Corporation, you be assured that we are able to meet or exceed your semiconductor manufacturing equipment needs. Contact us at 866-803-1533 or via email at [email protected] to speak with us today.