Temperature Control Circulator
RCe Series Temperature Control Circulator: Precision Engineering for Advanced Semiconductor Processes
How the RCe Series Temperature Control Circulator Works
The RCe Series uses a network of components that continuously monitor system status, paired with the stainless steel fluid path noted above, to deliver consistent, repeatable temperature control for demanding wet processing applications. The design prioritizes both safety and uptime, with monitoring and material compatibility built in rather than added on.
Reliability and Easy Maintenance
- Continuous system monitoring ensures uninterrupted operation
- Designed to reduce maintenance requirements and improve operational efficiency
- All-stainless steel fluid path prevents corrosion, compatible with DI water and aggressive chemicals
- Compact design (20.5″ x 25″ x 15.25″) maximizes cleanroom space efficiency
Safety-First Engineering
- Comprehensive safety features integrated into every aspect of the system
- Compliant with industry safety standards, minimizing operational risks
- Materials in the circulator are chemically compatible with the substances used in wet processes
Precision Temperature Control
- Achieves temperature stability within ±0.1°C
- Supports a wide range of wet processing applications
- Adaptable to specific semiconductor fabrication needs
User-Friendly Operation
- Intuitive interface for easy setup and monitoring
- Quick-access design for effortless maintenance
Benefits
- Di water compatible, no corrosion
- Environmentally friendly
- Internationally accepted
- Easy confirmation of system status, reduced troubleshooting time
- Ease of maintenance with no fuses to replace
Features
- Stainless Steel fluid path
- CFC Free refrigerant (134A Freon)
- SEMI S2-93 & CE compliant
- User friendly status display
- Independent circuit breaker protection
System Specifications
- Heating Capacity: standard-1500W(other sizes available upon request)
- Cooling Capacity: standard – 1/4hp(other sizes available upon request)
- Stainless Reservoir with plastic as an option
- Accuracy: 0.2ºC – depending on controller
- Reservoir fill: Top of unit
- Dimensions: 20.5” (l) x 25” (w) x 15.25” (h)
Facility Requirements
- Electrical: 120VAC, 50/60Hz, 10, 20A (option : 208VAC, 4-wire Circuit)Rating for standard RCe025-1500)
- Circulating fluid: ½” FNPT inlet/outlet
- Remote controller: Modutek C21b or equivalent
Construction Materials
- Housing: Gray powder epoxy coated 16ga mild steel.
- Fluid Path: Tubing and Fittings- Stainless Steel(option: all polypropylene)
- Pump – Polypropylene
Applications
- Constant temperature baths (F series)
- Etching, Plating, and Developing
FAQ's about Temperature Controlled Circulators
1. What Is Wet Process Temperature Control?
Wet process temperature control refers to the precise regulation of temperatures in chemical baths or solutions used during semiconductor manufacturing processes. It ensures that chemical reactions proceed under optimal thermal conditions, which is critical for achieving consistent, high-quality results in cleaning, etching, or deposition steps. The temperature control circulators Modutek provides deliver +/-0.5°C temperature control in sub-ambient etch applications. HF and BOE applications require precise temperature control to prevent over-etching. Modutek’s temperature control circulator provides precise control within a temperature range of 15°C to 23°C.
2. Can Wet Processing Temperature Control Systems Be Customized to Accommodate Specific Chemical and Process Parameters for Experimental Needs?
Wet processing temperature control systems can be customized to meet the unique process and chemical requirements used in semiconductor manufacturing. Modutek’s temperature control circulator is a sub-ambient control system that delivers precise temperature control in the 15°C to 23 °C range. If your process requirement is within this range, Modutek’s system can be used in the process bath to meet your process specifications.
3. Are Wet Process Temperature Control Systems Compatible with Various Chemicals and Materials Used in Semiconductor Wet Processing Experiments?
Wet process temperature control systems use all-stainless-steel fluid paths, ensuring corrosion resistance and compatibility with a wide range of aggressive chemicals commonly used in semiconductor wet processing. Modutek’s temperature-control circulator uses an inline Teflon heat exchanger to provide precise temperature control. The Teflon heat exchanger can interface with most semiconductor processes.
4. How Precise Is the Wet Processing Temperature Control System for Conducting Highly Sensitive, Repeatable Experiments?
Modutek temperature control circulators provide exceptional precision, maintaining temperature stability within ±0.1°C. This ensures sensitive processes and experiments requiring high repeatability run reliably and accurately.
5. What Safety Measures Are Incorporated in a Temperature Control Circulator to Handle Temperature-Sensitive Chemicals and Prevent Accidents?
Modutek’s systems include multiple safety features, such as over-temperature alarms, inline flow sensors, continuous monitoring, and fail-safe mechanisms, to prevent overheating and manage hazardous conditions effectively. These safeguards protect both operators and equipment.
6. How Easy Is a Temperature Control System to Operate, and What Level of Maintenance Is Required to Minimize Downtime?
Modutek’s circulators are designed for user-friendly operation, with intuitive controls and automated functions for easier use. The systems require minimal maintenance, and Modutek offers comprehensive customer support and service plans to reduce downtime and ensure seamless operation.
Request a Quote for a Temperature Control Circulator
Modutek has designed and built semiconductor wet processing equipment in San Jose, California, since 1980, including the RCe Series Temperature Control Circulator used across chiller/heater applications requiring precise, repeatable results.
Contact Modutek’s engineering team to discuss your process temperature range and chemical compatibility requirements.