Tag Archives: custom wet bench equipment

How Customized Equipment Improves Silicon Wafer Processing

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How Customized Equipment Improves Silicon Wafer ProcessingBecause semiconductor manufacturing is made up of a large number of steps, silicon wafer processing often includes unique requirements. Standard equipment may be suitable to some extent, but using custom equipment adapted to the particular process can improve production line performance. Customization of the physical characteristics of the system, the software, the degree of automation and the process components can impact how well the silicon wafer processing equipment works. An experienced supplier of wet processing equipment can advise customers regarding possible customization and follow up with specific equipment suggestions.

Physical Customization of Wet Process Equipment

Semiconductor manufacturing equipment often has to fit into a defined space or is retrofitted into an existing production line. In either case, the dimensions have to be customized to fit the available space. Modutek can build processing stations and tanks with special dimensions to fit and can arrange components for less depth or less length as required. Because Modutek designs and builds all its own equipment, the company is capable of changing the dimensions of its standard products to fit customer requirements.

Customized Software for Special Calculations

The Modutek SolidWorks Flow Simulation and Simulation Professional software allows customers to accurately calculate chemical dosages and to track chemical usage. Custom installations may require special calculations and the software may have to be adapted to calculate and track custom chemical use. Modutek writes all its own software and can therefore customize and adapt the program code. Customers can rely on Modutek to maintain and support the non-standard software and make sure it works the way the customer wants.

Automation With Customized Characteristics

Modutek’s standard wet processing equipment is available in fully automated, semi-automated or manual versions but customers may require some automated functions while other functions remain manual or semi-automatic. Prototypes often rely on manual controls to define basic process parameters. Then the process is optimized in semi-automatic operation while eventually running in fully automatic mode when in full production. Existing product manufacturing may require only full automation but the manufacturing process may need operators to execute some manual functions.

Depending on the customer’s manufacturing needs, Modutek can design automation combining manual and automatic controls as specified by the customer. The automatic process may run until operator intervention is required to execute a command or check a specific condition. Modutek can adapt its systems to meet such special automation needs.

Customized Process Components and Subsystems

Process components and subsystems may include chemical delivery, baths or tanks, wafer handling and wafer drying. Modutek can integrate some of these functions into a single unit or place separate units into a custom arrangement. For example, a chemical delivery station can have local or remote tanks and can be placed behind the processing stations to save space. An IPA vapor dryer can include de-ionized water rinsing and vapor drying in one unit. With the company’s experience as a leading wet bench manufacturer, Modutek can design custom arrangements that carry out the required wet process functions within the parameters set by the customer.

Modutek’s Customizations Improve Process Performance

Modutek has a complete line of standard wet process stations, all designed and built in house. For new customized projects, the custom system is evaluated for special requirements and possible solutions. Modutek then works closely with the customer to ensure that the chosen customizations reflect the special process requirements and will produce the expected results.

When Modutek builds such custom systems, they choose customization over standard systems because the customization will improve overall performance. Improvements can include higher throughput, better output quality and lower costs. Working transparently with the customer, Modutek can demonstrate how its proposals will produce better results and ensure that the finished system meets expectations.

How Customized Equipment Has Improved the Silicon Wafer Cleaning Process

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Different customized systems or custom components may improve silicon wafer cleaning processes because customers have special requirements or because the process characteristics are unusual. Suppliers taking on such projects must have extensive in-house experience and expertise together with a board line of silicon wafer cleaning equipment to provide custom solutions. When customization is required, effective solutions can improve throughput, lower costs, and result in higher output quality and yield. Modutek has both the experience and in-house expertise required to offer such customized equipment.

Customized Software

Modutek’s SolidWorks Simulation Professional and SolidWorks Flow Simulation software allows customers to calculate chemical doses accurately as well as track chemical usage. Such calculations are especially important for custom installations because the inputs and the values obtained may be non-standard. Modutek develops and writes all its own software so the company can make adjustments and implement software customization whenever it’s required by a customer. This means that customers can rely on software that corresponds to their customized systems rather than trying to operate a custom system with standard software. Modutek’s software can tailored to precisely control and monitor even the most customized installations.

Custom-Fit Equipment

A lot of the equipment that goes into a silicon wafer cleaning installation has to fit into an existing space or fit other limiting installation parameters. Such custom-fit equipment may include:

  • Megasonic systems
  • Teflon tanks
  • Quartz baths
  • or other custom equipment

Modutek can build custom versions of these components to fit any existing or new wet process system to optimize the silicon wafer cleaning process. Megasonic cleaning systems can be customized for frequency and power while tanks can be sized according to custom requirements and can be fitted with heaters or re-circulating pumps as required. In each case, Modutek can analyze the silicon wafer cleaning application and recommend the most appropriate solution.

Custom Wet Bench Station Design

When preparing a custom wet bench station design, Modutek first looks at the process specifications. The software, chemical delivery systems, baths and wafer handling must all fit together to satisfy the process requirements. Sometimes customized components can be used in a standard configuration but at other times specially designed components may be arranged in a custom system.

This approach provides end-user flexibility while respecting customer specifications and ensuring that the equipment performs as expected. All systems are designed and built at Modutek’s company facilities based on their own in-house expertise and experience.

Customized Wet Process Systems

Wet process systems can be customized at the component or system level, but they can also feature customized levels of automation. Standard systems are manual, semi-automatic or fully automatic but special solutions are always possible. Customers may want a manual system but also want certain process sub-steps to run automatically. A customer may want the handling of hazardous chemicals to be fully automated for safety reasons but want the rest of the process to be manual. On the other hand, a fully automatic system may have a requirement for operator intervention at a specific point. Because Modutek designs these systems in-house, such customization is seamless and problem-free.

Customized wet process systems can find application in many research and industrial fields. A customized system is often needed for prototype development and testing since the prototype can have unusual or unique features. Cutting-edge research and development in industry or at universities may also require the special characteristics available from customized systems. Even full production manufacturing facilities may need customization if they want to try special cost-cutting or quality-enhancing production methods. In each case Modutek can analyze the requirements and propose solutions.

With over 35 years of experience in wet process technology, Modutek has pioneered customization as a tool for improving silicon wafer cleaning processes and continues to develop unique customized solutions for its customers. If you need a customized solution for your application contact Modutek for a free consultation or quote.