Semiconductor manufacturing involves many process steps that require fabrication facilities to utilize the right processing equipment. Fabrication facilities need to choose a semiconductor equipment supplier that can provide a broad range of reliable products to support their applications, and also insure that the equipment to meets all requirements. Modutek has extensive experience and expertise in providing high quality equipment and a record of supplying reliable products for all silicon wet etching applications. Below several products are discussed along with the specific wet etching applications that they support.
Quartz baths support a variety of etching, cleaning and stripping processes including SC1 cleaning, RCA clean and SPM clean. The Modutek bath designs have evolved over 30 years to become the quality standard in the industry. They are made of semiconductor grade, flame polished quartz and come in a range of sizes from inner lengths of 7.75 inches to 21.5 inches and heater power from 2 to 6 kW. The designs emphasize safety, reliability and cost of ownership.
Modutek’s sub-ambient filtered etch baths are specifically designed for BOE (buffered oxide etch) and positive resist develop applications. They feature continuous filtration in the 10 to 0.2 micron range, reduced acid consumption and a low cost of ownership. They are made of natural polypropylene and polyvinyldilene fluoride (P.V.D.F), offer a 10 to 60 degree centigrade range of operation and plus/minus 1 degree temperature control. A range of options lets customers match the system to their requirements.
Temperature Controlled Circulators
The Modutek RCe Series of Temperature Controlled Recirculators are suitable for etching, plating and developing applications and constant temperature baths. The units feature a compact design and stainless steel fluid paths for a high level of safety and reliability. The standard heating capacity is 1500 W while cooling capacity is one quarter horse power. Other heating and cooling sizes are available.
Teflon tanks by Modutek feature a modular design that is easy to integrate into new silicon wet etching stations or incorporate into existing stations. Available configurations are temperature controlled recirculating baths, temperature controlled static baths and Teflon ambient baths. Heat sources can be Teflon inline heating or immersion heating in the overflow weir. The tanks are available in standard carrier sizes for single or double capacity and they support KOH Etching and TMAH applications.
Nitride Etch Baths
Modutek nitride etch baths are designed for unparalleled process control with an emphasis on safe operation. Modutek has designed a two-tier control system that monitors the temperature while maintaining the acid to water ratio by adding de-ionized water as required. The resulting chemical boiling achieves tight temperature control and avoids bumping. A remote metering system facilitates installation in new or existing stations.
Quick Dump Rinsers
The quick dump rinsers offered by Modutek provide efficient process rinsing without particle entrapment and reduced use of de-ionized water. They provide consistent rinsing with bottom filling, well-located D.I water spray nozzles and N2 agitation. A bottom filling option that creates a vortex agitation in the rinse tank is optional.
Modutek solvent baths are electropolished stainless steel tanks suitable for all solvent applications including IPA, acetone and resist strippers. The baths meet Class 1 Div 1 Group D requirements over an operating range of 30 to 100 degrees centigrade and the heat up rate is up to 2 degrees centigrade per minute, depending on the system size. Bath design is flexible and Modutek can help customers ensure the bath selected fits into their new or existing installation.
Modutek has over 35 years of continuous operating experience in developing and supplying silicon wet etching equipment. This experience results in a flexible approach and an unmatched range of semiconductor manufacturing equipment options. Modutek can supply the right equipment for a customer’s particular application and can help ensure that the selected equipment meets the customer’s needs. Call for a free quote and recommendations on using the right equipment for your silicon wet etching application.