Chemical Wet Processing Table Top Units

Modutek provides small table top units to support chemical wet processing at research labs and universities for proof of concept or prototyping. Using a typical semiconductor manufacturing line for this purpose is expensive and does not provide flexibility. The use of small table top units allows wet processing to be scaled back to reduce equipment size without losing required functionality. Modutek’s table top units support the most important silicon wet processing functions needed to produce small volumes semiconductor products quickly and efficiently.

Support For Most Chemical Wet Processes

Modutek’s table top chemical wet processing systems are compact, self-supporting units that consist of a Temperature Remote control box and either a Teflon® tank for acid processes or a stainless-steel tank for solvent processes. The tanks are available as ambient or temperature-controlled models and can be static baths or recirculating baths with a filter.

Modutek’s Table Top Units Support the following Chemical Wet Processes:

• KOH Etching
• Solvent Resist Strip
• Buffered Oxide Etch (BOE)
• Other Wet Processes Available

 

Chemical Wet Processing Table Top Units with Teflon® Tanks

Available Models of Teflon®Tanks:

• TFa Series – PFA Teflon® High Temperature Overflow
• TI Series – PFA Teflon® High Temperature Static
• TT Series – PFA Teflon® Tank Ambient

Available Features:

• 360 degree serration overflow
• Condensing refluxor – optional
• Custom tank sizes available
• Low level, High Limit, High Temperature and Drain Interlock standand

System Specifications:

• Applications: KOH and TMAH
• Operating temperature range: 30 – 100º C
• Process temperature control: ± 0.5º C
• Heat-up rate: 2-3º C per minute (rate affected by size of system)
• One year warranty

Options:

• Teflon® gravity drain system
• Remote temperature control box with low voltage control circuit and high voltage heater circuit
• All components(Breakers, Controller, Transformer)meet safety requirements and are UL listed.

Construction Materials:

• All PFA Teflon®
• Natural Polypro
• PVDF

Chemical Wet Processing Table Top Units with Solvent Tanks

Available Models of Solvent Tanks:

• SFa Series – Stainless Steel Temperature Overflow
• Sa Series – Stainless Steel Temperature Static Bath
• ST Series – Stainless Steel Ambient Bath

Available Features:

• Grounded vessel
• 4-sided heating element
• 360º overflow weir
• Dual safety snap switch
• Radius corner design
• Electropolished

System Specifications:

• Applications: All solvents
• Solvents: IPA, Acetone, Resist Strippers
• Operating temperature range: 30 º – 100 ºC
• Process temperature control: ± 1 ºC (depends on controller and process)
• Heat-up rate: 2 º C per minute (rate affected by size of system, fluid, etc.)

Options:

• Liquid Level Sensor
• Stainless steel diffuser plate
• Process temperature controller
• Custom vessel sizes
• Remote temperature control box with low voltage control circuit and high voltage heater circuit
• All components (Breakers, Controller, Transformer) meet safety requirements and are UL listed.

Facility Requirements for SFa and Sa Series:

• Electrical: 208VAC, 50 / 60 Hz, 1Ø (current requirements depends on bath size)

Construction Materials (SFa and Sa Series):

• Process Vessel: 316L Stainless Steel Electropolished
• Outer Housing: Stainless steel or FM4910 approved material
• Process thermocouple: Teflon encapsulated J-type
• Insulation: High density alumina silica fiber rated to 1260 º C

For additional information on our Chemical Wet Processing Table Top Units, including configurations and options, or  to get quote for your specific requirements, contact us or call at 866-803-1533.