Monthly Archives: April 2020

Chemical Delivery Systems Designed to Meet Facility Requirements

Posted on by

Different semiconductor manufacturing facilities or other users of chemicals have varying needs. The chemical delivery requirements of large chip producers differ from those of small fabricators, custom shops or research facilities. Chemical delivery system capacity, equipment layout, the number of different chemicals and the specifications for quality, accuracy and quantity may all vary, depending on the facility and the application. Suppliers of chemical delivery systems need to be able to customize their equipment to satisfy the specific requirements of different facilities. Suppliers who manufacture their own equipment in house are best able to adapt their standard products to the needs of their customers more easily than those using third party manufacturers.

Storage, Delivery and Disposal Are Key System Functions

The operation of chemical delivery systems can be divided into storage, delivery and disposal functions. These functions are impacted by chemical volumes, number of chemicals and facility layout. For operations that need a large volume of chemicals, storage and delivery options are going to be different than for small operations. The space and equipment layout at a facility also determines how the key functions are executed. A competent supplier has to be able to evaluate all the relevant factors and requirements before designing and building the custom system.

For example, for large volumes of chemical usage, storage space for chemical totes and a load cell interface for tracking chemical use are required. If small volumes of chemical are used, storage can fit into small spaces close to the point of use. Similarly, disposal differs according to the volume of waste chemical generated. Waste liquids can be neutralized close to where the waste is generated or the waste liquids can be piped away for remote neutralization and disposal.

How Chemicals Are Used Impacts System Design

A facility that uses large volumes of a few chemicals will need only very simple controls while a production line that spikes with some chemicals and mixes others will require complex controls with high precision. Requirements for repeatability, accuracy and quality control all come into the specifications for the design and configuration of the system. Sometimes manual open loop controls are adequate but for other facilities fast, closed loop automation may be critical. Software, modeling and robotics are expensive and may not be required for some applications but may be necessary for others. The chemical delivery system provided to a facility needs to incorporate each of these specific requirements.

Safe Operation Depends on the Chemicals Used

While operator safety is paramount, the actual safety features required for an installation depend on the chemicals used. Non-hazardous chemicals may not need any special safety measures while highly inflammable solvents may require explosion-proof designs with the relevant National Electrical Code (NEC) and National Fire Protection Association (NFPA) certifications.

Safety measures for hazardous chemicals can include operational strategies to reduce worker exposure. For some applications, a degree of automation up to fully automatic systems can increase safety and reduce operator error. For others, less expensive solutions can include semi-automatic or manual systems with corresponding safety interlocks and automatic shut-down for dangerous conditions. In each case, the specific operating characteristics of the chemical delivery system have to be evaluated and a custom solution has to be designed and installed.

Modutek Can Customize Chemical Delivery Systems

Modutek designs and builds their own equipment down to programming their own software for chemical dosage and for automation. With extensive experience in the field of chemical delivery systems and in house design and manufacturing expertise, Modutek can customize their systems to the extent required. The resulting systems are safe to operate and they deliver top performance while responding exactly to customer needs. If you need a chemical delivery system for your facility, contact Modutek for a free consultation or quote.

How Specialized Manufacturing Equipment Provides Safety for Using Solvents

Posted on by

Semiconductor manufacturing solvent applications use specialized wet bench equipment to reduce the risk of fire and explosions from volatile solvents such as acetone. Solvents are used for operations that include stripping, cleaning and pattern transfers, and their inflammable nature means that the equipment has to meet stringent safety regulations. Safety measures focus on ensuring electrical components don’t ignite solvents or their vapors and operator safety through training. Additional safety measures include limiting access to sensitive areas and installation of fire extinguishing equipment. These safety measures provide integrated approach to solvent handling and use and ensure stainless steel solvent stations can be installed and operated safely in new fabrication lines or with existing equipment.

Special Features Satisfy Regulations and Keep Operators Safe

When working with inflammable solvents, safety regulations require specific features and additional operating measures to keep workers safe. These features can include the following:

• Design to hazardous location Class 1 Division 1 or Division 2 certification.

• Design electrical equipment to use low-power signals too weak to generate sparks that could set off an explosion.

• Use of carboys to collect solvent waste.

• Use of safety interlocks to ensure safe operation.

• Process monitoring with safety alarms for dangerous conditions.

• Detection of liquid spills.

• Emergency power off mushroom button.

• Wiring per NFPA 70 and 79.

• Auto lids to seal off chemical containers.

• Access controls to ensure only qualified personnel can operate the equipment.

• Gaseous automatic fire suppression systems such as those using carbon dioxide.

An experienced manufacturer of wet bench equipment incorporates these features in all their solvent station designs to make sure an integrated safety concept allows for safe operation.

Modutek’s Stainless Steel Solvent Stations Meet All Safety Requirements

Modutek manufactures the SFa and the Sa series of stainless steel solvent baths for solvent applications including IPA, acetone and resist strippers. The baths meet National Electrical Code Class 1 Division 1 Group D requirements for hazardous locations and are specially designed for safe operation. Made from 304 stainless steel, the baths are inert for the solvents used. The SFa bath is a temperature controlled recirculating bath while the Sa bath is constant temperature.

The baths both include all the required safety features for safe solvent operation. With NFPA 70 and 79 wiring, fire suppression, N2 head case purge, 1-inch lip exhaust and PVC safety shields, the baths are configured to keep workers safe. Operational safety is ensured with safety interlocks, an emergency off mushroom button, a Teflon N2 gun, a de-ionized water hand spray and a continuous flow de-ionized water manifold.

While maintaining a high level of safety, the stations deliver improved yields with fast heating and accurate temperature control. With an operating temperature of 30 to 100 degrees centigrade, heaters can achieve a temperature increase of up to 2 degrees centigrade per minute. Temperature control accuracy is plus/minus 1 degree centigrade for excellent process control and reproducibility.

Modutek’s solvent stations are available in fully automated, semi-automated or manual versions. The fully automated stations further increase safety by eliminating operator error, reducing spills and ensuring that a process runs with the correct dosages and timing. Semi-automated stations give customers the benefit of robotic operation without paying the price of full automation. Manual stations retain all the safety features but don’t include automation and are less expensive. Each station can be customized to exactly meet the specific requirements of the customer.

As a wet bench manufacturer with extensive experience in semiconductor manufacturing technology, Modutek can design and build both standard and customized equipment that is safe to operate while delivering top performance. Modutek can provide free consulting to help customers clearly define needs and then propose wet bench components, standard systems or custom installations that meet the highest safety standards.