How Quick Dump Rinsers Improve Silicon Wet Etching Processes

How Quick Dump Rinsers Improve Silicon Wet Etching ProcessesWhen silicon wafers in a wet etching process need rinsing, quick dump rinsers provide fast and effective rinsing of chemicals and particles. In semiconductor fabrication lines such as those of semiconductor manufacturers and research labs, silicon wafers are etched with chemicals. Once the required structures and current paths have been etched into the silicon, the chemicals have to be rinsed off to prevent continued etching. Modutek’s quick dump rinser uses de-ionized water to wash away all traces of chemicals while introducing no new sources of particle contamination. When rinsing is complete, the quick dump rinser drains rapidly. It combines excellent rinsing performance with fast processing and reduced particle counts.

What Makes a Quick Dump Rinser is Efficient and Effective?

Modutek has applied state-of-the-art engineering techniques to design a quick dump rinser that reduces de-ionized water consumption while featuring a short rinsing time and particle reduction. The large trap door and the contoured rinsing vessel shorten dump times and promote laminar flow to rinse away contaminants. The machined dump door has no seals or gaskets that could entrap particles and the smooth polypropylene construction of the tank ensures that it is not a source of new particle contamination.

When the silicon wafers are placed in the rinser, de-ionized water jets rinse the chemicals from the wafer surfaces. The tank fills, bringing the rinsed contaminants to the surface where they leave the tank through the overflow weir. A nitrogen bubbler generates gas bubbles that rise through the water, removing additional contaminants and particles. At the end of the rinse cycle, the trap door at the bottom of the tank opens to quickly drain the water. The whole process is fast and rinsing is complete without added contamination.

Quick Dump Rinsers Provide Substantial Benefits

The use of quick dump rinsers can improve production line performance and output quality. Modutek has designed its quick dump rinser to address wet process manufacturing concerns, including water use, rinsing effectiveness, particle counts and timing. When quick dump rinsers work rapidly, effectively removing chemicals and particles, throughput can increase and the product rejection rate can go down.

Fast rinsing reduces de-ionized water use. Modutek’s 360-degree overflow weir lets contaminated water exit the tank easily and reduces particle entrapment. Dual overhead spray manifolds and low misting nozzles improve rinsing performance with an even distribution of the spray. The nitrogen gas bubbler and tank design promote an even flow around the wafers and the large dump door drains the tank completely in seconds.

Key benefits include reduced costs, fewer product defects and faster production line operation. Reduced de-ionized water use lowers costs and an optional reclaim system can result in additional savings.

The tight packing of semiconductor structures and their decreasing size makes the process more and more sensitive to particle contamination. Even the tiniest particle can cause defects in the final product. Modutek’s quick dump rinser is designed to reduce particle counts and the product failure rate can decrease as a result.

Rinsing is required after many of the wet process production steps and any time saved with a quick dump rinser is multiplied by the number of times rinsing takes place in the semiconductor fabrication production line. The Modutek quick dump rinser delivers these benefits by addressing overall semiconductor manufacturing requirements.

Modutek Works to Improve the Silicon Wet Etching Process for Customers

In addition to quick dump rinsers, Modutek is committed to helping its customers with standard and custom silicon wet etching equipment. The company’s complete wet process product line includes quartz tanks, Teflon tanks and silicon nitride etch baths. Modutek offers free consultation and can ensure that the delivered systems fulfill the needs of its customers.

How Chemical Carts Support Chemical Disposal

How Chemical Carts Support Chemical DisposalWhen difficulties associated with chemical disposal and regulatory compliance increase, it’s time to think about either removing used chemicals for off-site disposal or using dedicated equipment for disposal according to official guidelines. Chemical carts can be rolled over to process stations and can pump used chemicals from the process tanks to a container on the cart. The used chemicals can then be turned over to a disposal company or can be neutralized and treated in an onsite facility. The manufacturing process can continue with a fresh batch of chemicals while documentation and handling of the used chemicals can be carried out according to local regulations.

Chemical Carts Remove Chemicals Quickly and Safely

Once the chemicals for a process step have fulfilled their function and the process step is complete, the used chemicals have to be drained from the process tank so that the next process batch can begin. The use of chemical handling equipment such as pump carts is a flexible solution allowing operators to remove used chemicals from the process tanks for different process steps.

An operator can roll the chemical pump cart to the tank that contains the used chemicals. A suction wand allows the operator to pump the chemicals out of the process tank. The used chemicals are pumped into a dedicated storage tank on the chemical pump cart and the cart can then be rolled out to a designated disposal area.

Depending on whether the company handles chemical neutralization and disposal in house or not, the chemicals can be transferred to a disposal system or turned over to an external chemical disposal specialist. In either case, documentation for the handling of chemicals according to local laws and regulations can be prepared before final disposal.

Modutek’s Chemical Carts Feature Ease of Use and Enhanced Safety

At 36″ long x 18″ wide x 42″ tall, Modutek’s chemical pump carts are compact and easy to roll out. Made of white polypropylene, the carts run on swivel casters with brakes and feature independent suction and discharge tubes. Pumping is with a 3/8th inch pneumatic pump. The five gallon chemical tank on the cart has a double containment system and is DOT (Department of Transportation) approved. A high level sensor on the tank is interlocked with the pump for additional safety. The plumbing is all Teflon and each cart can handle multiple applications.

As an option, chemical carts can be delivered in a stainless steel design for solvent applications. Other options include a pressure interlock safety switch, a large capacity tank and a double dump design. Modutek can help customers decide on the options they need and make sure that the chemical pump carts meet their requirements.

Modutek’s Chemical Handling Products Fulfill Manufacturing and Research Facility Needs

Modutek manufactures a complete line of chemical handling equipment to meet the needs of manufacturing plants and research facilities. In addition to chemical carts, Modutek’s chemical handling systems include chemical delivery systems, chemical collection systems and chemical lift stations. The systems can store chemicals, deliver them to process stations and remove them to neutralization areas. The chemical handling equipment is designed to interface with existing or new manufacturing lines and can be customized for almost any application. For example, storage in large tote containers with a load cell interface reduces drum changes and the lift station functions can be incorporated into a process station in a space-saving design. Throughout the design process, Modutek works closely with customers to identify production line issues and develop effective solutions. The company prioritizes customer satisfaction and delivers equipment of the highest quality with low operating costs and a low total cost of ownership. Contact Modutek for a free consultation or quote on selecting the right chemical handling equipment to meet your specific requirements.