A chemical collection system stores used process chemicals safely in contained drums or carboys until they are removed for treatment or disposal. The system monitors the fill level of each container and, when one container is full, automatically switches collection over to an empty one. This lets a fab keep running without stopping to change containers, while keeping used chemicals contained and within safe levels.
Sizes range from 5-gallon carboy units with DOT-approved containers up to large collection tanks. Each system uses a control system and software interface that tracks disposal levels, so an operator always knows the state of every container. The fill-and-empty control logic ensures there is no downtime when a container reaches capacity.








































































It is a system that stores used process chemicals in contained drums or carboys until they are removed for treatment or disposal. It monitors the fill level of each container and keeps used chemicals within safe levels, so a facility can manage chemical waste without a fixed treatment installation.
Each container has level sensing, and when one container reaches its high sensor reading, the system automatically switches collection to an empty container. The process tool keeps running while a full container is removed, so there is no pause to manually switch containers.
Each drum or carboy is monitored at four points: High and High/High. These readings track a container from nearly empty to full, trigger auto switchover at the high reading, and are displayed remotely so an operator can see the state of every container.
The system uses 110 percent double containment with leak detection, and double-wall plumbing is available. If a leak occurs, it is captured by the secondary containment and detected by the sensors before containment is lost.
Yes. The system provides digital I/O communication with the process tool and the building management system (BMS), so collection status and alarms can be integrated into the fab’s monitoring system.
Modutek Corporation designs and builds custom chemical collection systems for semiconductor and research facilities. Every system is sized to your containers, chemistry, and throughput, then engineered, manufactured, and tested in-house in San Jose, California. To discuss your chemical handling needs or request a quote, contact Modutek.