Dry To Dry Process

Dry to Dry Acid/Base Wet Process equipment for clean room applications

Dryer LoadingModutek’s Dry to Dry process equipment like our Fully Automated Equipment is available in a wide verity of configurations for your wet process requirements. We work with your engineering team to design the best wet processing / etching or cleaning equipment for your application. We handle all process sizes from standard wafer carriers, glass substrates to 30” x 60” glass solar panels. All wet process, etching or cleaning components are built and designed in-house giving you complete turnkey support. Our dry to dry process station utilizes our MVD Series IPA Dryer. This feature allows you continue to the next process step without having to dry in a separate drying tool. Eliminating transfer time is one very quick way to improve throughput and yield. Our SolidWorks Simulation Professional and SolidWorks Flow Simulation give you the process flow characteristic you require. This advanced software will improve your etch rates and throughput and also increases your yields. All robotic equipment is designed, assembled and tested at our San Jose, CA. We do not outsource or subcontract our robotic design. Final acceptance testing at Modutek is always available. All testing is performed using DI water.

Benefits Include:

Final rinse and dry steps

  • Eliminates the requirement to dry in a separate tool
  • SolidWorks Flow Simulation software
  • SolidWorks Simulation Professional software
  • No outsourcing for robotic and software design
  • Complete design, assembly and test at one location
  • Over 30 years of continuous operation

Standard Features:

Modutek Single tank Dry to Dry

  • White polypropylene construction
  • On board IPA Vapor Dryer (MVD Series)
  • Available in any size and length to meet you requirement
  • All stations wired per NFPA 70 & 79
  • PCL with touch screen/GUI (graphic user interface)
  • Servo motor motors with encoder feed back
  • Emergency Power Off (EPO) with mushroom button and all safety interlocks
  • All wet process tanks equipped with 1” lip exhaust
  • N2 head case purge with interlock
  • Photohelic with interlock to EPO
  • PVC safety shields
  • Teflon N2 gun and DI water hand spray
  • Continuous flow DI water manifold
  • Casters and leg levelers
  • One year warranty on all parts
  • 2 copies paper manual and one complete set of paperless


Multi tank Dry to Dry station

  • FM4910 (PVC-C) material of construction
  • Rear access design
  • Data logging
  • On line support
  • Resistivity monitoring control
  • All Teflon plumbing
  • In house SolidWorks Flow Simulator software with report and drawings including 3D model
  • In house SolidWorks Simulator Professional with reports and drawings including 3D model
  • Chemical management interface
  • Third party certification for NFPA 70 & 70
  • Semi standard, CE mark and NEC certification available
  • Seismic zone 4 structural certification
  • Fan Filter Units (HEPA)
  • Lift station designed into bench
  • Dedicated drains to carboy with DOT containment
  • Overhead deck lighting
  • Fire suppression system
  • Light tower (3-color)
  • Extended warranty available


Robot Handling

  • KOH Etching
  • Diffusion Clean
  • Ozone Etching
  • Ozone Cleaning
  • SC1 & SC2 featuring Megasonic Cleaning
  • BOE (Buffered Oxide Etching)
  • SPM Clean
  • Hot phosphoric (Nitride Etching)