Quartz Bath Products

QFa Series Quartz Bath

High Temperature Recirculating Quartz Bath:

High Temperature Recirculating Quartz BathThe Modutek QFa Series of High Temperature Recirculating Quartz Bath is the result of almost 30+ years of evolutionary bath design and a passion for establishing the quality standard in quartz baths. At Modutek, we define quality by the degree of safety, reliability, and cost of ownership integrated into every aspect of our quartz bath products.

Quartz Bath Features and Benefits:

  • Nested 4 sided heating element 360º serrated overflow weir
  • Dual safety snap switch
  • Seamless, sloped flange design
  • Fast, more even heating
  • Facilitates laminar flow while minimizing particulate contamination
  • Minimizes damages resulting from runaway temperatures
  • Improves up time and reliability due to longer vessel life

Quartz Bath System Specifications:

Quartz Bath for 1-8” carrier

  • Applications: Etching, Stripping, Cleaning
  • Chemical usage: H2SO4, H2O2, SC1, etc.
  • Operating temperature range: 30 º – 180 ºC
  • Process temperature control: ± 1 ºC (depends on controller and process)
  • Heat-up rate: 2 º C per minute (rate affected by size of system, fluid, etc.)
  • Circulating fluid inlet / outlet: 3/4” Male Flaretek

Quartz Bath Options:

  • Liquid Level Sensor
  • Quartz diffuser plate
  • Process temperature controller
  • Autolid
  • Custom vessel sizes
  • Water Ring Seal (WRS) -30 month warranty, 360 degree Labyrinth seal, Contact us for specific bath price

Quartz Bath Facility Requirements:

  • Electrical: 208VAC, 50 / 60 Hz, 1Ø (current requirements depends on bath size)
  • Remote controller: Modutek C1915, or equivalent

Quartz Bath Construction Materials:

  • Process Vessel: Semiconductor grade, flame-polished, quartz
  • Housing: UL-94 VO rated FRPP
  • Process thermocouple: Teflon encapsulated J-type
  • Insulation: High density alumina silica fiber rated to 1260 º C

QFa Matrix

Model

Vessel ID
L x W x D (in.)

Deck Cutout
L x W x D (in.)

Deck Area
L x W (in.)

Heater @
208 Vac

QFa16 7.75 x 7.75 x 9.00 10.25 x 13.00 x 16.00 15.625 x 14.375 2.0 kW
QFa18 12.00 x 11.00 x 10.50 18.75 x 16.50 x 17.50 20.25 x 18.00 4.5 kW
QFa24 11.50 x 7.50 x 6.75 18.00 x 12.625 x 13.50 19.50 x 14.25 2.5 kW
QFa25 13.50 x 7.50 x 7.75 20.25 x 16.625 x 14.50 21.50 x 14.25 3.0 kW
QFa26 16.00 x 8.00 x 9.00 22.50 x 13.25 x 16.00 24.00 x 14.75 3.6 kW
QFa28 21.50 x 11.50 x 10.50 31.00 x 17.25 x 17.50 32.25 x 18.50 5.7 kW
QFa112 17.87 x 10.75 x 14.50 24.50 x 16.50 x 21.50 26.00 x 18.00 6.0 kW

Model nomenclature: model code, number of cassettes and size of cassettes. eg. QFa26(QFa series-2-6”)
Note: Add approximately 4” for drain on overall depth

Qa SERIES Quartz Bath

CONSTANT TEMPERATURE QUARTZ BATH:

High Temperature Static Quartz BathsThe Qa Series Constant Temperature Quartz Bath is the result of over thirty years of evolutionary bath design and a passion for establishing the quality standard in quartz baths. At Modutek, we define quality by the degree of safety, reliability, and cost of ownership engineered into every aspect of all our products.

Quartz Bath FEATURES:

  • Bonded 5-sided circuit heating element
  • Redundant safety devices
  • Seamless, sloped flange design

Quartz Bath BENEFITS:

  • Improves process yield by faster, more efficient, and even heating
  • Minimizes potential damage caused by runaway temperatures
  • Improves uptime and reliability due to longer vessel life

Qa SERIES QUARTZ BATH

CONSTANT TEMPERATURE QUARTZ BATH:

Quartz Baths in process station layout

QUARTZ BATH SYSTEM SPECIFICATIONS:

  • Application: Etching, Stripping, Cleaning
  • Chemical usage H2SO4, H2O2, HCI, ETC
  • Operating temperature range: 30-180˚C
  • Process temperature control: ± 1.0˚C (depending on controller)
  • Heat-up rate: 2˚C per minute (rate affected by size of system, fluid, etc.)
  • One year warranty

QUARTZ BATH OPTIONS:

  • Magnetic stirrer
  • Aspirator (dilution) valve system
  • Gravity drain
  • Remote operation timer switches
  • Process Controller
  • Quartz bubbler
  • Water Ring Seal (WRS) -30 month warranty, 360 degree Labyrinth seal, Contact us for specific bath price

QUARTZ BATH FACILITY REQUIREMENTS:

Electrical: 208-240 VAC, 50/60 Hz, 1ø, 7-20 amps (depending on model and voltage)

QUARTZ BATH CONSTRUCTION MATERIALS:

  • Process Vessel: Internally flame polished virgin fused quartz, boron-free
  • Housing: Flame retardant polypropylene, UL-94 V-O rated (PVDF: optional)
  • Process thermocouple: J-type Teflon® encapsulated
  • Insulation: High density alumina silica fiber rated to 1260˚C

Qa Matrix

Model

Inside Dimension (ID)
L x W x D (in.)

Deck Cutout
L x W x D (in.)

Deck Area
L x W (in.)

Heater
(Kw)

Qa16 7.75 x 7.75 x 9.81 10.50 x 10.50 x 10.00 11.63 x 11.63 2.3
Qa18 12.00 x 11.00 x 11.69 14.75 x 13.75 x 11.88 15.88 x 14.88 3.6
Qa24 11.50 x 7.50 x 7.81 14.25 x 10.25 x 8.00 15.38 x 11.38 2.5
Qa25 13.50 x 7.50 x 8.81 16.25 x 10.25 x 9.00 17.38 x 11.38 2.5
Qa26 16.00 x 8.00 x 9.81 18.75 x 10.75 x 10.00 19.88 x 11.88 3.0
Qa28 21.50 x 11.50 x 11.69 24.00 x 14.00 x 12.00 25.50 x 15.50 6.0
Qa112 17.87 x 10.75 x 17.50 20.25 x 13.25 x 17.69 21.75 x 14.75 6.0

Model nomenclature: model code, number of cassettes and size of cassettes. eg. Qa26(Qa series-2-6”)

If you need additional information on our Quartz Bath models, or want a quote for your specific requirements, call us at 866-803-1533.