Why Megasonic Cleaning is Essential for Silicon Wafer Processing
Adding Megasonic cleaning to standard wafer cleaning methods can reduce costs and improve overall semiconductor fabrication performance. Megasonic cleaning is especially useful for manufacturing silicon wafers with the smallest geometries, where almost complete particle removal is necessary for successful manufacturing. The process uses high-frequency sound waves to clean wafer surfaces and can be integrated into […]
How High Temperature Quartz Tanks Improve Silicon Wafer Processing
The silicon wafer processing steps that include etching or cleaning the wafers with aggressive chemicals require tanks to hold the chemical process. Quartz tanks are impervious to the acids and bases used in wet process stations and the high temperature tanks can include heating and re-circulating. Modutek is a leader in the design and manufacture […]
How Quick Dump Rinsers Improve Silicon Wet Etching Results
Manufacturing lines in semiconductor fabrication facilities and research labs use corrosive chemicals to clean and etch silicon wafers. Depending on the semiconductor product, a silicon wafer may undergo multiple steps in baths containing chemicals such as hydrochloric acid or hydrogen peroxide. When the cleaning or etching process in a particular fabrication step is complete, the […]
Improving Wafer Processing with Automated Equipment
Fully and semi-automated wafer processing equipment can help improve wafer output quality by providing consistent chemical processing dosages and timing, however these settings must be first be determined. One way to find optimal process settings is to operate in manual and then in semi-automated mode where settings can easily be adjusted. This is especially true […]