Batch Etching Processes Supported by Modutek’s Wet Processing Equipment

Batch Etching Processes Supported by Modutek's Wet Processing EquipmentModutek is one of the premier developers of semiconductor manufacturing equipment as well as wet bench solutions. They pride themselves on more than 30 years of continuous operation and for their high level of customer satisfaction when it comes to providing superior wet processing equipment and service solutions. This experience results in quality and reliability that puts customers first each and every time!

The services and products offered by Modutek are ideal for process engineers and facilities engineers who want and need to use reliable equipment that provides a consistent repeatable process in a high tech manufacturing environment. Their customers include semiconductor fabs, university and research facilities manufacturing semiconductors, solar flat panels, LED displays, hard disk drives, and other related products. Modutek’s in-house engineering team can design and tailor their manufacturing and other wet processing equipment to meet all the requirements that their customers would require to achieve best results.

Modutek’s experienced team of engineers and knowledgeable sales team, can help you find the most effective and affordable solution for all of your wet processing equipment and manufacturing needs. Customer satisfaction runs high and they are known for their excellence in providing quality and reliable services, training, equipment, and machinery – which always has been and always will be their first priority.

Services and Features

Modutek’s Semiconductor Manufacturing Equipment and Wet Bench Expertise provides the following services and features:

  • Buffered Oxide Etch Services
  • Chrome Etch Options
  • Customized Flat Panel Display
  • Specialized Processes for Etching
  • KOH, LED, and MEMS Processes
  • Metal Etching and Wet Processing Equipment
  • High Quality Acid Neutralization
  • Plating Guidance and Services
  • Positive Resist Strip
  • Precision SC1 & SC2 Cleaning
  • Solar and Chemical Polishing

Modutek Equipment and Services

Modutek provides outstanding services and high quality equipment and machinery that meet their customer’s requirements to provide the best results. Below are four of the most popular products available:

Wafer Rotary Etching System: This specialized model offers an affordable, ergonomic, safe, and fully automated batch processor. The system is designed for a variety of uses including developing, stripping, precise chemical etching, wafer reclamation, and a variety of cleaning and processing needs.

Vacuum Metal Etcher: As a fully automated batch processor, this etcher is designed to make use of the wet chemical etching process and is specially designed for optimum results on the aluminum surfaces found on the wafers. The etching is done under in vacuum environment so any hydrogen bubbles created by the process, are removed before they cause flaws and issues with the wet processing equipment etching.

IPA Vapor Dryer: This is a system that yields a very competitive option when it comes to a variety of drying requirements. One drying chamber is all that is needed for optimum drying and finishing. With this special set up, IPA vapor is generated in a compact and easy system that makes reloads and changes very easy and quick.

Megasonic Cleaning Equipment: With this set up you get a platform and design that provides a cleaning system that has been specially developed with the Semiconductor, Solar, FPD, Hard Disk, and Crystal industries in mind. This is one of the few places that has the latest Megasonic advances available to customers and clients before anyone else!

It is easy to see why Modutek is a trusted provider when it comes to semiconductor manufacturing equipment and wet processing equipment. Whatever your business needs may be and whatever the scope of your field is, you can find a solution at Modutek. Contact them at 866-803-1533 for a quote or to ask any questions about their equipment and your manufacturing requirements.

What Modutek’s Dry to Dry Etching Process Equipment Provides

What Modutek’s Dry to Dry Etching Process Equipment ProvidesDry to Dry base / acid wet process from Modutek Corporation is fully automated equipment which is available in many different configurations to serve your requirements for wet process. Modutek’s engineering team put a lot of effort into designing the most effective equipment to support a dry to dry etching process  for your application. All the process sizes are handled from wafer carriers which are standard silicon wafer, glass substrates to glass solar panels of 30” X 60”.

All cleaning, wet process or etching components are designed and built in-house and provides you complete turnkey support. Station of dry to dry utilizes the MVD (Modutek Vapor Dryer) Series IPA Vapor Dryer. This allows you to proceed to the step in processing without using a separate tool in drying. Therefore it eliminates the need of transfer time, and this is a very effective way of improving both throughput and yield. The advanced software will increase your yield, improve your throughput and etch rate. The entire robotic system is completely designed, assembled and quality tested at San Jose, CA with the professionals from Modutek Corporation. All quality procedures use DI water for testing.

This wet process equipment has several features which are useful in your day to day applications. The features give it several advantages that will offer various benefits to you.

 Standard features:

  • Has a IPA Vapor Dryer on board (MDV Series)
  • White polypropylene construction
  • Emergency Power Off (EPO) is equipped with all safety locks
  • Available in multiple sizes and lengths to cater to your specific needs
  • Stations are all wired according to NFPA 70 and 79
  • Every wet process tank has 1” lip exhaust
  • PLC has  touch screen/ graphic user interface (GUI)
  • Servo motor motors has encoder feed back
  • One year warranty (all parts)
  • Leg levelers and casters
  • DI water manifold continuously flow
  • Hand spray for DI water and Teflon N2 gun
  • PVC safety shields
  • Photohelic interlocked to EPO
  • 2-copies of manual paper and a complete paperless set

Benefits include:

  • On board drying tool included
  • Long period of continuous operation (over 35 years)
  • All designing, assembly and testing is done at a single location
  • Software Design includes SolidWorks Simulation Professional and SolidWorks Flow Simulation
  • No outsourcing for either software or robotic design

Applications:

  • Diffusion Clean
  • Ozone Etching
  • Ozone Cleaning
  • KOH Etching
  • Buffered Oxide Etching (BOE)
  • Silicon Nitride Etch
  • SPM Clean
  • SC1 and SC2 containing Megasonic Energy

Optional Ozone Feature (Dry Zone)

The DryZone is a patented revolutionary new solvent gradient dryer. It exceeds the most vigorous total organic carbon (TOC) or volatile organic carbon (VOC) environmental concerns.

Silicon substrates are first rinsed in deionized water to remove any water inorganic impurities. After rinsing, the substrates enter a solvent chamber to develop a boundary layer, which will remove organic impurities. The substrates are then processed through an ozone chamber, either with or without ultraviolet light exposure, to convert all traces of organic materials into carbon dioxide gas. The substrate surfaces are then free from moisture, trace organics, and other particles. The substrate surfaces are stable hydrophilic surfaces. For silicon wafers, the surface is Si-O terminated. If hydrophobic surfaces are needed, a short 10 second post ozone conversion step renders silicon wafers Si-H terminated.

The dryer has no detectable VOC’s in the exhaust, and supports green chemistry initiatives, unlike isopropyl alcohol consuming dryers. Since the dryer uses reactive chemistries, it is more than just particle neutral, it is particle reducing!

Summary

The features, benefits, and applications discussed above say it all. Modutek’s engineering team designs the most effective etching or cleaning equipment needed for your application. If you have any questions or want to get a quote call us at 866-803-1533.

Why You Need Modutek’s Complete Line of Wet Processing Equipment

Why You Need Modutek’s Complete Line of Wet Processing EquipmentWith almost four decades of experience manufacturing wet process equipment for the chemical etching industry, Modutek prides itself on the outstanding quality, durability and cost-effectiveness of its products. Our product line covers the entire range of industry techniques and can support your efforts in any of the following processes:

  • Silicon Nitride Etch
  • Aluminum Etch
  • RCA Clean (SC1 and SC2)
  • Buffered Oxide Etch
  • Develop Process
  • Photo Resist Strip
  • Piranha
  • HF
  • KOH (Anisotropic Etch)
  • Aqua Regia
  • Metal Etch

The Features

Whether you opt for white polypropylene construction for acid and base processes or stainless steel construction for solvent applications, our stations are available in any size or length. Secondly, they are all wired per NFPA 70 & 79 with an EPO mushroom button as well as all safety interlocks. All benches have an N2 head case purge with photohelic interlock to the EPO. Of course, they include a continuous flow DI water manifold plus casters for easy movement and leg levelers for when you get there. All of our equipment comes with a one-year warranty and we even provide the manual on paper as well as an online document.

There are also a range of optional features available including PVC-C construction, third-party certification (NFPA, CE mark or NEC), seismic zone 4 structural certification, HEPA fan filters, dedicated drains and carboys with DOT containment, overhead deck lighting, 3-color light towers and counterbalance safety shields.

The Benefits

Modutek’s full line of wet processing equipment – manual or automatic, standard or custom – offers a host of benefits including proven design that meets all price requirements and safety standards, a low cost of ownership, built-in expansion capabilities, all at a competitive price. In short, Modutek has the exact high-end wet processing equipment to suit your current and future needs.

The Bottom Line

Building a custom wet etching station? Upgrading your existing process? Purchasing new wet stations? Modutek can help! In fact, our line of in-house manufacturing equipment encompasses every process. In particular, we can supply you with:

  • Quartz: High temperature acid baths with available circulation and filtration.
  • Stainless Steel: Solvent applications with circulation and filtration.
  • Plastic: Certified welders; PVDF, Halar, Teflon, HDPE, Polypro and FM4910 material
  • Support Equipment: IPA Vapor dryers, Chemical Neutralizers, Fume Scrubber, Sub-Ambient Systems, Chemical Mixing, Chemical Delivery and Chemical Collect.

Modutek- Proven Experience

Modutek prides itself on 35+ years of continuous operation in providing semiconductor, MEMS and solar manufacturing equipment solutions. This experience gives you the reliability you deserve. From beginning to end, we work directly with you, from design approval to installation and final acceptance. With our in-house manufacturing capabilities of wet processing equipment to the final design and build of your custom process stations, we are your one-stop destination. For more specific information about our wet process equipment, please visit us online at Modutek.com or call us directly at 866-803-1533.

Advantages of Modutek’s Complete Line of Wet Processing Chemical Stations

Advantages of Modutek’s Complete Line of Wet Processing Chemical Stations

Modutek’s complete line of wet processing stations covers any and all of your manufacturing requirements. From manual process equipment to a full Dry to Dry process, we have numerous designs from which to choose. Our advantage is that we build according to your specifications which eliminate catalog purchases. This gives you the exact equipment you require rather than having to accept the limits of what is available. All equipment is designed and built in at our facility in San Jose, CA. This eliminates the “middleman” and gives you a one stop purchasing experience. This will definitely save you money and time. Please review the manufacturing advantages we offer on each wet bench design listed below.

Dry to Dry Wet Processing Benches

Like our Fully Automated Equipment, Dry to Dry process equipment can be obtained from Modutek in a variety of configurations to satisfy your wet process requirements. Our mechanical and electrical engineers work with your engineering team together to design the best equipment for your application, whether you require cleaning, etching or a combination drying. Since process sizes can vary from smaller wafer carriers to large (30”x60”) glass solar panels, so can our stations. In-house design and building of cleaning, etching or wet process stations means you have turnkey support. Our MVD Series IPA Dryer is used in our dry to dry process station, allowing you to move on to the next step in the process without needing a separate tool for drying in between. Throughput and yield are improved by eliminating transfer time. Process flow is aided by use of our SolidWorks Flow Simulation and SolidWorks Simulation Professional, which is advanced software made to improve throughput and etch rates, resulting in increased yields. We never outsource or subcontract the design of our robotics, but design, manufacture and test all robotics at our location in San Jose, CA. Modutek offers final acceptance testing, and all testing uses DI water.

Fully Automated Wet Processing Benches

A complete line of wafer fabrication equipment, which is fully automated, is available from Modutek in a variety of configurations. Our mechanical & electrical engineers will coordinate with your engineers to design the most efficient wet processing equipment for your budget. Most applications include cleaning, etching and drying with custom specifications welcomed. All process sizes are available from 30”x60” solar panels all the way down to standard wafer carriers. In-house design, fabrication, and testing means you have complete turnkey support for wafer fabrication equipment purchased from Modutek. The software is designed and coded by our software engineers, as well, and the SolidWorks Flow Simulation and SolidWorks Simulation Professional are designed to give you your required process flow characteristics. The advanced software provides improved etch rates along with throughput which will result in increased yields. Our facility in San Jose, CA, is where all robotic equipment is completed, from designing and building to testing. No outsourcing or subcontracting is done with our automation design. Modutek always offers final acceptance testing and DI water is used for all wafer fabrication equipment testing.

Semi-Automated Wet Processing Benches

Semi-Automated Stations are another option you can choose when you use Modutek’s Wafer Processing Equipment. This format includes manual wet benches, which can be configured in a wide variety of ways. Semi-automated robots offer uniformity at a lower cost than the fully automated equipment. Servo controlled robots have 3 degrees of freedom. Precise etching or cleaning processes are possible due to this motion control. In-house design and manufacture of robots result in turnkey support. In-house software engineers design and code our software at our facility. SolidWorks Flow Simulation and SolidWorks Simulation Professional are made to help you with required process flow characteristics. All automation design is done in-house, never outsourced or subcontracted. Modutek has a new line of automation that expands the Sysmax Inc. line. Modutek acquired Sysmax Inc. in 2002 and supports their complete SPS Series product line, as well as the Vac Etch (VES) Series and the Transfer Automation System (TAS) series equipment.

Manual Wet Processing Benches

A wide variety of configurations are possible with Modutek’s manual wet processing stations. Both solvent and acid applications are supported by the standard construction. All benches, whether manual or automated, offer the same process and safety features, but the manual benches do not have robotics, so their cost is lower. Each wet bench order has sign off drawings prepared by our electrical and mechanical engineers. You receive the satisfaction you deserve due to our more than 30 years of continuous business operation. Complete turnkey support is available due to all components being designed and built in-house.

Stainless Steel Solvent Wet Benches

Stainless Steel Solvent Stations by Modutek offer a Dry to Dry configuration and Fume Hood design, in manual, semi-automated, or fully automated. Solvent applications can be easily achieved with this stainless steel construction. A few process operations for which these benches can be used include acetone, photo resist striping, and IPA. The process flow characteristics required can be achieved with the help of our SolidWorks Flow Simulation or SolidWorks Simulation Professional software. It is advanced software that increases yields by improving etch rates and throughput.

If your application requires robotics, these are designed, assembled and tested at our facility in San Jose, CA. No outsourcing or subcontracting – our robotic design is all done in-house. Stainless Steel Solvent Stations final acceptance testing can be done any time at Modutek, and all testing uses DI water. Modutek provides a complete line of Wet Benches and Wet Processing Stations designed to meet your specific needs.