Monthly Archives: February 2020

How Software Controls Support Unique Wet Processing Requirements

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Automated software control systems can help improve wet bench operations but the software has to be flexible to meet the unique needs of a wet processing application. Software controls increase dosage accuracy, timing reliability and process safety but process parameters or even the process itself can change as regulations tighten, customer requirements change and suppliers differ. The ideal automated process station is custom built to exactly match the requirements of a particular process while retaining the software programming capability to respond to production line changes.

User Interface

Modutek’s fully automated wafer fabrication equipment features touch screens with a graphical user interface (GUI). Operators can see the status of the manufacturing process and can start and stop steps if required. Because Modutek designs and programs its software in house, the company can respond to unique requirements at the software level and can add equipment to the GUI if the process changes.

Equipment Interface

Once the operator starts a process and the software program runs, the automated system has to output commands to the equipment on the production line. Modutek uses the SECS/GEM interface standard, which stands for SEMI Equipment Communications Standard/Generic Equipment Model.

SEMI is the Semiconductor Equipment and Materials International organization that developed the standard and defines the communication forms and messaging underlying the interaction of the software and the semiconductor manufacturing equipment. Using a common standard lets Modutek integrate other equipment into its production line designs and easily make changes to the software.

Automated Controllers

Controllers convert the input commands from the operators to corresponding output commands in the correct sequence to control process variables and the motion of the robotics. The sequence of commands is programmed into controllers such as PLC (programmable logic controllers) units that activate a command chain when the right input command is given. PLCs have the advantage that the programmable chains are easily re-programmed to meet changed requirements or equipment changes on the production line.

Because they design their own automation systems, Modutek can integrate higher level controllers such as Omron machine automation controllers or controllers from specific manufacturers such as Allen Bradley. Special controllers are often needed for unique functionality or for integration with existing systems.

Flow Simulation Software

Modutek’s SolidWorks Simulation Professional and SolidWorks Flow Simulation software is designed and programmed by the company’s software engineers to calculate chemical dosages and track chemical usage. The software ensures that the process environment for a particular batch is always the same, producing reliable etch rates and consistent throughput. When the process changes, the software can calculate new parameters and can automatically supply the right amounts of chemicals.

Vision Sensing

Fully automated wafer fabrication equipment can benefit from vision sensing with cameras and other optical sensors. The detected images have to be processed to identify the characteristics required by the system. Vision sensing can help with measurement, wafer or die alignment, quality inspection, sorting and mounting. For example, a coating could be inspected for continuity or products could be sorted according to defined properties. Modutek can integrate vision sensing into its fully automated wet process stations and help make sure the required functions work as desired.

Data Logging

The automated system can be programmed to output process variables to data logs that allow tracking chemical use, product quality, output and similar variables. The software sends the required data over Ethernet to create reports that operators and management can use for evaluating production line performance.

Modutek Designs Advanced Software Controls for Custom Applications

In 2020, Modutek is marking their 40th year of operation as a semiconductor equipment manufacturer and wet processing equipment supplier. The company’s success is due to innovation and continuous improvement in equipment and software to benefit their expanding customer base. For any wafer processing equipment needs contact Modutek for a free consultation or quote.

Why Custom Wafer Cassettes Are an Essential Part of Wet Bench Equipment

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Custom wafer cassettes made of specified materials or with specific physical characteristics are often needed in wet bench equipment for some applications. Research labs and universities may create unique semiconductor prototypes and start-ups may need sample semiconductors for testing. In each case, off-the-shelf carriers with the required characteristics are often not available. Custom wafer cassettes ordered in low volumes can meet the requirements of research and testing facilities and allow them to carry out the specialized silicon wafer fabrication they need.

Custom Wafer Cassettes are Needed for Research Applications

Research labs may need wafer carriers with unusual characteristics because they are testing new processes or using new materials. Universities may be trying to re-create a historical process or develop a new process that requires cassettes not commercially available. These organizations often need only a few of the custom cassettes to carry out their research and testing. The availability of custom wafer cassettes without a minimum order quantity is a key factor in the ability of the labs to carry out their research and testing.

Start-Ups Need Special Cassettes to Create Prototypes

When a start-up develops an innovative semiconductor product, off-the-shelf wafer cassettes may not be suitable because the product is not currently being produced commercially. The new product may require special processing and the wafer carriers used may have to use an innovative design or material as well. To produce different prototypes and test them in real-life situations, start-ups may need a series of custom wafer cassettes before they begin commercial production of their new product.

Up-graded Production Lines May Require Custom Cassettes

Modified production lines mean that some equipment has to be changed and other equipment adapted. Such modifications can take place as a result of changes in suppliers, updated regulatory requirements or new customer demands. Often parts of the production line are replaced or additional equipment is retrofitted. Large items such as tanks and baths may be kept but re-purposed. If wafer cassette operation is affected, new off-the-shelf cassettes may not be suitable and custom wafer cassettes, adapted to the new processing line, may be the best solution.

Modutek Can Provide Custom Wafer Cassettes

Modutek is a leading manufacturer of wet bench equipment that has in-house expertise to analyze customer requirements and deliver custom installations of the highest quality. With extensive experience in all aspects of wet bench technology, Modutek can offer equipment from its standard line of wet bench stations but can also meet special requirements because all equipment is designed and built in house. Once the details of an application are clear, Modutek can build the components so they meet any special requirements.

When custom wafer cassettes are needed, Modutek can design and build custom units as needed. The company has the capability to design and build special configurations and to use specific materials such as PFA Teflon, PFTE Teflon, PVDF and Natural Polypro. Custom carriers can hold between one and twenty-five wafers per carrier and carrier design can be optimized for a specific use. To emphasize its commitment to meeting the special needs of customers, Modutek does not require a minimum order quantity for custom wafer cassettes.

Semiconductor manufacturing is always complicated and a degree of customization is often needed to fulfill the requirements of a specific process. As the business environment of a semiconductor manufacturing facility changes, production lines have to be modified and the changed equipment has to be customized to fit the new configurations. Modutek can help identify such custom requirements and provide the corresponding custom equipment. Custom wafer cassettes are one specific case where Modutek can supply special components that are not otherwise available. Contact Modutek for a free consultation or quote on equipment needed for your specific requirements.