Monthly Archives: December 2017

The Benefits of Using Modutek’s Quartz Tube Cleaning Stations

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The semiconductor wafer is the substructure on which the circuitry of every computer chip is laid down. Semiconductor wafers are fabricated in high-tech foundries, and require a precise, ultra-clean operation. One of the most basic requirements of a semiconductor wafer operation: reliably clean quartz tubes. Quartz tube cleaning stations are required equipment at every semiconductor foundry.

Most have several units stationed at different parts of the manufacturing process, each one specifically tuned and adjusted to the requirements of specific applications. Since the quartz tube cleaning process requires the use of corrosive chemicals, it takes an involved manufacturer and installer of quartz tube cleaning stations to design and install custom units for specific client needs.

How do quartz tube cleaning stations help?

Quartz tubes being delicate articles, cleaning them can be risk-prone. The ideal quartz tube cleaning process, therefore, minimizes human handling at every stage. This is the reason automated quartz tube cleaning stations are essential at any semiconductor wafer foundry.

With Modutek’s quartz tube cleaning stations, the handling of tubes during the cleaning process is mostly avoided — cleaning stations are designed to keep quartz tubes in motion while they are etched, and powerful nozzles direct water spray at the quartz tubes to maximize coverage Custom-designed cleaning stations come with many other options that can be applied to specific needs. Automated processes and nitrogen-drying can help in specific parts of the manufacturing process, for instance.

What do quartz tube cleaning stations look like?

The quartz tube cleaning stations designed and fabricated by Modutek are built out of white polypropylene. The cleaning processes are controlled by systems that can be turned to manual or automated mode, and units can be customized to specific height levels to perfectly fit the processes to which they are to be applied. Workers at these stations are protected from the acid cycle with PVC safety shields, and other standard features include hand-sprayers for deionized water, and Teflon guns for nitrogen use.

Clients are presented with a wide array of choices comes to customization. The station can be constructed out of FM 4910, or can include a hot nitrogen drying process as needed, for example. The right kind of holding tanks, automated bottle washers and other features can be designed and applied where necessary, and quality certifications required by third parties are arranged for, as well.

Automation Where it’s Needed

Modutek’s quartz tube cleaning stations can be designed and customized with optional automation for process lines that need it. From automated program recipes to tube roller systems, every part of the process can be made more efficient with automation. The operator merely monitors and controls the process through information presented on a screen, and can control various functions remotely. From bottle washing to drying, every part of the process is remotely monitored.

Automated processes do not actually require operator intervention. Processes, once they are set off, can go through to completion without operator input. Manual functions, when they are necessary in certain processes, can be remotely controlled at any point.

A process design that is set up to help the operator test different cycle times, is one of the most important parts of a properly designed automated system. Modutek offers a well-designed process to aid in testing. Once the right times are discovered, they can be locked in place to prevent accidental change

Modutek’s quartz tube cleaning stations, whether manual and automatic, are fully designed in-house. In-house design expertise helps ensure superior performance in any installation. With ultra-cleanliness being a basic requirement of the semiconductor fabrication process, customization to individual process needs is an absolute necessity for effective design. Modutek’s close control of the design of these appliances helps make it happen. Clients find Modutek’s complete, end-to-end support immensely helpful in the design of their lines. Whatever the application, Modutek has the expertise to evaluate, assess, design and deliver turnkey solutions.

 

Custom Fabrication Services for Unique Wafer Processing Requirements

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When research labs or semiconductor manufacturing facilities face special requirements for projects or for prototypes, they may need custom equipment to carry out their plans. Special tanks, stations or carriers may be required to make a particular semiconductor product. Modutek specializes in custom design and development and can meet all the customization needs of their customers. The company can produce special components, systems or processes as required and has certified fabricators for welding and plumbing to carry out the work.

Typical Applications

When new products are developed, single items are manufactured or prototypes are required for testing, existing wafer processing equipment may not be suitable for the job. Even when semiconductors are manufactured on a continuing basis, suppliers may change and the regulatory environment may impose additional requirements or change existing ones. In such cases, a custom solution to retrofit equipment, add new components or change parts may be the most appropriate and cost effective solution.

Semiconductor manufacturing facilities may want to implement customization in the absence of external changes. New technologies often make processes more efficient, less costly or they may result in higher quality output. Making minor changes in a process can speed up production and increase throughput. Tweaking the manufacturing process with customized components can result in better facility performance and can improve profitability.

Typical Customizations

While Modutek can accommodate all kinds of customer requests for special applications, there are many typical examples of changes required in existing equipment to let semiconductor manufacturers adapt their productions lines to current requirements. Modutek can examine the issues that make changes necessary and advise customers of the various possibilities that will satisfy their needs.

If a process has to be changed to allow implementation of a different sequence of fabrication steps, baths may have to be changed from static to re-circulating, heating may have to be added or the chemical delivery system may have to be changed. On the other hand, the main equipment may still be suitable but the monitoring system may have to be adapted, different sensors added and the software re-written.

Fully automated or semi-automated stations are very flexible but may have to be upgraded for new processes or new equipment may have to be integrated into the production line. Additional surface treatments, stress relief, thinning or texturing may be needed. Enhanced environmental regulations may require new treatment of waste and new safety standards may mean additional safety equipment.

When the process, regulations, outside requirements or raw material inputs change, customization of existing production lines to satisfy the new requirements is often the best and least expensive option. When deciding on how to proceed, it is important to have a partner who has experience and the required capabilities to explore all the options and present their advantages and disadvantages.

Modutek Can Help

With over 35 years of experience in wet bench technology, Modutek can advise customers what solutions are most appropriate for their needs and what level of customization is required. Modutek can draw on the company’s complete line of wafer processing equipment for semiconductor fabrication, but because all the equipment is designed and built in house, Modutek is also ideally situated to deliver custom solutions.

Modutek engineers have the experience and expertise to design and build customized equipment from the ground up. As a result, they know exactly what works best and how existing equipment can be modified. When it comes to software, Modutek developed its own SolidWorks simulation application and the company designs and writes all automation software for its fully automated and semi-automated stations. On both the hardware and software side, Modutek can help with custom solutions to meet any specialized requirements.