Stainless Steel Wet Bench Systems
Stainless Steel Solvent Stations for Semiconductor and Clean Room Applications
A stainless steel wet bench system is a solvent-rated process station built from 304 stainless steel, designed for wet processing applications where polypropylene construction is not chemically compatible. Stainless steel is the correct material choice for processes involving flammable or aggressive solvents such as acetone, IPA, or photoresist-stripping chemistries, where acid-rated plastics would degrade or pose a fire risk.
Modutek’s stainless steel wet bench systems are available in fully automated, semi-automated, manual, and dry-to-dry configurations. Each station is designed, assembled, and tested in-house at Modutek’s San Jose facility. Final acceptance testing is performed using DI water prior to shipment.
Stainless Steel Solvent Stations for clean room applications
Benefits
- 304 stainless steel construction rated for solvent process compatibility
- Fire suppression integrated into solvent station design
- Complete design, assembly, and testing performed at one location with limited outsourcing
- Over 45 years of continuous operation and field-proven reliability
- SolidWorks Flow Simulation is used to model process flow characteristics before manufacturing
- SolidWorks Simulation Professional is used for structural and thermal analysis
Features
- 304 stainless steel material of construction throughout
- Available in any size and length to meet process requirements
- All stations wired per NFPA 70 and 79
- Station built for Class 1 Div 2
- Emergency Power Off (EPO) with mushroom button and full safety interlocks
- All solvent tanks are equipped with a 1" lip exhaust
- Nitrogen head case purge with interlock
- Photohelic gauge with interlock to EPO
- Boltron safety shield material
- Teflon Nitrogen gun and DI water hand spray
- Continuous flow DI water manifold
- Overhead deck lighting
- All-Teflon plumbing
- Casters and leg levelers
- One-year warranty on all parts
- One complete paperless manual included
Options
- PLC with touchscreen GUI
- Servo motors with encoder feedback
- Ultrasonic energy
- Rear access design
- Data logging
- Online support
- Resistivity monitoring and control
- Chemical management interface (delivery or collection)
- Third-party certification for NFPA 70 and 79
- SEMI standard, CE mark, and NEC certification available
- Seismic zone 4 structural certification
- Fan Filter Units (HEPA)
- Lift station integrated into the bench
- Dedicated drains to carboy with DOT containment
- Three-color light tower
- Extended warranty available
Applications
- Acetone
- IPA
- Photo Resist Striping
- EDP
Benefits
- 304 stainless steel construction rated for solvent process compatibility
- Fire suppression integrated into solvent station design
- Complete design, assembly, and testing performed at one location with limited outsourcing
- Over 45 years of continuous operation and field-proven reliability
- SolidWorks Flow Simulation is used to model process flow characteristics before manufacturing
- SolidWorks Simulation Professional is used for structural and thermal analysis
Features
- 304 stainless steel material of construction throughout
- Available in any size and length to meet process requirements
- All stations wired per NFPA 70 and 79
- Station built for Class 1 Div 2
- Emergency Power Off (EPO) with mushroom button and full safety interlocks
- All solvent tanks are equipped with a 1" lip exhaust
- Nitrogen head case purge with interlock
- Photohelic gauge with interlock to EPO
- Boltron safety shield material
- Teflon Nitrogen gun and DI water hand spray
- Continuous flow DI water manifold
- Overhead deck lighting
- All-Teflon plumbing
- Casters and leg levelers
- One-year warranty on all parts
- One complete paperless manual included
Options
- PLC with touchscreen GUI
- Servo motors with encoder feedback
- Ultrasonic energy
- Rear access design
- Data logging
- Online support
- Resistivity monitoring and control
- Chemical management interface (delivery or collection)
- Third-party certification for NFPA 70 and 79
- SEMI standard, CE mark, and NEC certification available
- Seismic zone 4 structural certification
- Fan Filter Units (HEPA)
- Lift station integrated into the bench
- Dedicated drains to carboy with DOT containment
- Three-color light tower
- Extended warranty available
Applications
- Acetone
- IPA
- Photo Resist Striping
- EDP
Benefits
- 304 stainless steel construction rated for solvent process compatibility
- Fire suppression integrated into solvent station design
- Complete design, assembly, and testing performed at one location with limited outsourcing
- Over 45 years of continuous operation and field-proven reliability
- SolidWorks Flow Simulation is used to model process flow characteristics before manufacturing
- SolidWorks Simulation Professional is used for structural and thermal analysis
Features
- 304 stainless steel material of construction throughout
- Available in any size and length to meet process requirements
- All stations wired per NFPA 70 and 79
- Station built for Class 1 Div 2
- Emergency Power Off (EPO) with mushroom button and full safety interlocks
- All solvent tanks are equipped with a 1" lip exhaust
- Nitrogen head case purge with interlock
- Photohelic gauge with interlock to EPO
- Boltron safety shield material
- Teflon Nitrogen gun and DI water hand spray
- Continuous flow DI water manifold
- Overhead deck lighting
- All-Teflon plumbing
- Casters and leg levelers
- One-year warranty on all parts
- One complete paperless manual included
Options
- PLC with touchscreen GUI
- Servo motors with encoder feedback
- Ultrasonic energy
- Rear access design
- Data logging
- Online support
- Resistivity monitoring and control
- Chemical management interface (delivery or collection)
- Third-party certification for NFPA 70 and 79
- SEMI standard, CE mark, and NEC certification available
- Seismic zone 4 structural certification
- Fan Filter Units (HEPA)
- Lift station integrated into the bench
- Dedicated drains to carboy with DOT containment
- Three-color light tower
- Extended warranty available
Applications
- Acetone
- IPA
- Photo Resist Striping
- EDP
Where Stainless Steel Wet Bench Systems Are Used
Photoresist Stripping and Solvent Cleaning
Photoresist stripping processes use solvents like acetone and IPA that are incompatible with standard polypropylene wet bench construction. Stainless steel stations are specified for these applications because the material withstands solvent exposure without degradation and can be configured with fire suppression systems and N2 purge interlocks to meet cleanroom safety requirements.
EDP and Anisotropic Etching
Ethylenediamine pyrocatechol (EDP) is an anisotropic etchant used in MEMS and silicon microfabrication. It requires precise temperature control and chemically resistant construction. Stainless steel wet benches provide the thermal stability and material compatibility required for controlled EDP processes in both research and production environments.
Semiconductor Fabrication Facilities
Semiconductor fabs and research facilities handling solvent-based process steps require stations that meet NFPA 70 and 79 wiring standards, seismic zone 4 structural certification, and SEMI compliance. Modutek stainless steel systems are available with third-party certification for all of these standards, making them suitable for regulated production environments.
Modutek’s Stainless Steel Wet Bench Systems can be customized to meet your specific wet-process requirements.
Common questions about stainless steel wet bench systems
Polypropylene is the standard construction material for acid- and base-wet-bench applications, but it is not compatible with flammable solvents such as acetone and IPA. Stainless steel provides the chemical resistance and structural integrity required for solvent processes, and supports the integration of fire suppression and nitrogen purge systems needed for safe operation.
A dry-to-dry wet bench system moves wafers through the full process sequence, from the initial dry state through all wet chemical steps, and returns them dry at the end without requiring a separate drying station. This reduces handling steps, minimizes the risk of contamination, and improves throughput.
An Emergency Power Off (EPO) interlock is a safety system that cuts power to the station instantly when a hazardous condition is detected, such as a drop in exhaust airflow monitored by the photohelic gauge. At solvent stations, this is a critical safety feature because it prevents the accumulation of solvent vapor that could create a fire or explosion risk.
Yes. Modutek stainless steel wet bench systems are available with third-party certification for NFPA 70 and 79, SEMI standards, CE mark, NEC, and seismic zone 4 structural requirements, making them suitable for regulated fabs and research institutions with compliance mandates.