Semi-Automated Wet Bench and Wet Processing Systems
Semi-Automated Acid/Base Stations for Clean Room Applications
Benefits of Modutek’s Semi-Automated Wet Processing Systems
- Precision Control for Enhanced Process Reliability
Modutek’s semi-automated wet benches allow users to maintain tight control over critical process parameters, such as chemical concentrations, temperature, and timing. This precision is vital for achieving consistent and repeatable results, making it an ideal solution for environments that demand reliability and accuracy in wet processing tasks. - Flexibility to Adapt to Evolving Requirements
The modular design of these systems supports a wide range of customization options, from chemical delivery modules to process tank configurations. This flexibility enables adaptation to specific experimental setups, production requirements, or safety standards, ensuring that the system can evolve as processes change. Whether experimenting with new materials in R&D or optimizing fabrication processes, Modutek’s systems provide the flexibility necessary to innovate.
Semi Automated Wet Processing System Video
- Improved Operator Control with Semi-Automated Features
Modutek’s systems offer user-friendly interfaces that allow operators to interact with the system more effectively, ensuring that critical adjustments can be made during operations. This balance between automation and manual intervention helps enhance control, particularly when unique or sensitive processes are being executed, without sacrificing safety or efficiency. - Cost-effective Solution with High Customizability
Modutek’s semi-automated systems are an economical solution compared to fully automated wet bench alternatives, which is ideal for teams working within budget constraints but still requiring high-quality, reliable wet processing systems. Customizable options allow for the systems to be tailored to the specific needs of different projects, ensuring that the investment yields a high return by precisely matching process demands. - Built-In Safety and Compliance Features
Safety is a critical concern in semiconductor manufacturing, especially in environments that handle hazardous chemicals. Modutek’s semi-automated systems incorporate stringent safety measures, including chemical containment and emergency shutoff protocols. These systems are designed to meet industry safety and environmental compliance standards, minimizing risk and ensuring safe operation. - Data Measurement and Process Monitoring
For professionals focused on process optimization and maintaining consistent results, Modutek’s semi-automated systems provide extensive data-tracking capabilities. These features support the analysis of process performance, helping to identify potential areas for improvement and maintaining process integrity over time.
Modutek’s semi-automated wet processing systems are the perfect choice for those seeking a solution that balances manual operation with the precision and consistency of automation—ensuring both innovation and efficiency for semiconductor fabrication.
Benefits
- Touchscreen automation control for repeatable process execution
- Servo motor automation with encoder feedback for precise wafer positioning
- All robotic and software design handled in-house with no outsourcing
- Cost-effective alternative to fully automated systems without sacrificing process control
Features
- FM4910 construction for acid and base process compatibility
- Available in any size and length to meet process requirements
- All stations wired per NFPA 70 and 79
- PLC with touchscreen and GUI
- Servo motors with encoder feedback
- Emergency Power Off (EPO) with mushroom button and full safety interlocks
- All process tanks with 1" lip exhaust
- Nitrogen head case purge
- Photohelic gauge with interlock to EPO
- PVC safety shields
- Teflon Nitrogen gun and DI water hand spray
- Continuous flow DI water manifold
- Casters and leg levelers
- One-year warranty on all parts
- One complete paperless manual included
Options
- FM4910 (PVC-C) material of construction for enhanced chemical resistance
- Rear access design
- Data logging
- Remote access maintenance
- Servo motor with pneumatics
- Third-party certification for NFPA 70 and 79
- SEMI standard, CE mark, and NEC certification available
- Seismic zone 4 structural certification
- Fan Filter Units (HEPA)
- Lift station integrated into the bench
- Dedicated drains to carboy with DOT containment
- Overhead deck lighting
- Three-color light tower
- Counterbalance safety shields
- Extended warranty available
Applications
- KOH Etching
- Developing
- Megasonic Cleaning
- BOE (Buffered Oxide Etching)
Benefits
- Touchscreen automation control for repeatable process execution
- Servo motor automation with encoder feedback for precise wafer positioning
- All robotic and software design handled in-house with no outsourcing
- Cost-effective alternative to fully automated systems without sacrificing process control
Features
- FM4910 construction for acid and base process compatibility
- Available in any size and length to meet process requirements
- All stations wired per NFPA 70 and 79
- PLC with touchscreen and GUI
- Servo motors with encoder feedback
- Emergency Power Off (EPO) with mushroom button and full safety interlocks
- All process tanks with 1" lip exhaust
- Nitrogen head case purge
- Photohelic gauge with interlock to EPO
- PVC safety shields
- Teflon Nitrogen gun and DI water hand spray
- Continuous flow DI water manifold
- Casters and leg levelers
- One-year warranty on all parts
- One complete paperless manual included
Options
- FM4910 (PVC-C) material of construction for enhanced chemical resistance
- Rear access design
- Data logging
- Remote access maintenance
- Servo motor with pneumatics
- Third-party certification for NFPA 70 and 79
- SEMI standard, CE mark, and NEC certification available
- Seismic zone 4 structural certification
- Fan Filter Units (HEPA)
- Lift station integrated into the bench
- Dedicated drains to carboy with DOT containment
- Overhead deck lighting
- Three-color light tower
- Counterbalance safety shields
- Extended warranty available
Applications
- KOH Etching
- Developing
- SC1 & SC2
- Megasonic Cleaning
- BOE (Buffered Oxide Etching)
Benefits
- Touchscreen automation control for repeatable process execution
- Servo motor automation with encoder feedback for precise wafer positioning
- All robotic and software design handled in-house with no outsourcing
- Cost-effective alternative to fully automated systems without sacrificing process control
Features
- FM4910 construction for acid and base process compatibility
- Available in any size and length to meet process requirements
- All stations wired per NFPA 70 and 79
- PLC with touchscreen and GUI
- Servo motors with encoder feedback
- Emergency Power Off (EPO) with mushroom button and full safety interlocks
- All process tanks with 1" lip exhaust
- Nitrogen head case purge
- Photohelic gauge with interlock to EPO
- PVC safety shields
- Teflon Nitrogen gun and DI water hand spray
- Continuous flow DI water manifold
- Casters and leg levelers
- One-year warranty on all parts
- One complete paperless manual included
Options
- FM4910 (PVC-C) material of construction for enhanced chemical resistance
- Rear access design
- Data logging
- Remote access maintenance
- Servo motor with pneumatics
- Third-party certification for NFPA 70 and 79
- SEMI standard, CE mark, and NEC certification available
- Seismic zone 4 structural certification
- Fan Filter Units (HEPA)
- Lift station integrated into the bench
- Dedicated drains to carboy with DOT containment
- Overhead deck lighting
- Three-color light tower
- Counterbalance safety shields
- Extended warranty available
Applications
- KOH Etching
- Developing
- SC1 & SC2
- Megasonic Cleaning
- BOE (Buffered Oxide Etching)
Where Semi-Automated Wet Bench Systems Are Used
KOH Etching
Potassium hydroxide (KOH) etching requires precise temperature control and consistent immersion timing to produce repeatable anisotropic etch profiles in silicon. Semi-automated systems are well-suited for KOH etching because the robotics ensures consistent wafer handling from bath to bath while the operator monitors and adjusts process parameters directly.
SC1, SC2, and RCA Clean Sequences
The RCA clean sequence uses SC1 and SC2 chemical steps to remove organic, metallic, and oxide contamination from wafer surfaces before critical process steps. Semi-automated wet benches support these multi-step cleaning sequences by automating wafer transfers between baths, reducing handling time and contamination risk while maintaining operator control over chemistry and timing.
Buffered Oxide Etch
Buffered oxide etch (BOE) uses a hydrofluoric acid and ammonium fluoride mixture to selectively remove silicon dioxide from wafer surfaces. Semi-automated systems provide the consistent transfer timing required for repeatable BOE results across batches, making them a reliable choice for both production and development environments.
Megasonic Cleaning
Megasonic cleaning uses high-frequency acoustic energy to dislodge sub-micron particles from wafer surfaces without mechanical contact. Semi-automated wet benches support megasonic cleaning integration, combining automated wafer transfer with the acoustic cleaning step as part of a broader wet process sequence.
Photoresist Development
Photoresist development is a critical step in photolithography, requiring precise control over developer chemistry, temperature, and immersion time to achieve consistent pattern resolution. Semi-automated systems provide the process control and repeatability needed for development steps in both R&D and low-to-mid volume production environments.
Modutek’s semi-automated wet processing systems can be customized as needed to meet your specific wet process requirements.
FAQs About Semi-Automated Wet Bench Systems
A semi-automated wet bench uses robotics to move wafers between chemical baths while the operator directly controls process parameters. A fully automated wet bench handles both wafer transfer and process sequencing through programmed recipes with minimal operator intervention. Semi-automated systems are a cost-effective middle ground for facilities that need consistent wafer handling but prefer hands-on process control over full recipe automation.
A PLC, or Programmable Logic Controller, is the control system that manages the automated functions of the wet bench, including robotic transfer sequencing, safety interlock monitoring, and process timing. On semi-automated systems, the PLC is paired with a touchscreen GUI that gives operators real-time visibility and control over the process without requiring manual programming expertise.
Servo motors with encoder feedback allow the robotic transfer arm to position wafers with high repeatability and precision. Unlike pneumatic systems, servo-driven arms can be programmed for variable speed and positioning, which reduces wafer stress during transfer and improves consistency across process cycles, particularly for fragile or thin wafers.