Silicon Wet Etching Equipment
Modutek offers a broad range of silicon wet etching equipment to support a wide range of wet processing applications. The products that support these applications include Quartz Baths, Sub-Ambient Systems (BOE), Teflon Tanks, Silicon Nitride Etch Baths, Quick Dump Rinsers as well as Temperature Controlled Circulators. We provide high quality, reliable equipment that will meet all your silicon manufacturing requirements.
For more details on how Modutek’s equipment is used to improve and support silicon wet etching processes refer to the articles listed below:
- How Silicon Wet Etching Processes Are Improved with Specialized Equipment
- Selecting the Right Equipment for Your Silicon Wet Etching Application
- Improvements to the Silicon Wet Etching Process
- Benefits of Using Quick Dump Rinsers for Silicon Wet Etching
- How the Silicon Nitride Wet Etching Process is Improved by Modutek
- Improved Process Control with Modutek’s Silicon Nitride Wet Etching Bath
The Modutek QFa Series of High Temperature Recirculating Baths is the result of almost 30+ years of evolutionary bath design and a passion for establishing the quality standard in quartz baths. At Modutek, we define quality by the degree of safety, reliability, and cost of ownership integrated into every aspect of our baths.
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Sub-Ambient Systems / BOE
The F SERIES sub-ambient filtered etch bath is our time tested solution to providing continuous filtration while reducing acid consumption in your BOE (Buffered Oxide Etch) or positive resist develop processes. A low cost of ownership has been engineered into every detail of our filter etch bath, making it one of our most consistent performers.
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Temperature Controlled Circulator
The Modutek RCe Series of Temperature Control Recirculators was engineered to establish the highest standard for chiller/heater units. We have accomplished this by incorporating reliability, cost of ownership, and safety into every aspect of our design. The RCe Series is composed of a network of components and devices which continuously monitors the system.
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All Modutek Series Teflon tanks are available in three configurations: Temperature Controlled Recirculating Baths, Temperature Controlled Static Baths and Teflon ambient baths. All models are available in standard carrier sizes for single or double capacity. We also build custom sizes to match any requirement. Our module design allows for installation into any new wet etching station configuration.
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Silicon Nitride Etch Baths
The Nb Series silicon nitride etch bath is engineered to provide unparalleled process control, safety and flexibility. This is accomplished by creating a two-tired diagnostic system which monitors the temperature while maintaining the acid to water ratio through D.I. water supplementation.
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Quick Dump Rinsers
The DR Series dump rinser is our most efficient process rinsing module. State-of-the-art engineering has eliminated particle entrapment, minimized rinsing time, reduced D.I. water consumption, and shortened dump time.
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The Modutek SFa Series Stainless Steel Temperature Controlled Recirculating Bath is designed for all of your solvent applications. All solvent baths emphasize safety and meets Class 1 Div 1 Group D requirements.
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If you have any questions about our silicon wet etching products or if you need help selecting the right equipment for your application requirements call us at 866-803-1533.