Wafer Processing Equipment -Semi-Automated Stations

Semi-Automated Acid Stations for clean room applications

Wafer Processing Equipment -Semi-Automated Station

Wafer Processing Equipment -Semi-Automated Station

Modutek’s Wafer Processing Equipment includes Semi-Automated Stations which are available in a wide verity of configurations. Our semi-automated robots gives you the process uniformity without paying the fully automated price. All robots are servo controlled with 3 degrees of freedom (see attached video). This motion control gives you precise developing, etching or cleaning processes. All robots are built and designed in-house giving you complete turnkey support. Our software engineers design and write the software in house. Our SolidWorks Simulation Professional and SolidWorks Flow Simulation gives you process flow characteristic you require. We do not outsource or subcontract our automation design. With this new line of automation Modutek has expanded the Sysmax Inc. line of automation. In 2002 Modutek acquired Sysmax Inc. and we continue supporting their complete product line of SPS Series, Vac Etch (VES) Series and Transfer Automation System (TAS) series equipment.

Wafer Processing Equipment -Semi Automated Station Video

 

Benefits:

Wafer Processing Equipment  Semi-Automated KOH Station

  • Automation control with touch screen
  • Servo motor automation
  • No outsourcing for robotic and software design
  • SolidWorks Simulation Professional software
  • SolidWorks Flow Simulation software

Features:

Semi-Automated Stainless Steel Station

  • White polypropylene construction
  • Available in any size and length to meet you requirement
  • All stations wired per NFPA 70 & 79
  • PCL with touch screen and GUI (graphic user interface)
  • Servo motor motors with encoder feed back
  • Emergency Power Off (EPO) with mushroom button and all safety interlocks
  • All process tanks with 1” lip exhaust
  • N2 head case purge
  • Photohelic with interlock to EPO
  • PVC safety shields
  • Teflon N2 gun and DI water hand spray
  • Continuous flow DI water manifold
  • Casters and leg levelers
  • One year warranty on all parts
  • 2 copies paper manual and one complete set of paperless

Options for Semi-Automated Stations:

Semi-Automated top deck view with auto lid

  • FM4910 (PVC-C) material of construction
  • Rear access design
  • Data logging
  • Remote access maintenance
  • Servo motor with pneumatics
  • In house SolidWorks Flow Simulator software with report and drawings including 3D model
  • In house SolidWorks Simulator Professional with reports and drawings including 3D model
  • Third party certification for NFPA 70 & 70
  • Semi standard, CE mark and NEC certification available
  • Seismic zone 4 structural certification
  • Fan Filter Units (HEPA)
  • Lift station designed into bench
  • Dedicated drains to carboy with DOT containment
  • Overhead deck lighting
  • Light tower (3-color)
  • Counter balance safety shields
  • Extended warranty available

Applications:

  • KOH Etching
  • Developing
  • SC1 & SC2
  • Megasonic Cleaning
  • BOE (Buffered Oxide Etching)

If you have any questions about our wafer processing equipment or semi-automated stations or need to discuss your requirements, call us at 866-803-1533.