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How the SPM Clean Process is Supported in a Wet Bench Process

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Editor’s Note: This article was originally published in Oct 2016 and has been updated with additional information and reposted in May 2023. Semiconductor manufacturing involves multiple processing steps which include cleaning silicon wafers. The sulfuric peroxide mix (SPM) cleaning process is widely utilized in semiconductor manufacturing. The process utilizes a mixture of approximately 3 parts […]