New SPM Process Provides 75% Improvement in Chemical Savings

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Earlier this year Modutek started implementing its new SPM process with automatic adjustment of the sulfuric peroxide mix concentration and the company now has benchmark results from real process applications. Normally the SPM mixture deteriorates continuously as the hydrogen peroxide turns to water and dilutes the concentration. The SPM mixture has to be completely replaced every eight hours or so at the outside. Costs are substantial for downtime during new mixture pour and for the replacement of the chemicals as well as for neutralizing and disposing of the corrosive mixture in an environmentally safe way. Trying to lengthen the period during which an SPM mixture can be used has been an ongoing process for many companies but without results that provide a safe and reliable alternative.

In the Modutek “Bleed and Feed” system, a “dirty” tank and a “clean” tank are used to continuously compensate for changes in the mixture concentration caused by the degradation of hydrogen peroxide. Periodically when needed, a programmable amount of mixture is drained from the dirty tank and another programmable amount of mixture is automatically transferred from the clean tank to the dirty tank. To compensate, an appropriate amount of sulfuric acid is added to the clean tank and both tanks receive enough hydrogen peroxide to restore the concentration. The “Bleed and Feed” process is designed to maintain the SPM mixture concentration automatically over extended periods.

Benchmark Results from a Real “Bleed and Feed” Application

One of Modutek’s customers that use their semiconductor manufacturing equipment now has real-life results from the use of the company’s “Bleed and Feed” SPM process improvements. The results show significant reductions in chemical use, downtime for re-pour and disposal volumes. Detailed results are based on a 2 6-inch carrier bath size with an 8-hour shift and are as follows:

  • Volume of sulfuric acid used reduced by 77%
  • Chemical disposal volume reduced by 75%
  • Acid neutralizer use reduced
  • Acid re-agent use and cost reduced
  • No downtime to drain and re-pour
  • System drains reduced from three times a day to once a week
  • Increased throughput
  • No original process result changes
  • Increased safety due to less operator interaction with dangerous chemicals

While other companies have tried to develop other SPM clean process improvements involving less chemical use, Modutek’s system is now proven to provide excellent results in real life applications and operate reliably.

Improved SPM Process in Custom Designed Systems

While Modutek has developed a greatly improved method for maintaining SPM process mixture concentrations and reducing chemical use, the new method can be applied in any custom-designed SPM process wet bench. Modutek designs and assembles wet bench products and semiconductor manufacturing equipment at their facility in San Jose, California and can supply systems that exactly meet its customers’ requirements.

Process engineers and facility managers concerned about the environmental impact of high toxic chemical use and the increasing costs of chemicals such as sulfuric acid can contact Modutek for a free quote or consultation to discuss solutions to these issues. Modutek can suggest wet bench systems and follow up with proposals from their complete line of wet bench products. If the SPM process is needed by a customer, Modutek now has the benchmark results on reduced chemical use and improved facility operation.

 

How Chemical Delivery Systems Are Designed to Meet Customer Requirements

how-chemical-delivery-systems-are-designed-to-meet-customer-requirements2Many industrial activities require the supply of a variety of chemicals for their manufacturing or production processes. Because the industrial process may include special procedures and the use of specific chemicals, chemical delivery systems often have to be custom-designed to exactly meet the needs of a facility. Typical custom requirements deal with the quantities of chemicals required, how often chemicals have to be changed, how accurate the delivery or the mix has to be and the repeatability of a specific process. Safe handling is an important issue when the chemicals delivered are hazardous, as is safe neutralization and safe disposal. Customized systems can address each of these issues and ensure that the critical requirements are satisfied while leaving out unimportant features for a cost-effective solution.

Delivery Volumes

The quantities of chemicals used greatly impacts the design of the chemical delivery system. Large totes remote from the process can continuously deliver large volumes over extended periods while local drums and tanks can deliver smaller volumes but can be changed when the process requires a different chemical or when a new production process is started. In each case, load or level sensing has to be available so production personnel can plan the required chemical delivery. Software allows operating personnel to predict flows and requirements so adequate supplies are available.

Precision and Repeatability

Different industrial processes have different requirements for precision. For example, research projects often have to record exactly what chemicals were used and their precise quantity. Some semiconductor manufacturing processes also require high precision but others don’t. Precision is linked to repeatability. If a process has to run exactly the same way each time, the level of precision for chemical delivery has to be the same for each run.

Custom design can guarantee that the levels of precision and repeatability required for a process can be achieved, but such features are expensive. Customization means critical requirements are met but if high precision is not required, costs are reduced to cover what is essential for the process.

Safe Handling and Disposal

Customization is especially important for safety because each chemical has its own hazards and each process presents different dangers. Customized chemical delivery systems provide an additional level of safety to employees in the handling the chemicals and operating the delivery systems for specialized applications. Custom designs look at measures such as double-walled containment, corrosion-resistant fluid paths and leak detection for safe handling. Neutralization and disposal requires a customized approach due to the different ways chemicals are used but also because of the different regulations for safe chemical disposal.

Custom Chemical Delivery Solutions from Modutek

Modutek has the experience, the product line and the customization capabilities to satisfy specific customer needs and deliver high-quality, reliable and safe chemical delivery systems. The company designs and assembles all systems in house at their factory in San Jose, California. Because of the presence of in-house expertise for all important subsystems including the chemical delivery software, Modutek can respond exactly to the customization requirements of each manufacturing or production facility and deliver custom solutions that respond to customer needs.

From tote, drum and tank storage possibilities through systems with high precision capabilities, Modutek can deliver the storage and repeatability features needed. The SolidWorks Simulation Professional and SolidWorks Flow Simulation software lets customers calculate precise mix and flow volumes. All chemical delivery systems are characterized by high levels of operator safety and special regulatory requirements for the disposal of toxic chemicals can be incorporated into the custom design as needed. With Modutek’s chemical delivery system designs, customers can be sure they are getting the systems they need. For a free quote or consultation contact Modutek at 866-803-1533 or email Modutek@Modutek.com.