Automated Wet Bench and Wet Processing Systems
Fully-Automated Acid/Base Stations For Clean Room Applications
A fully automated wet bench system is a wet processing station that handles both wafer transfer and process sequencing through programmed recipes, with robotic handling executing each step automatically, without operator interaction between baths. A fully automated system is the right choice for high-throughput production environments where process repeatability, chemical-use accuracy, and the elimination of human error are the primary requirements.
Modutek’s automated wet bench systems are designed, assembled, and tested entirely in-house at the San Jose facility, with no outsourcing of robotic or software development. SolidWorks Simulation Professional and SolidWorks Flow Simulation are used to model process flow characteristics and calculate chemical dosage before manufacture. Systems handle both acid and solvent applications and accommodate all standard process sizes, from standard wafer carriers and glass substrates.
Automated Wet Bench Systems Designed and Built On-Site
Modutek’s engineers work directly with each customer to configure wet bench systems around specific process requirements. As device geometries shrink and component densities increase, precise control over process timing and chemical dosage becomes critical for maintaining yield. Full automation removes operator variability from the equation, ensuring that each wafer batch moves through the process sequence under identical controlled conditions.
Chemical waste tracking is built into the system, reducing usage and ensuring correct dosage according to the specific application. SolidWorks Flow Simulation models the process environment before manufacturing.
Systems Configured to Meet Specific Process Requirements
Standard equipment modules and software are customized for wet-bench processing, etching, or cleaning applications. All software is written in-house by Modutek’s software engineers. All robotic equipment is designed, assembled, and tested at Modutek’s San Jose facility using deionized water before shipment. Final acceptance testing is available at the facility, with after-sales support provided as standard.
Benefits
- In-house customization to meet specific customer process requirements
- Precise automated process execution with reliable batch-to-batch repeatability
- Improved yield and reduced process errors through the elimination of operator variability
- In-house robotic and software design with no outsourcing
- Complete design, assembly, and testing performed at one location
- Over 45 years of continuous operation with direct customer support
Standard Features
- FM4910 construction for acid and base process compatibility
- Available in any size and length to meet process requirements
- All stations wired per NFPA 70 and 79
- PLC with touchscreen and GUI
- Servo motors with encoder feedback
- Emergency Power Off (EPO) with mushroom button and full safety interlocks
- All process tanks with 1" lip exhaust
- Nitrogen head case purge with interlock
- Photohelic gauge with interlock to EPO
- PVC safety shields
- Teflon Nitrogen gun and DI water hand spray
- Continuous flow DI water manifold
- Casters and leg levelers
- Overhead deck lighting
- Three-color light tower
- One-year warranty on all parts
- One complete paperless manual included
Options
- Stainless steel construction for solvent applications
- Dry-to-dry process configuration
- Rear access design
- Data logging
- Resistivity monitoring and control
- All-Teflon plumbing
- Chemical management interface
- Third-party certification for NFPA 70 and 79
- SEMI standard, CE mark, and NEC certification available
- Seismic zone 4 structural certification
- Fan Filter Units (HEPA)
- Lift station integrated into bench
- Dedicated drains to carboy with DOT containment
- Fire suppression system
- Extended warranty available
Applications
- KOH Etching
- Ozone Etching
- Ozone Cleaning
- SC1 & SC2 featuring Megasonic Cleaning
- Precision Part Cleaning
- BOE (Buffered Oxide Etching)
- SPM Cleaning
- Plating
- Quartz cleaning
- All solvent applications
- Hot phosphoric (Nitride Etching)
Benefits
- In-house customization to meet specific customer process requirements
- Precise automated process execution with reliable batch-to-batch repeatability
- Improved yield and reduced process errors through the elimination of operator variability
- In-house robotic and software design with no outsourcing
- Complete design, assembly, and testing performed at one location
- Over 45 years of continuous operation with direct customer support
Standard Features
- FM4910 construction for acid and base process compatibility
- Available in any size and length to meet process requirements
- All stations wired per NFPA 70 and 79
- PLC with touchscreen and GUI
- Servo motors with encoder feedback
- Emergency Power Off (EPO) with mushroom button and full safety interlocks
- All process tanks with 1" lip exhaust
- Nitrogen head case purge with interlock
- Photohelic gauge with interlock to EPO
- PVC safety shields
- Teflon Nitrogen gun and DI water hand spray
- Continuous flow DI water manifold
- Casters and leg levelers
- Overhead deck lighting
- Three-color light tower
- One-year warranty on all parts
- One complete paperless manual included
Options
- Stainless steel construction for solvent applications
- Dry-to-dry process configuration
- Rear access design
- Data logging
- Resistivity monitoring and control
- All-Teflon plumbing
- Chemical management interface
- Third-party certification for NFPA 70 and 79
- SEMI standard, CE mark, and NEC certification available
- Seismic zone 4 structural certification
- Fan Filter Units (HEPA)
- Lift station integrated into bench
- Dedicated drains to carboy with DOT containment
- Fire suppression system
- Extended warranty available
Applications
- KOH Etching
- Ozone Etching
- Ozone Cleaning
- SC1 & SC2 featuring Megasonic Cleaning
- Precision Part Cleaning
- BOE (Buffered Oxide Etching)
- SPM Cleaning
- Plating
- Quartz cleaning
- All solvent applications
- Hot phosphoric (Nitride Etching)
Benefits
- In-house customization to meet specific customer process requirements
- Precise automated process execution with reliable batch-to-batch repeatability
- Improved yield and reduced process errors through the elimination of operator variability
- In-house robotic and software design with no outsourcing
- Complete design, assembly, and testing performed at one location
- Over 45 years of continuous operation with direct customer support
Standard Features
- FM4910 construction for acid and base process compatibility
- Available in any size and length to meet process requirements
- All stations wired per NFPA 70 and 79
- PLC with touchscreen and GUI
- Servo motors with encoder feedback
- Emergency Power Off (EPO) with mushroom button and full safety interlocks
- All process tanks with 1" lip exhaust
- Nitrogen head case purge with interlock
- Photohelic gauge with interlock to EPO
- PVC safety shields
- Teflon Nitrogen gun and DI water hand spray
- Continuous flow DI water manifold
- Casters and leg levelers
- Overhead deck lighting
- Three-color light tower
- One-year warranty on all parts
- One complete paperless manual included
Options
- Stainless steel construction for solvent applications
- Dry-to-dry process configuration
- Rear access design
- Data logging
- Resistivity monitoring and control
- All-Teflon plumbing
- Chemical management interface
- Third-party certification for NFPA 70 and 79
- SEMI standard, CE mark, and NEC certification available
- Seismic zone 4 structural certification
- Fan Filter Units (HEPA)
- Lift station integrated into bench
- Dedicated drains to carboy with DOT containment
- Fire suppression system
- Extended warranty available
Applications
- KOH Etching
- Ozone Etching
- Ozone Cleaning
- SC1 & SC2 featuring Megasonic Cleaning
- Precision Part Cleaning
- BOE (Buffered Oxide Etching)
- SPM Cleaning
- Plating
- Quartz cleaning
- All solvent applications
- Hot phosphoric (Nitride Etching)
Where Fully Automated Wet Bench Systems Are Used
KOH Etching
KOH etching requires tight temperature control and consistent immersion timing to produce repeatable anisotropic etch profiles in silicon wafers. Fully automated systems eliminate bath-to-bath transfer variability, making them well suited for production environments where KOH etch uniformity directly affects device yield.
SC1, SC2, and RCA Clean Sequences
The RCA clean sequence is a multi-step process that requires sequential immersion in SC1 and SC2 chemistries to remove particle, organic, and metallic contamination. Automated wet benches execute the full sequence under programmed recipe control, ensuring consistent dwell times, transfer intervals, and rinse cycles across every batch.
Ozone Cleaning and Ozone Etching
Ozone-based processes are used to remove organic contamination and prepare surfaces prior to gate oxide growth. Automated systems support both ozone cleaning and ozone etching workflows, maintaining the precise gas concentration and exposure timing required to achieve repeatable surface-conditioning results.
SPM Cleaning
Sulfuric acid and hydrogen peroxide mixture (SPM) cleaning, also known as piranha etch, is used to remove photoresist and organic contamination from wafer surfaces. The aggressive chemistry involved makes automated handling preferable over manual operation, as programmed sequencing reduces operator exposure and ensures consistent process execution.
Buffered Oxide Etch
Buffered oxide etch uses a hydrofluoric acid-ammonium fluoride mixture to selectively remove silicon dioxide. Automated systems provide the consistent transfer timing and chemistry control required for repeatable BOE results across high-volume production batches.
Hot Phosphoric Nitride Etching
Hot phosphoric acid etching is used to selectively remove silicon nitride layers in MEMS and semiconductor fabrication. The process requires precise temperature maintenance at elevated levels, typically above 150°C, and consistent immersion timing. Fully automated systems manage temperature regulation and transfer sequencing to maintain the process stability required for selective nitride removal.
Precision Parts Cleaning, Plating, and Quartz Cleaning
Automated wet bench systems support a range of additional applications including precision parts cleaning, electroplating, and quartz tube cleaning. Each application can be configured into a programmed recipe sequence, allowing the same platform to serve multiple process types within a single facility.
Modutek’s automated wet bench systems are customized as needed to meet your specific process requirements.
FAQs About Automated Wet Bench Systems
A fully automated wet bench executes both wafer transfer and process sequencing through programmed recipes with no operator intervention required between steps. A semi-automated system automates wafer transfer using robotics but relies on the operator to manage process parameters directly. Full automation is the correct choice for high-throughput production environments where batch-to-batch repeatability and elimination of human error are the primary requirements.
Yes. All Modutek automated wet bench systems are tested at the San Jose facility using deionized water prior to shipment. Final acceptance testing with customer sign-off is available, and all robotic and software development is completed in-house, ensuring that any adjustments required during acceptance can be made directly by Modutek’s engineering team.