Solvent Baths
A solvent bath is a temperature-controlled tank used in semiconductor wet processing to hold flammable solvents such as IPA, acetone, and resist strippers for cleaning, stripping, and other process steps. Because these solvents are flammable, the tank, heater, and enclosure have to meet explosion-proof electrical standards rather than the general-purpose construction used for baths holding non-flammable aqueous chemistries. Modutek offers two solvent bath series, the SFa Series, described as a recirculating bath, and the Sa Series, described as a constant temperature bath, each configured to the customer’s specific solvent, temperature range, and cassette requirements.
SFa Series
The Modutek SFa Series Stainless Steel Temperature Controlled Recirculating Bath is designed for all of your solvent applications. All solvent baths emphasize safety and meet Class 1 Div 1 Group D requirements. The SFa series can be installed in your new solvent station or easily retrofitted into your existing equipment. Please contact us so we can design the correct SFa Series for your application.
Benefits
- Designed for explosion proof applications (Class 1 Div 2)
- Custom sizes available
- Serrated overflow (SFa Series)
- Brick heater design allows for in-house repairs
- Double insulated
Features
- 316L material used on all inner tank modules
- All stainless-steel design (inner tank and outer housing)
- Electropolished
- 5-sided brick heaters for solvent and explosion-proof applications (Sa Series)
- 4- sided brick heaters for solvent and explosion-proof applications (SFa Series)
- Dual safety snap switches
- 15' Teflon-coated power cable with individual wires also Teflon coated
- Over-temp type J thermocouple
Specifications
- Applications: All solvents
- Solvents: IPA, Acetone, Resist Strippers
- Operating temperature range: 30 º – 100 ºC
- Process temperature control: ± 1 ºC (depends on controller and process)
- Heat-up rate: 2 º C per minute (rate affected by size of system, fluid, etc.)
Facility Requirements
- Electrical: 208VAC, 50 / 60 Hz, 1Ø (current requirements depends on bath size)
- Remote controller: Modutek C1915, or equivalent
Construction Materials
- Process Vessel: 316L Stainless Steel Electropolished
- Outer Housing: Stainless steel or FM4910 approved material
- Process thermocouple: Teflon encapsulated J-type
- Insulation: High density alumina silica fiber rated to 1260 º C
Options
- Liquid Level Sensor
- Stainless steel diffuser plate
- Process temperature controller
- Autolid
- Custom vessel sizes
Benefits of Sa Series Solvent Baths
Benefits
- Designed for explosion proof applications (Class 1 Div 2)
- Custom sizes available
- Serrated overflow (SFa Series)
- Brick heater design allows for in-house repairs
- Double insulated
Features
Features
- 316L material used on all inner tank modules
- All stainless-steel design (inner tank and outer housing)
- Electropolished
- 5-sided brick heaters for solvent and explosion-proof applications (Sa Series)
- 4- sided brick heaters for solvent and explosion-proof applications (SFa Series)
- Dual safety snap switches
- 15' Teflon-coated power cable with individual wires also Teflon coated
- Over-temp type J thermocouple
Specifications
Specifications
- Applications: All solvents
- Solvents: IPA, Acetone, Resist Strippers
- Operating temperature range: 30 º – 100 ºC
- Process temperature control: ± 1 ºC (depends on controller and process)
- Heat-up rate: 2 º C per minute (rate affected by size of system, fluid, etc.)
Facility Requirements
- Electrical: 208VAC, 50 / 60 Hz, 1Ø (current requirements depends on bath size)
- Remote controller: Modutek C1915, or equivalent
Construction Materials
- Process Vessel: 316L Stainless Steel Electropolished
- Outer Housing: Stainless steel or FM4910 approved material
- Process thermocouple: Teflon encapsulated J-type
- Insulation: High density alumina silica fiber rated to 1260 º C
Options
Options
- Liquid Level Sensor
- Stainless steel diffuser plate
- Process temperature controller
- Autolid
- Custom vessel sizes
Benefits
- Designed for explosion proof applications (Class 1 Div 2)
- Custom sizes available
- Serrated overflow (SFa Series)
- Brick heater design allows for in-house repairs
- Double insulated
Features
- 316L material used on all inner tank modules
- All stainless-steel design (inner tank and outer housing)
- Electropolished
- 5-sided brick heaters for solvent and explosion-proof applications (Sa Series)
- 4- sided brick heaters for solvent and explosion-proof applications (SFa Series)
- Dual safety snap switches
- 15' Teflon-coated power cable with individual wires also Teflon coated
- Over-temp type J thermocouple
Specifications
- Applications: All solvents
- Solvents: IPA, Acetone, Resist Strippers
- Operating temperature range: 30 º – 100 ºC
- Process temperature control: ± 1 ºC (depends on controller and process)
- Heat-up rate: 2 º C per minute (rate affected by size of system, fluid, etc.)
Facility Requirements
- Electrical: 208VAC, 50 / 60 Hz, 1Ø (current requirements depends on bath size)
- Remote controller: Modutek C1915, or equivalent
Construction Materials
- Process Vessel: 316L Stainless Steel Electropolished
- Outer Housing: Stainless steel or FM4910 approved material
- Process thermocouple: Teflon encapsulated J-type
- Insulation: High density alumina silica fiber rated to 1260 º C
Options
- Liquid Level Sensor
- Stainless steel diffuser plate
- Process temperature controller
- Autolid
- Custom vessel sizes
Model nomenclature: model code, number of cassettes and size of cassettes. eg. QFa26(QFa series-2-6”)
Note: Add approximately 4” for drain on overall depth
Sa Series
STAINLESS STEEL CONSTANT TEMPERATURE BATH
The Sa Series Stainless Steel Constant Temperature Bath is designed for all of your solvent applications. All solvent baths emphasize safety and meet class 1 div 2 requirements. The Sa Series can be installed in your new solvent station or easily retrofitted into your existing equipment. Please contact us so we can design the correct Sa Series for your application.
Benefits
- Improves process yield by faster, more efficient, and even heating
- Minimizes potential damage caused by runaway temperatures
- Improves uptime and reliability due to longer vessel life
Features
- Bonded 5-sided circuit heating element
- Redundant safety devices
- Seamless, sloped flange design
Specifications
- Application: All solvents
- Solvents: IPA, Acetone, Resist Strippers
- Operating temperature range: 30 º – 100 ºC
- Process temperature control: ± 1.0 ºC (depends on controller)
- Heat-up rate: 2 º C per minute (rate affected by size of system, fluid, etc.)
- One year warranty
Facility Requirements
- Electrical: 208-240 VAC, 50/60 Hz, 1ø, 7-20 amps (depending on model and voltage)
Construction Materials
- Process Vessel: Internally flame polished virgin fused quartz, boron-free
- Housing: Stainless steel or FM4910 approved material
- Process thermocouple: J-type Teflon® encapsulated
- Insulation: High density alumina silica fiber rated to 1260˚C
Options
- Magnetic stirrer
- Aspirator (dilution) valve system
- Gravity drain
- Remote operation timer switches
- Process Controller
Benefits
Benefits
- Improves process yield by faster, more efficient, and even heating
- Minimizes potential damage caused by runaway temperatures
- Improves uptime and reliability due to longer vessel life
Features
Features
- Bonded 5-sided circuit heating element
- Redundant safety devices
- Seamless, sloped flange design
Specifications
Specifications
- Application: All solvents
- Solvents: IPA, Acetone, Resist Strippers
- Operating temperature range: 30 º – 100 ºC
- Process temperature control: ± 1.0 ºC (depends on controller)
- Heat-up rate: 2 º C per minute (rate affected by size of system, fluid, etc.)
- One year warranty
Facility Requirements
- Electrical: 208-240 VAC, 50/60 Hz, 1ø, 7-20 amps (depending on model and voltage)
Construction Materials
- Process Vessel: Internally flame polished virgin fused quartz, boron-free
- Housing: Stainless steel or FM4910 approved material
- Process thermocouple: J-type Teflon® encapsulated
- Insulation: High density alumina silica fiber rated to 1260˚C
Options
Options
- Magnetic stirrer
- Aspirator (dilution) valve system
- Gravity drain
- Remote operation timer switches
- Process Controller
Benefits
- Improves process yield by faster, more efficient, and even heating
- Minimizes potential damage caused by runaway temperatures
- Improves uptime and reliability due to longer vessel life
Features
- Bonded 5-sided circuit heating element
- Redundant safety devices
- Seamless, sloped flange design
Specifications
- Application: All solvents
- Solvents: IPA, Acetone, Resist Strippers
- Operating temperature range: 30 º – 100 ºC
- Process temperature control: ± 1.0 ºC (depends on controller)
- Heat-up rate: 2 º C per minute (rate affected by size of system, fluid, etc.)
- One year warranty
Facility Requirements
- Electrical: 208-240 VAC, 50/60 Hz, 1ø, 7-20 amps (depending on model and voltage)
Construction Materials
- Process Vessel: Internally flame polished virgin fused quartz, boron-free
- Housing: Stainless steel or FM4910 approved material
- Process thermocouple: J-type Teflon® encapsulated
- Insulation: High density alumina silica fiber rated to 1260˚C
Options
- Magnetic stirrer
- Aspirator (dilution) valve system
- Gravity drain
- Remote operation timer switches
- Process Controller
Model nomenclature: model code, number of cassettes and size of cassettes. eg. Sa26(Sa series-2-6”)
Solvent Bath FAQs
1.What Is the Difference Between the SFa and Sa Solvent Bath Series?
The SFa Series is Modutek’s temperature-controlled recirculating bath, while the Sa Series is described as a constant-temperature bath. Both are stainless steel and built for solvent applications, but the recirculating design in the SFa Series is the primary distinction between the two, and the right choice typically comes down to the specific process and facility requirements for a given application.
2. Why Do Solvent Baths Require Explosion-Proof Construction?
Solvents such as IPA, acetone, and resist strippers are flammable, so any tank, heater, or electrical component that could act as an ignition source has to be designed and certified to prevent that risk. This is why solvent baths are built to explosion-proof electrical classifications rather than the standard construction used for baths holding non-flammable aqueous chemistries.
3. What Does a Class 1 Division Rating Mean for a Solvent Bath?
Class 1 Division ratings describe how much flammable vapor a piece of equipment is expected to be exposed to and how it has to be built to prevent ignition. Division 1 locations are where flammable vapor is expected under normal operating conditions, while Division 2 locations are where it’s present only under abnormal conditions, such as a leak or equipment failure. The rating determines the required level of electrical and enclosure design.
4.Why Does Heater Design Differ Between the SFa and Sa Series?
The SFa Series uses a brick heater design, which Modutek notes allows for in-house repairs rather than requiring a full heater replacement. The Sa Series uses a bonded circuit heating element instead. Heater design affects how a facility maintains the unit over its service life, not just how it heats, so it’s worth factoring into which series fits a given maintenance approach.
5. Can a Solvent Bath Be Used With Solvents Other Than IPA, Acetone, or Resist Strippers?
Modutek’s specification sheet lists IPA, acetone, and resist strippers as the applications for its solvent baths, but each unit is configured to the customer’s process, so a facility using a different solvent should confirm compatibility with Modutek before specifying a bath rather than assuming coverage based on the listed examples.
Request a Quote for Your Solvent Bath
Modutek designs and builds its SFa and Sa Series solvent baths in-house at its San Jose, California, facility, configuring tank size, heater design, and explosion-proof rating around each customer’s solvent, temperature range, and cassette requirements.
For help specifying an SFa or Sa Series bath for your process, contact us, and a member of the Modutek team will follow up.