Modutek

Wet Bench Manufacturer | Wet Process Equipment | Modutek

Why Stainless-Steel Stations Are Needed for Solvent Processing

why-stainless-steel-stations-are-needed-for-solvent-processing-300x300

During silicon wafer fabrication, BEOL (Back End of Line) processes may require solvent-based stations to ensure compatibility with semiconductor manufacturing steps. FEOL (Front End of Line) acid-based chemistry may not be suitable for BEOL finishing. Instead, stainless-steel stations with solvents such as acetone, IPA (Isopropyl Alcohol) or EDP (Ethylenediamine Pyrocatechol) complete wafer etching, stripping, and […]