Tag Archives: wafer processing equipment

How Quartz Baths Are Used in a Manufacturing Process

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How Quartz Baths Are Used in a Manufacturing ProcessThe manufacture of semiconductor components requires the cleaning, stripping and etching of semiconductor wafers using corrosive chemicals in a tightly controlled environment. Two important factors for achieving improved yields of functional components are keeping the bath free from contaminants and accurately controlling the temperature. High quality quartz baths fulfill these requirements with a tank material that is impervious to the chemicals used in the baths and that facilitates fast even heating by conducting heat efficiently. A well-designed quartz bath is the most effective solution for processing semiconductor wafers in chemicals such as sulfuric or hydrochloric acids, even at elevated temperatures.

Important Characteristics of Quartz Baths

To process semiconductor wafers effectively, quartz baths must be well designed and be made of quality materials. To avoid introducing unwanted impurities into the process the bath must be made of quartz of the highest purity. It must be available in a variety of sizes and heat up rapidly, featuring tight temperature control. Operation must be safe and reliable, ideally based on extensive experience in the design and supply of these products.

Modutek Recirculating Quartz Baths

The Modutek Series QFa quartz baths are high temperature recirculating units manufactured to the highest quality standards. Modutek has over thirty years experience in designing quartz baths and the company uses the expertise acquired with this evolution to offer the best in the industry. Key qualities resulting from this evolutionary process are safety, reliability and low cost of ownership.

For its recirculating quartz baths, Modutek uses semiconductor grade flame polished quartz to keep potential contamination to a minimum. The baths feature fast, even heating and a seamless, sloped flanged design that helps ensure safe operation. Temperatures in the range of 30 to 180 degrees C. can be controlled to plus/minus 1 degree C. and the heat-up rate can be up to 2 degrees C. per minute. Bath sizes range from 7.75 x 7.75 x 9 inches to 21.50 x 11.50 x 10.50 and 17.87 x 10.75 x 14.50 inches while custom sizes are available as well.

Modutek Constant Temperature Quartz Baths

With many of the same quality and operating features as the QFa models, the quartz baths of Modutek Qa series meet the same goals of high safety and reliability combined with a low cost. The process vessel is made of internally flame polished virgin fused quartz, boron-free, and the baths have the same accurate temperature control of 1 degree C. with a heat-up rate of 2 degrees C. per minute. Options include a magnetic stirrer, a quartz bubbler and remote operation timer switches and available sizes are similar to those for the recirculating baths. Modutek quartz baths can be used with confidence to improve semiconductor processing performance.

If you need help selecting quartz baths to use with your manufacturing process, contact Modutek at 866-803-1533 or email [email protected].

Wet Bench Ergonomics and Safety

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Wet Bench Ergonomics and SafetyImplementing ergonomic engineering principles to reduce operator strain and effort can increase safety and help prevent accidents. Established safety guidelines such as those of the Semiconductor Equipment and Materials International (SEMI), the “SEMI S8-0712 – Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment,” can help manufacturers design their installations accordingly. Such designs make it easy for operators and technicians to reach controls and work with semiconductor wafers. Modutek follows these guidelines and has included specific features in their wet benches and other equipment to allow for ergonomic and safe operation. In addition, when dealing with specific customer requirements or retrofitting existing installations, Modutek can develop customized ergonomic solutions.

Swing Arm Interface Mount

When technicians have to monitor a process or operate tools when troubleshooting they must be able to see the operator interface and input commands safely and ergonomically without stretching or assuming unnatural positions. The normal resting location of the interface is to the side and out of the way. The swing arm allows operators to pull the interface out and over so it is visible and within reach when they are monitoring the process or handling tools.

The swing arm can rotate on three axes and tilt to let operators place it in any desired position. Once the operator pulls the interface into place and orients it in an optimal way, a single push button actuates pneumatic locking by pressing two large bearings together, preventing further movement. With this rigid and low bounce design, the interface can be positioned with one hand, and the design eliminates further movement such as might result from the operation of the touch screen.

Its epoxy powder coating and anodized aluminum finish together with its internal cabling make the swing arm easy to clean with low particulate generation for clean room applications. The fact that one technician can place the arm into a convenient position and lock it with one hand means that a second person to assist with the operations is often not required.

Easy to Load Wafer Holding Devices

The impact of safe and ergonomic design increases greatly when applied to operations that have to be carried out regularly and frequently. When wafer trays and holding devices are designed to make it easy for operators and technicians to use them, even small improvements in ergonomic design can make a big difference in both productivity and safety.

In Modutek wet benches, robot arms move the wafer holding trays to the front of the station to a position optimally located for easy and effortless loading and unloading. Modutek applies such ergonomic design principles to wet bench access for increased safety of operators and technicians working in semiconductor fabrication facilities and research labs.

Ergonomically Designed Upgrades and Customization

When a facility is upgraded or additional equipment is retrofitted, standard ergonomic designs may not meet the needs of the completed installation. Equipment that fully satisfies ergonomic design principles on its own may be difficult to operate when placed in specific configurations. Modutek can apply the company’s experience with ergonomic design to customize installations, ensuring that a customer’s specific ergonomic requirements are met and that the installation as a whole is easy and safe for operators and technicians.

Modutek processing stations are available in a wide variety of configurations and the company works with the customer’s engineering team to custom design the best processing equipment for the particular application. The ergonomic engineering required to ensure easy and safe operation is integrated in these designs and guides the company when customizing their equipment for specialized needs.

If you need help selecting or upgrading wet bench equipment for your application and have specific ergonomic requirements, contact Modutek at 866-803-1533 or email [email protected].

How Technology Manufacturers Use Chemical Delivery Systems

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How-Chemical-Delivery-Systems-are-Used-by-Technology-Manufacturers

Technology manufacturing requires the safe handling of chemicals as well as their delivery in accurate amounts. Corrosive chemicals are used for etching, cleaning and plating materials such as silicon chips, metal parts, solar system components and printed circuit boards. The chemicals have to be stored securely, delivered to the process in precise amounts, and neutralized before disposal. Automated chemical delivery systems reduce waste and operator error while allowing the supply of defined amounts of each chemical with a high degree of precision.

Technology manufacturers use these systems to supply chemicals to wet processing equipment. Acids are used to etch away layers of material on wafers of silicon, printed circuit boards or other substrates. Sections of the layers to be etched are covered in protective material and are not removed by the etching. In this way microscopic structures and conducting paths can be created. The requirements for chemical delivery systems depend on the application of the wet processing equipment and on the chemicals to be used.

The key to supplying effective chemical delivery systems is a flexible approach combined with the ability to develop systems customized to meet the needs of the manufacturer. Companies that manufacture silicon wafers have different requirements from those that manufacture micro-electro-mechanical systems, hard disk drives or solar cells. The cleaning and etching processes of different technology manufacturers use various chemicals and widely varying amounts and process control strategies. Their chemical delivery systems must be resistant to corrosion, be safe to operate, allow the storage of large amounts of chemicals and include flexible software to control distribution. An equipment supplier has to have a good understanding of the processes involved so that they can standardize the parts of the system that can remain the same while developing custom solutions to match the needs of each technology manufacturer.

Modutek specializes in designing and manufacturing systems that provide outstanding performance and reliability with the ability to be highly customizable. The systems incorporate user-friendly features that promote safe and cost-effective operation. In a typical custom application, water use, and the number of defective parts produced is reduced while consistency of results increases.

Modutek’s chemical delivery systems feature all Teflon fluid paths, double containment cabinet construction, leak detection and chemical level sensing. Double wall plumbing and system data logging are available. Chemical storage can be in large tote chemical containers or 55-gallon drums close to the wet process station. Manufacturers that use different chemicals can improve throughput because the Modutek’s systems are designed for quick chemical change.

The software that automates a chemical delivery system is a key factor in the system’s flexibility and Modutek can customize the software to meet the needs of the technology manufacturer. Typically a touch screen shows error messages on start-up and then displays a flow diagram showing the status of key components such as metering pumps, valves and level switches. Since these may be different for particular customized applications, the software must be easily adaptable. All the software for Modutek’s chemical delivery systems is written in house. This means that Modutek has the in house expertise and capability to make changes in the software as needed and can provide excellent technical support without having to rely on exterior sources.

The Modutek chemical delivery systems are suitable for any technology manufacturer application. They are specifically designed for easy customization and provide reliable, cost-effective operation. For additional information about Modutek’s Chemical Delivery Systems or related products call 866-803-1533 or email [email protected]

How the IPA Vapor Dryer Improves Wafer Processing Time

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How the IPA Vapor Dryer Improves Wafer Processing TimeImproving silicon wafer processing time and yields in a consistent and repeatable process is an on-going need among semiconductor manufacturers. Modutek’s customizable IPA Vapor Dryer design addresses the needs of facilities and process engineers who are constantly looking for ways to improve their manufacturing process. Modutek partners with your engineers to build an IPA Vapor Dryer that matches your specific requirements using SolidWorks Flow Simulation and Simulation Professional software. This system provides improved operations and drying time with one or two 150-450mm cassettes or glass substrates. For reliable performance, Modutek does not outsource the design and manufacturing of their wafer processing equipment. Equipment design, assembly, and DI water testing all occur on-site at our San Jose facility.

IPA Vapor Dryer Design

Combine rinsing and drying chambers using the Modutek IPA Vapor Dryer. This Marangoni drying system uses a single chamber to simplify the final stages in your cleaning process. Choose a freestanding cabinet or seamless integration into your current wet bench. Surface tension drying with stationary parts perfectly accommodates modern, flat substrates. In addition, potential wafer breakage and damage are essentially eliminated. This advanced system serves as your one-stop shop for IC, solar cell, fuel cell, MEMS and disk drives.

System Advantages

The IPA Vapor Dryer achieves high throughput with a variety of features and benefits. For maximum yield, our systems eliminate watermarks on substrates and hydrophilic/hydrophobic films with no feature damage. The system also provides 15-minute batch drying for most applications. In addition there is a secure system interface bottle change for quick, deck-level operations. Here, one-gallon IPA containers fill under level sensor protection. IPA consumption decreases through even vapor distribution at the top of the chamber.

Additional safety features include:

  • Overtemp protection on all heated devices
  • Teflon tubing for all wet plumbing
  • High/low flow cascade rinse
  • Touch screen interface

Optional features include:

  • Dump rinse
  • Resistivity monitor

Reliable Silicon Wafer Processing Equipment

Optimizing wafer production processes for over 30 years, Modutek supplies industry-trusted, custom wet processing equipment. Our experienced engineers and system integration specialists configure stations and software to minimize existing wet bench alterations and meet company-specific requirements. For extended customer satisfaction, all IPA Vapor Dryer stations come with a 2-year warranty. If malfunction occurs, we provide onsite service repair to minimize costs and potential production loss.

Call 866-803-1533 or email [email protected] to get answers to any questions about your specific requirements. Our team is ready to provide you with the right wafer processing equipment and support you need.

Wafer Processing Equipment That Meets Your Specific Requirements

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Wafer Processing Equipment That Meets Your Specific RequirementsSemiconductor manufacturers and research facilities need to use wafer processing equipment that guarantees consistent results for continually shrinking geometries used in integrated circuits. From LED to solar panel production, semiconductor wafers require durable wet bench stations designed by the most advanced technology. Fortunately, Modutek Corporation utilizes industry-leading methods to design and manufacture silicon wafer processing equipment. They provide the experience and expertise needed to supply equipment that meets the specific requirements of process and facilities engineers across medical, military, solar, and industrial industries.

Wet Processing Manual Stations

Execute every clean room process with cost-efficient manual stations. Modutek constructs and configures stations to support base and acid applications with the utmost care. In fact, they match or surpass current safety standards and use industrial-strength polypropylene material for secure, long-lasting machines.

Semi-Automated Wet Bench Stations

Incorporate semi-automated wafer processing equipment into all your clean room applications to balance precision and control. Modutek utilizes touch screen controls, servo motor robots, and three degrees of flexibility to provide complete turnkey support for companies that want a lower cost alternative from the fully-automated station. SolidWorks Simulation Professional and Flow Simulation Software remain developed in-house for seamless compatibility.

Fully-Automated Wet Bench Stations

Reduce machine intervention with convenient, fully-automated wet bench stations. For increased throughput and company efficiency, there’s no better choice. From design to installation, we meet your specific requirements in both station size and software. Enjoy standard features such as PVC safety shields, Emergency Power Off (EPO), and a 12-month warranty on all station parts. Optional features include:

  • Rear access
  • Stainless steel construction
  • Complete Teflon plumbing
  • Overhead deck lighting
  • CO2 fire suppression

The Rotary Wafer Etching System

Etch, develop, strip, and clean with the Rotary Wafer Etching System for efficient batch processing. The space-saving, dual wet tank construction enables a 3 second transfer from process to rinse. In addition, continuous rotation reaches speeds up to 80 revolutions per minute. Multiple wafer sizes remain easily manageable in a freestanding design.

Silicon Wafer Cleaning Equipment

Serving engineers across numerous silicon wafer dependent industries for over 30 years, Modutek specializes in all types of wafer processing equipment. Our certified specialists configure every detail to match your specific processing needs. In the event of malfunction, we prevent the hassle of business interruptions and shipping costs by supplying onsite service repair.

Email [email protected] or call 866-803-1533 to receive immediate, trustworthy assistance. Our team stands by for your company support. We’ll supply additional information, answer any design or installation inquiries, and provide a free quote.

Modutek’s DR Series Quick Dump Rinser

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Modutek Quick Drump Rinser DR Series

Modutek’s DR Series Quick Dump Rinser

Throughout wafer manufacturing, few steps are as critical as the D.I. (deionized water) rinse cycle. In most cases, your product is exposed to more D.I. water than any other process fluid. For this reason, a truly effective rinsing system can contribute dramatically to the reduction of particles and defect densities. A considerable amount of time has been given to help you make this transaction into our DR series quick dump rinser easy and affordable. Whether it’s upgrading your existing rinsing line or installing new wet process station we have the plan that will work best for you.

Our overall DR series Quick Dump Rinser is designed with two major features. One: Easy installation into new or used equipment and two: Low DI water consumption due to our rinse features.

Modutek's Quick Dump Rinser during the spray cycleSuperior and consistent rinsing is achieved by (1) strategically located D.I water spray nozzles, (2) bottom filling (3) N2 agitation and (4) bottom fill that creates a vortex agitation in the rinse tank (optional).

The interior volume of the DR Series Quick Dump Rinser was reduced to minimum size relative to the wafer cassette. This, along with a 360˚ overflow weir and rapid dump time ensures that all large and small contaminants are quickly removed from the surface of the wafer and surrounding areas, thereby preventing recontamination of the wafer.

Modutek C15sa Rinser Controller is used in conjunction with the Quick Dump RinserModutek’s C15sa Rinser Controller is specifically designed for use with the DR Series Quick Dump Rinser wafer rinse system and provides a high degree of process flexibility. The user has the ability to program dump cycle, fill cycles, start cascade and spray delay. In addition, our C15sa controller has the ability to be programmed for resistivity and incorporates an access code which prevents tampering with the program.

In order to rinse to resistivity, the DR Series is used in conjunction with the Modutek Resistivity Monitor RM30a (optional feature). The RM30a has the ability to monitor resistivity and temperature inside the DR series rinser as well as incoming water into the wet bench. Once resistivity setting is reached inside the Quick Dump Rinser the rinse cycle discontinues at the next full level. This results in a process specific rinse, ensuring that a minimal amount of DI water is used.

Modutek Quick Dump Rinser during full rinse cycleIn addition to all of these features Modutek’s Quick Dump Rinser is designed for new or used wet bench installations. With this design you can easily upgrade your old rinser and not incur the cost of a new wet bench. The water savings and the increased throughput will help cover the cost of the overall upgrade. If you would like to learn more about Modutek’s Quick Dump Rinser and how it can improve your wafer manufacturing process, call 866-803-1533 or email [email protected].

Wafer Processing Equipment Designed to Meet Your Requirements

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Wafer Processing Equipment Designed to Meet Your Requirements

Modutek Corporation has been a leader in the design and production of Wafer Processing Equipment for over 30 years. When you need to purchase high quality reliable Wafer Processing Equipment, turn to a company you can trust that has a long track record of experience and expertise.

Manufacturing semiconductor wafers for integrated circuits with continually reduced geometry sizes requires the use of Wafer Processing Equipment that provides highly reliable and consistent results. Modutek Corporation keeps abreast of the latest technology changes and implements this technology as needed in the semiconductor wafer processing equipment they design and manufacture. Whether your company manufactures semiconductors for medical, industrial, solar, military, or another industries, Modutek has silicon Wafer Processing Equipment that will meet your requirements.

  • Wet Processing Manual Stations are available in different configurations to support both solvent and acid applications. Some of the benefits of these manual wet processing stations include meeting or exceeding all current standards for safety, lower cost than semi and fully automated equipment and the equipment can be designed to meet your requirements.
  • Semi-Automated Stations can also be configured to meet your company’s needs. The robots included with the semi-automated Wafer Processing Equipment ensure uniform processing without the fully-automated price. If precise developing, cleaning and/or etching processes are important, take a closer look at the Semi-Automated Acid Station. Benefits of this equipment include SolidWorks Simulation Professional and Flow Simulation software which is developed in-house. We also include servo motor automation and automation controls with the ease of a touch screen.
  • Fully Automated Stations provide the high degree of automation for silicon wafer processing. To ensure you receive the best possible Wafer Processing Equipment for your application, our team of engineers will work closely with you from testing to final delivery. Not only can we design the best equipment to meet your requirements, our in-house software engineers will revise the SolidWorks Flow Simulation software to your specifications. With over 30 years of continuous operation and excellent customer support, you can trust Modutek Corporation to provide the right Wafer Processing Equipment for your needs.
  • The Rotary Wafer Etching System allows for automated batch processing for chemical etching, resist etching, developing, stripping or cleaning of semiconductor substrates. It uses a dual tank wet station in a compact design. After the initial preset process is complete, the system transfers the carrier assembly to the Quench-Quick Dump-Overflow rinse cycles. Some of the benefits of the Rotary Wafer Etching System include an automated wafer transfer from process to rinse that takes less than 3 seconds, along with a continuous rotation which is adjustable up to 80 rpm. Its compact design is also freestanding, and it can handle multiple wafer sizes.
  • Silicon Wafer Cleaning Equipment moved to the forefront of the semiconductor wafer technology market due to the increase of the wafer reclaim marketing in 2013. Modutek Corporation specializes in microelectronic cleaning and has provided semiconductor manufacturing and wafer cleaning equipment for more than 30 years.

When you need the right Wafer Process Equipment for your business’ needs, call us to discuss your requirements. We can provide a free quote on any of the equipment we manufacture. Call us today at 866-803-1533 or send an email to [email protected] for more information.