About Modutek Corporation

Wet Process Equipment in Modutek's clean room

Originally founded in 1980, Modutek Corporation began manufacturing wet process equipment components for the fast growing Semiconductor industry. Our specialties included the high temperature quartz heated baths, sub-ambient filtration systems, nitride etch baths and rinsing systems. Our original market was selling both to end users and support OEM’s of wet bench process stations.


Engineering and Manufacturing working together

Addressing Environmental Issues

During the early 90’s environmental issues associated with the Semiconductor industry became a concern. To help support this growing market Modutek acquired Shannon Engineering and changed the name to Pollution Control Laboratories (PCL). The new environmental group was run as a Modutek subsidiary manufacturing air scrubbers, acid neutralization systems and chemical delivery systems. By the late 90’s Modutek dropped the subsidiary. From that point on these environmental systems were manufactured under the Modutek brand name.

Wet Process Equipment Station testingNew Technology Advancements

As new technology advancements were make in wet process equipment, Modutek acquired Sysmax Inc. in 2002 which gave us automation flexibility, the Vacuum Etch System (VES) and Spin Process System (SPS). Both systems were unique to the industry because the VES etched aluminum under vacuum and the SPS rotated two wafer carriers and transferred them between etch and rinse in a very small footprint. Sysmax was initially run as a Modutek subsidiary for two years. Now customers can purchase all equipment under Modutek’s Corporation name.


Modutek Corporation in San Jose, CAAdopting to Changing Market Conditions

Semiconductor wet process equipment manufacturers and the overall Tech Industry has weathered many downturns in business over the years. Since 2000, we have seen many of our OEM wet process bench manufacturers leave the industry. This gave Modutek the perfect opportunity to expand. With our complete background now in play, we have been able to position ourselves to become a turnkey wet bench manufacturing operation.

Providing Solutions to Meet Customer Needs

With each passing year, we have worked with our many existing and new customers to develop wet process equipment to meet their needs; Megasonic cleaning, IPA vapor dryer, fully automated wet bench stations for wafer fabrication to name just a few. Please see our Company Profile below. This will give you an overview of our company growth over the years and why you should consider Modutek Corporation for all of your clean room and facilities upgrades and equipment purchases.

Douglas Wagner -President & CEO of Modutek Corporation

Douglas Wagner -President & CEO of Modutek CorporationMr. Wagner has been in the semiconductor wet processing and chemical wet bench industry since 1981. He joined Modutek in 1987 and has been with the company for over 30 years. He has thorough knowledge of the manufacturing equipment and processes used in the integrated circuit (chip) industry. He also has a broad grasp of industry market trends, key players and customers. His honesty and practical approach in working with customers to provide effective and reliable high quality products and solutions has brought a growing number of loyal customers to Modutek.


Modutek’s Corporate Profile: