Modutek’s Temperature Control Circulator Provides Reliability for Etching Applications

Modutek’s Temperature Control Circulator Provides Reliability for Etching Applications

Modutek’s RCe Series line of sub-ambient Temperature Control Circulator is an excellent choice for your Buffered Oxide Etch (BOE) and HF application. Temperature control varying by only 0.2ºC is the result of interfacing our temperature control circulator with your silicon wet etching bath or other etch bath (whether you purchase a new one or use your existing equipment). Its design is compact and measures 20.5” x 25.0” x 15.5”, allowing it to fit easily behind or under a wet processing station.

Replacing a non-compliant R22 Freon compressor unit with our 134A Freon compressor will be an advantage, as it will assure that your unit meets current codes. Compressor size, heater size, and fluid parts options will allow you to select a temperature control circulator that will meet your requirements.

The electrical box with on board logic control will monitor temperatures of processes, heaters, and coolers. It will monitor reservoir levels and wi10px;ll sound an alarm for low flow. It will also alert you if the temperature is over what it should be for those processes that require a specific or constant temperature.

Circulator units all come with a 1500 watt stainless steel heater. 2500 watt and 3500 watt upgrades are available, as well, should they be required. Our line includes an upgrade to Deionized (DI) water all stainless steel fluid path, which is unique to our circulators. The water requirement for our RCe-01 standard series is the industry standard, reverse osmosis or city water.

While the ¼ hp compress is standard for our temperature control circulator units, alternate options available include ½ hp, ¾ hp, and 1 hp. Our team of engineers will work closely with your engineers to ensure you have the right system for your application. We can also make some modifications, if they are needed, all in-house rather than outsourcing them.

Our temperature control circulators are environmentally friendly and CE compliant. They include independent circuit breaker protection. An external status display makes it easy to see what is happening. Maintenance on our units is reasonably easy.

Please keep in mind the Modutek’s RCe Series temperature control circulator does have specific facility requirements. Main power requirement of 120 VAC, 50/60HZ, 20A rating for the standard RCe025-1500. The large compress and heater line of the RCe series will have similar requirements with 208VAC, 4-wire Circuit rating. A ½” FNPT inlet/outlet will be needed for circulating fluid.

Precise temperature control is assured when you choose Modutek for your silicon wet etching process or when you choose to replace an existing chiller that is non-compliant. Modutek’s temperature control circulator was designed to be the most advanced chiller/heater unit available. It is reliable as well as safe. Consider using Modutek for precise temperature control in your etching process or replacing your existing non-compliant chiller. Call us at 866-803-1533 or send an email to if you would like more information or a quote.